Valve with an integral orifice

• US 6,871,803 B1
• Filed: 06/05/2000
• Issued: 03/29/2005
• Est. Priority Date: 06/05/2000
• Status: Expired due to Term

• Current Assignee: Fujikin Incorporated, Tadahiro Ohmi
• Original Assignee: Fujikin Incorporated, Tadahiro Ohmi
• Inventors: Ohmi, Tadahiro, Yamaji, Michio, Hirose, Takashi, Ikeda, Nobukazu, Nishino, Kouji, Dohi, Ryousuke, Ideta, Eiji
• Primary Examiner(s): Hwu, Davis
• Application Number:
  US10/048,597
• Time in Patent Office: 1,758 Days
• Field of Search: 239/596, 239 88- 92, 239/95, 239/600, 2395851-5855, 239/533.2, 239/533.3, 239/533.14, 251/129.15, 251/129.21, 251/127
• US Class Current: 239/596
• CPC Class Codes: F16K 25/005 Particular materials for seats or closure elements
• CPC Class Codes: F16K 27/00 Construction of housing methods for welding housings B23K; Use of materials therefor
• CPC Class Codes: F16K 7/14 arranged to be deformed against a flat seat
• CPC Class Codes: F16K 7/16 the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
• CPC Class Codes: H04W 4/90 Services for handling of emergency or hazardous situations, e.g. earthquake and tsunami warning systems [ETWS]
• CPC Class Codes: H04W 48/12 using downlink control channel
• CPC Class Codes: H04W 74/006 in the downlink, i.e. towards the terminal
• CPC Class Codes: H04W 74/0833 Random access procedures, e.g. with 4-step access
• CPC Class Codes: H04W 76/50 for emergency connections

Abstract

A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

Claims

1. A valve with an integral orifice which comprises a valve main body made of heat-resisting materials in which a gas inflow passage and a gas outflow passage in communication with a valve chamber with an open upper end are formed, a valve seat body made of synthetic resin which is fitted in the valve chamber of the valve main body and provided with a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably fitted in the gas outflow passage of the valve seat body, and an orifice which is formed in the orifice disc and reduces the outflow passage of the valve seat body, wherein the orifice disc is formed in the shape of a plug and is screwed in the gas outflow passage of the valve sent body, and wherein an inner disc made of heat-resisting materials and provided with a gas inflow passage and a aperture for receiving the valve seat body is inserted into a valve chamber of the valve main body and the valve seat body fitted in the aperture for receiving the valve seat body is fixed airtight to the valve main body by pressing the outer circumferential portions of the inner disc from above.

2. A valve with an integral orifice as claimed in claim 1 wherein the orifice disc is provided at the centre part with a gas outflow passage in communication with the gas outflow passage of the valve seat body, formed in the shape of a thick round disc with a thin orifice plate being welded to the upper end surface thereof, accommodated in a concave part formed at the lower portion of the aforementioned valve seat body, and held between the valve seat body and the valve main body;

and the orifice is formed in the centre of the aforementioned orifice plate.

3. A valve with an integral orifice as claimed in claim 2 wherein an inner disc made of heat-resisting materials and provided with a gas inflow passage and a aperture for receiving the valve seat body is inserted into the valve chamber of the valve main body, and the valve seat body fitted in the aperture for receiving the valve seat body and the orifice disc accommodated into the concave part of the valve seat body are fixed airtight to the valve main body by pressing the outer circumferential portions of the inner disc from above.

4. A valve with an integral orifice as claimed in claim 3 wherein a clearance H₁ between the lower surface of the inner disc and the bottom surface of the valve chamber is larger than a clearance H₂ between the upper surface of the concave part of the valve seat body and the upper surface of the orifice disc when the inner disc, the valve seat body and the orifice disc are so assembled that the bottom surfaces of the valve seat body and the orifice disc come into contact with the bottom surface of the valve chamber.

5. A valve with an integral orifice as claimed in claim 1 wherein a clearance H₁ between the lower surface of the inner disc and the bottom surface of the valve chamber is larger than a clearance H₂ between the upper surface of the concave part of the valve seat body and the upper surface of the orifice disc when the inner disc, the valve seat body and the orifice disc are so assembled that the bottom surfaces of the valve seat body and the orifice disc come into contact with the bottom surface of the valve chamber.

6. A valve with an integral orifice as claimed in claim 1 wherein the orifice disc is formed in the shape of a thin plate, accommodated in the concave part formed in the lower part of the valve seat body, and held between the valve seat body and the valve main body;

and the orifice is formed in the centre of the aforementioned orifice disc.

7. A valve with an integral orifice as claimed in claim 1 wherein the orifice disc is formed in the shape of a plug and has a plug part to be fitted in the gas outflow passage of the valve seat body and a collar part to be received in a concave part formed at the lower portion of the valve seat body and held between the valve seat body and the valve main body;

and the orifice is formed in the plug part of the aforementioned orifice disc.

8. A valve with an integral orifice as claimed in claim 1 wherein the orifice disc is formed in the shape of a cylinder with a collar and comprises the plug part to be fitted in the gas outflow passage of the valve seat body, the collar part to be accommodated in the concave part formed in the valve seat body and held between the valve seat body and the valve main body, the gas outflow passage in communication with the gas outflow passage of the valve seat body, and the orifice plate fixed to the upper end of the plug part by welding;

and the orifice is formed in the orifice plate.

9. A valve with an integral orifice as claimed in claim 1 wherein the orifice disc comprises a thick, round disc provided with the gas outflow outlet in communication with the gas outflow passage and the orifice plate mounted thereupon, and is accommodated in the concave part formed at the lower part of the valve seat body and held between the valve seat body and the valve main body;

and the orifice is formed in the aforementioned orifice plate.

10. A valve with an integral orifice as claimed in claim 1, wherein the orifice disc is accommodated in a concave part of the valve seat body.

11. A valve with an integral orifice as claimed in claim 10, wherein a clearance H1 is provided between a lower surface of the inner disc and a bottom surface of the valve chamber.

12. A valve with an integral orifice, comprising:

a valve main body made of heat-resisting materials, wherein a gas inflow passage and a gas outflow passage are formed therein in communication with a valve chamber with an open upper end;

a valve seat body made of synthetic resin, wherein the valve seat body is fitted in the valve chamber of the valve main body, and the valve seat body is provided with a valve seat, and with a gas outflow passage formed in the valve seat body in communication with the gas outflow passage of the valve main body;

an orifice disc made of heat-resisting materials, wherein the orifice disc is formed in the shape of a plug and is removably fitted to screw in the gas outflow passage of the valve seat body;

the orifice is formed in the orifice disc, wherein the orifice is smaller than the outflow passage of the valve seat body;

an inner disc made of heat-resisting materials, wherein the inner disc is provided with a gas inflow passage and an aperture for receiving the valve seat body, and wherein the valve seat body is inserted into a valve chamber of the valve main body, and the valve seat body fits in the aperture for receiving the valve seat body; and

a diaphragm presser positioned to press a diaphragm to rest on the valve seat, wherein the valve seat body is fixed airtight to the valve main body by the diaphragm presser pressing the valve seat body from above so as to press the outer circumferential portions of the inner disc.

13. A valve with an integral orifice as claimed in claim 12, wherein the orifice disc is accommodated in a concave part of the valve seat body.

14. A valve with an integral orifice as claimed in claim 13, wherein the valve seat body and the orifice disc are fixed airtight to the valve main body by the diaphragm presser pressing the valve seat body from above so as to press the outer circumferential portions of the inner disc.

15. A valve with an integral orifice as claimed in claim 13, wherein a clearance H1 is provided between a lower surface of the inner disc and a bottom surface of the valve chamber.