Apparatus and method for large area chemical vapor deposition using multiple expanding thermal plasma generators

• US 6,872,428 B2
• Filed: 03/19/2002
• Issued: 03/29/2005
• Est. Priority Date: 06/11/2001
• Status: Expired due to Term

• Current Assignee: Sabic Innovative Plastics IP BV (Government of Saudi Arabia)
• Original Assignee: General Electric Company
• Inventors: Iacovangelo, Charles Dominic, Yang, Barry Lee-Mean, Browall, Kenneth Walter, Gasworth, Steven Marc, Johnson, James Neil, Morrison, William Arthur
• Primary Examiner(s): MEEKS, TIMOTHY HOWARD
• Application Number:
  US10/063,094
• Publication Number:
  US 20030072881A1
• Time in Patent Office: 1,106 Days
• Field of Search: 427/580, 427/579, 427/568, 427/255.37, 427/255.5
• US Class Current: 427/568
• CPC Class Codes: C23C 16/401 containing silicon
• CPC Class Codes: C23C 16/513 using plasma jets
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H05H 1/44 using more than one torch

Abstract

Chemical vapor deposition is performed using a plurality of expanding thermal plasma generating means to produce a coating on a substrate, such as a thermoplastic and especially a polycarbonate substrate. The substrate is preferably moved past the generating means. Included are methods which coat both sides of the substrate or which employ multiple sets of generating means, either in a single deposition chamber or in a plurality of chambers for deposition of successive coatings. The substrate surfaces spaced from the axes of the generating means are preferably heated to promote coating uniformity.

Claims

1. A method for coating a substrate which comprises generating a set of at least two expanding thermal plasma plumes to produce plasma enhanced chemical vapor deposition or PECVD of a coating on said substrate, each of said plumes in said set having a central axis, wherein said central axes of said plasma plumes are oriented parallel to each other and are perpendicular to a translation direction of the substrate:

and heating at least one portion of the substrate by a heating means other than the at least two expanding thermal plasma plumes, said heating means being located and adapted to heat regions spaced from the central axes of said plasma plumes.

2. The method according to claim 1, wherein the substrate is a thermoplastic substrate.

3. The method according to claim 2, wherein the thermoplastic is a polycarbonate.

4. The method according to claim 1, wherein the plasma is an argon or argon-organosiloxane plasma.

5. The method according to claim 4, wherein the coating is silica-based.

6. The method according to claim 1, wherein substrate regions spaced from the center axes of expanding thermal plasma generating means producing said coating are heated prior to or simultaneously with the coating operation.

7. The method according to claim 1, wherein a plurality of sets of plasma plumes is generated to deposit coatings on more than one side of said substrate.

8. The method according to claim 1, wherein a plurality of sets of plasma plumes is generated to deposit successive coatings on said substrate.

9. The method according to claim 1, wherein the substrate is planar.

10. The method according to claim 1, wherein the substrate is curved.

11. A method for coating a polycarbonate substrate the method comprising generating a plurality of sets of at least two expanding thermal plasma plumes, to produce successive coating:

on said polycarbonate substrate while moving said substrate past said sets of plumes, each of said plumes in said set being codirectionally oriented and perpendicular to a translation direction of the polycarbonate substrate;

said coatings being silica-based and the plasmas being argon or argon-oxygen plasmas; and

heating at least one portion of the polycarbonate substrate by a heating means other than the at least two expanding thermal plasma plumes, said heating means being located and adapted to heat regions spaced from the central axes of said plasma plumes.

12. A method of producing a plasma enhanced chemical vapor deposition coating on a substrate, the method comprising the steps of:

a) providing the substrate to the deposition chamber;

b) providing at least one set of expanding thermal plasma means, wherein the at least one set of expanding thermal plasma means comprises at least two expanding thermal plasma generating means that are codirectionally oriented and located outside and in fluid communication with a deposition chamber and wherein each of the plasma means are perpendicular to a translation direction of the substrate;

c) maintaining the at least one set of expanding thermal plasma means at a pressure that is greater than a pressure in the deposition chamber;

d) generating a plurality of plasmas within the at least one set of expanding thermal plasma means;

e) expanding the plurality of plasmas into the deposition chamber to form a plurality of expanding thermal plasma plumes directed toward the substrate, wherein each of the plurality of expanding thermal plasma plumes has a central axis, wherein the central axes of the plurality of expanding thermal plasma plumes are oriented parallel to each other; and

f) providing at least one reagent to the plurality of expanding thermal plasma plumes, wherein the at least one reagent interacts with the plurality of expanding thermal plasma plumes to form the plasma enhanced chemical vapor deposition coating on a substrate; and

g) heating at least one portion of the substrate by a heating means other than the plurality of expanding thermal plasma plumes, said heating means being located and adapted to heat regions spaced from the central axes of said plasma plumes.

13. The method according to claim 12, wherein the at least one portion of the substrate is located at a predetermined distance from the central axes.

14. The method according to claim 12, wherein the step of heating at least one portion of the substrate comprises heating the substrate to a substantially uniform temperature.