Sensor design and process

• US 6,871,544 B1
• Filed: 03/16/2000
• Issued: 03/29/2005
• Est. Priority Date: 03/17/1999
• Status: Expired due to Term

• Current Assignee: Input/Output Incorporated
• Original Assignee: Input/Output Incorporated
• Inventors: Simon, Philip, Yu, Duli, Schmidt, Martin A., Marsh, James L., Goldberg, Howard D., Selvakumar, Arjun, Ip, Matthew, Fung, Bing-Fai
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US09/936,640
• Time in Patent Office: 1,839 Days
• Field of Search: 735/141.8, 735/141.7, 735/142.4, 735/142.3, 735/143.2, 735/141.6, 735/143.3, 735/143.4, 735/143.8, 361/280, 361/283
• US Class Current: 73/514.18
• CPC Class Codes: G01D 11/245 Housings for sensors
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01V 1/047 Arrangements for coupling the generator to the ground
• CPC Class Codes: G01V 1/053 for generating transverse waves
• CPC Class Codes: G01V 1/104 using explosive charges G01V1/157 takes precedence
• CPC Class Codes: G01V 1/181 Geophones
• CPC Class Codes: G01V 1/38 specially adapted for water-covered areas G01V1/28 takes precedence
• CPC Class Codes: Y10T 29/49007 Indicating transducer

Abstract

An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

Claims

1. An apparatus for detecting an environmental condition, comprising:

a housing;

a measurement mass wafer coupled to the housing, the measurement mass wafer being responsive to the environmental condition;

at least one cap wafer coupled to the housing;

a plurality of bumpers geometrically disposed on the cap wafer for providing the sensor overshock protection; and

at least one electrode coupled to the measurement mass wafer,

wherein the at least one electrode is adapted to reduce stiction during operation.

2. The apparatus of claim 1 wherein the environmental condition is acceleration.

3. The apparatus of claim 1, wherein the at least one cap wafer further comprises a top cap wafer and a bottom cap water that form a cavity, the measurement mass wafer further comprising a measurement mass housed at least partially within the cavity.

4. The apparatus of claim 3, wherein the top cap wafer includes a press frame recess.

5. The apparatus of claim 3, wherein the bottom cap wafer includes a press frame recess.

6. The apparatus of claim 3, wherein the measurement mass water further includes a passage for venting air from the cavity in the housing.

7. The apparatus of claim 6, wherein the passage comprises an approximately V-shaped groove in the measurement mass.

8. The apparatus of claim 1, wherein a portion of the at least one electrode includes a stiction-reducing pattern.

9. The apparatus of claim 8, wherein the electrode pattern includes one or more cavities for reducing stiction between the plurality of bumpers and the at least one electrode.

10. The apparatus of claim 8, wherein the electrode pattern includes one or more reduced-thickness recesses for reducing stiction between the plurality of bumpers and the at least one electrode.

11. The apparatus of claim 8, wherein the electrode portion pattern is selected from a group consisting of

i) a plurality of squares;

ii) a plurality of circles;

iii) a plurality of concentric circles;

iv) a plurality of rectangles; and

v) a series of geometrically arranged pie-shaped segments.

12. The apparatus of claim 1, wherein the plurality of bumpers are shaped as at least one of circles and ridges.

13. A method for protecting a sensor during operation, the sensor comprising a housing, a measurement mass wafer coupled to the housing for detecting an environmental condition, at least one cap wafer coupled to the housing and at least one electrode coupled to the measurement mass wafer, the method comprising;

providing overshock protection to the sensor using a plurality of bumpers geometrically disposed on the cap wafer; and

adapting the at least one electrode to reduce stiction during sensor operation.

14. The method of claim 13, wherein the environmental condition is acceleration.

15. The method of claim 13 further comprising using a stiction-reducing pattern on a portion of the at least one electrode to reduce stiction between the at least one electrode and the bumpers.

16. The method of claim 15, wherein the electrode pattern includes one or more cavities for reducing stiction between the plurality of bumpers and the at least one electrode.

17. The method of claim 15, wherein the electrode pattern includes one or more reduced-thickness recesses for reducing stiction between the plurality of bumpers and the at least one electrode.

18. The method of claim 15, wherein the electrode pattern is selected from a group consisting of

i) a plurality of squares;

ii) a plurality of circles;

iii) a plurality of concentric circles;

iv) a plurality of rectangles; and

v) a series of geometrically arranged pie-shaped segments.

19. The method of claim 13, wherein the plurality of bumpers are shaped as at least one of circles and ridges for reducing stiction between the bumpers and the at least one electrode.

20. An apparatus for detecting an environmental condition, comprising:

a housing;

a measurement mass wafer coupled to the housing, the measurement mass wafer being responsive to the environmental condition;

at least one cap wafer coupled to the housing;

one or more bumpers disposed on the cap wafer for providing the sensor overshock protection; and

one or more electrodes coupled to the measurement mass wafer,

wherein the one or more bumpers and the one or more electrodes are each patterned to reduce stiction during operation.

21. An apparatus for detecting an environmental condition, comprising:

a housing;

a measurement mass wafer coupled to the housing, the measurement mass wafer being responsive to the environmental condition;

at least one cap wafer coupled to the housing;

one or more bumpers disposed on the cap wafer for providing the sensor overshock protection; and

one or more electrodes coupled to the measurement mass wafer,

wherein the one or more bumpers are patterned as circles or ridges to reduce stiction during operation.