Anisotropic conductive sheet and wafer inspection device
First Claim
1. An anisotropically conductive sheet comprising:
- an insulating sheet body, in which a through-hole extending in a thickness-wise direction thereof has been formed, and an elastic anisotropically conductive film arranged in the through-hole in the insulating sheet body and supported by the inner peripheral edge portion about the through-hole, wherein the insulating sheet body is composed of a material having a modulus of elasticity of 1×
108 to 1×
1010 Pa, a coefficient of linear thermal expansion of 3×
10−
6 to 3×
10−
5 K−
1 and a saturation magnetization lower than 0.1 wb/m2, wherein the elastic anisotropically conductive film is composed of a plurality of conductive path-forming portions each extending in a thickness-wise direction of the film and arranged along a plane direction of the film in a state separated from each other and an insulating portions formed between these conductive path-forming portions, the conductive path-forming portions are obtained by filling conductive particles having a number average particle diameter of 30 to 150 μ
m and exhibiting magnetism at a high density in an elastic polymeric substance, and a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, and wherein each of the conductive path-forming portions has a durometer hardness of 15 to 45, and an electric resistance between conductive path-forming portions adjacent to each other is at least 10 MΩ
.
2 Assignments
0 Petitions
Accused Products
Abstract
Disclosed herein are a wafer inspection apparatus which is small in size, prevented from shortening the service life of its circuit board for inspection, can collectively perform inspection as to a great number of electrodes to be inspected, has good electrical properties and can perform electrical inspection of high functional integrated circuits, and an anisotropically conductive sheet suitable for use in this wafer inspection apparatus. The anisotropically conductive sheet is composed of an insulating sheet body, in which a through-hole has been formed, and an elastic anisotropically conductive film arranged in the through-hole. The insulating sheet body is formed of a material having a modulus of elasticity of 1×108 to 1×1010 Pa, a coefficient of linear thermal expansion of 3×10−6 to 3×10−5 K−1 and a saturation magnetization lower than 0.1 wb/m2, the elastic anisotropically conductive film is composed of a plurality of conductive path-forming portions and insulating portions formed among these conductive path-forming portions, the conductive path-forming portions are obtained by filling conductive particles having a number average particle diameter of 30 to 150 μm, a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, each of the conductive path-forming portions has a durometer hardness of 15 to 45, and an electric resistance between conductive path-forming portions is at least 10 MΩ.
29 Citations
14 Claims
-
1. An anisotropically conductive sheet comprising:
-
an insulating sheet body, in which a through-hole extending in a thickness-wise direction thereof has been formed, and an elastic anisotropically conductive film arranged in the through-hole in the insulating sheet body and supported by the inner peripheral edge portion about the through-hole, wherein the insulating sheet body is composed of a material having a modulus of elasticity of 1×
108 to 1×
1010 Pa, a coefficient of linear thermal expansion of 3×
10−
6 to 3×
10−
5 K−
1 and a saturation magnetization lower than 0.1 wb/m2, whereinthe elastic anisotropically conductive film is composed of a plurality of conductive path-forming portions each extending in a thickness-wise direction of the film and arranged along a plane direction of the film in a state separated from each other and an insulating portions formed between these conductive path-forming portions, the conductive path-forming portions are obtained by filling conductive particles having a number average particle diameter of 30 to 150 μ
m and exhibiting magnetism at a high density in an elastic polymeric substance, and a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, and whereineach of the conductive path-forming portions has a durometer hardness of 15 to 45, and an electric resistance between conductive path-forming portions adjacent to each other is at least 10 MΩ
. - View Dependent Claims (3, 5, 7, 9, 11, 12, 13, 14)
-
-
2. An anisotropically conductive sheet comprising:
-
an insulating sheet body, in which a plurality of through-holes each extending in a thickness-wise direction thereof have been formed, and a plurality of elastic anisotropically conductive films arranged in the respective through-holes in the insulating sheet body and supported by the inner peripheral edge portions about their corresponding through-holes, wherein the insulating sheet body is composed of a material having a modulus of elasticity of 1×
108 to 1×
1010 Pa, a coefficient of linear thermal expansion of 3×
10−
6 to 3×
10−
5 K−
1 and a saturation magnetization lower than 0.1 wb/m2, whereineach of the elastic anisotropically conductive films is composed of a conductive path-forming portion extending in a thickness-wise direction of the film and an insulating portion formed about the conductive path-forming portion, the conductive path-forming portion is obtained by filling conductive particles having a number average particle diameter of 30 to 150 μ
m and exhibiting magnetism at a high density in an elastic polymeric substance, and a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, and whereinthe conductive path-forming portion in each of the elastic anisotropically conductive films has a durometer hardness of 15 to 45, and an electric resistance between the conductive path-forming portions adjacent to each other of elastic anisotropically conductive films is at least 10 MΩ
. - View Dependent Claims (4, 6, 8, 10)
-
Specification