Methods of positioning and/or orienting nanostructures

• US 6,872,645 B2
• Filed: 09/10/2002
• Issued: 03/29/2005
• Est. Priority Date: 04/02/2002
• Status: Expired due to Term

• Current Assignee: ONED Material Incorporated
• Original Assignee: Nanosys Incorporated (Shoei Electronic Materials, Inc.)
• Inventors: Niu, Chunming, Duan, Xiangfeng, Romano, Linda T., Hamilton, James, Sahi, Vijendra, Daniels, Hugh
• Primary Examiner(s): Smith, Matthew
• Assistant Examiner(s): Anya, Igwe U.
• Application Number:
  US10/239,000
• Publication Number:
  US 20030186522A1
• Time in Patent Office: 931 Days
• Field of Search: 257/14, 257/39, 257/1, 257/E51.04, 257/103, 257/302, 438/584, 438/370, 438/99, 438/1, 438/49, 438/962, 438/745, 438/365, 438/377, 438/378, 438/969, 438/778
• US Class Current: 438/584
• CPC Class Codes: B01J 23/52 Gold
• CPC Class Codes: B81B 2203/0361 Tips, pillars
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81C 2203/057 Passive alignment techniques not provided for in B81C2203/054 - B81C2203/055
• CPC Class Codes: B81C 3/005 Passive alignment, i.e. without a detection of the position of the elements or using only structural arrangements or thermodynamic forces
• CPC Class Codes: B81C 99/008 separating the processed structure from a mother substrate
• CPC Class Codes: B82B 3/00 Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G11B 5/743 Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10K 10/701 Organic molecular electronic devices
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: Y10S 438/962 Quantum dots and lines
• CPC Class Codes: Y10S 977/762 Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
• CPC Class Codes: Y10S 977/856 : including etching/cutting
• CPC Class Codes: Y10S 977/857 : including coating
• CPC Class Codes: Y10S 977/858 : including positioning/mounting nanostructure
• CPC Class Codes: Y10S 977/89 : Deposition of materials, e.g. coating, cvd, or ald

Abstract

Methods of positioning and orienting nanostructures, and particularly nanowires, on surfaces for subsequent use or integration. The methods utilize mask based processes alone or in combination with flow based alignment of the nanostructures to provide oriented and positioned nanostructures on surfaces. Also provided are populations of positioned and/or oriented nanostructures, devices that include populations of positioned and/or oriented nanostructures, systems for positioning and/or orienting nanostructures, and related devices, systems and methods.

Claims

1. A method of depositing a population of nanowires on a surface of a substrate substantially in a desired orientation, comprising:

providing one or more fluid channels on the surface of the substrate, wherein at least one fluid channel has at least one of a widened region or a thinned region along a length of the channel;

flowing a first fluid containing nanowires over the surface in a first direction through the one or more fluid channels, the first direction being parallel to a desired longitudinal orientation of the nanowires; and

permitting a population of nanowires in the first fluid to become immobilized onto the surface, a longitudinal dimension of the nanowires from the first fluid being substantially oriented in the first direction.

2. The method of claim 1, comprising providing a plurality of microscale fluid channels over different regions of the surface of the substrate, and flowing the first fluid through each of the fluid channels in the first direction.

3. The method of claim 2, wherein at least one of the microscale fluid channels comprises a widened region, the nanowires preferentially immobilizing in the widened region.

4. The method of claim 2, wherein the step of providing a plurality of microscale fluid channels on the substrate surface comprises providing a manifold having at least first and second grooves disposed in its first surface, and mating the first surface of the manifold with the surface of the substrate to define a first and second enclosed channels on the first surface of the substrate.

5. The method of claim 2, wherein the step of providing a plurality of microscale fluid channels on the substrate surface comprises providing a layer of polymeric material on the substrate surface and defining the microscale fluid channels in the layer of polymeric material to provide fluidic communication to at least a portion of the substrate surface.

6. The method of claim 5, wherein the layer of polymeric material comprises a photoresist, and the step of defining the microscale fluid channels comprises exposing a portion of the layer of photoresist and developing the layer of photoresist to define the microscale fluid channels.

7. The method of claim 5, further comprising providing a cover layer over the layer of polymeric material to seal and enclose the microscale fluid channel, the cover layer comprising at least a first port disposed therethrough and positioned to provide fluid access to the microscale fluid channels.

8. The method of claim 7, wherein the photoresist comprises a positive photoresist.

9. The method of claim 1, wherein the permitting step comprises providing the first surface of the substrate as a functionalized first surface that is capable of binding the nanowires from the first fluid.

10. The method of claim 9, wherein the step of providing the first surface of the substrate as a functionalized first surface comprises providing functional groups on only a portion of the first surface.

11. The method of claim 10, wherein the portion of the first surface comprises one or more electrical contacts.

12. The method of claim 10, wherein the functional groups comprise protectable or deprotectable functional groups.

13. The method of claim 12, wherein the functional groups comprise photodeprotectable functional groups.

14. The method of claim 1, further comprising the step of providing at least first and second electrical contacts on the surface of the substrate, the first and second electrical contacts being separated by a first distance in the first direction on the first substrate, the first distance being less than an average length of the nanowires in the first fluid containing nanowires.

15. The method of claim 14, wherein the first and second electrical contacts are provided on the surface of the substrate before flowing the fluid containing the nanowires over the first surface.

16. The method of claim 14, wherein the first and second electrical contacts are provided on the surface of the substrate after the nanowires have been permitted to be immobilized on the first surface of the substrate.

17. The method of claim 1, further comprising:

functionalizing at least a first portion of the surface of the substrate, prior to flowing the first fluid containing the nanowires over the first surface in the first direction, whereby the nanowires immobilize to the first portion of the surface of the substrate that has been functionalized.

18. The method of claim 17, wherein the first fluid is flowed over a second portion of the surface of the substrate, the first portion of the surface and the second portion of the surface at least partially overlapping.

19. The method of claim 17, wherein the first surface of the substrate comprises at least one other circuit element to which nanowires are to be coupled.

20. The method of claim 19, wherein the at least one other circuit element comprises at least a first pair of electrical contacts.

21. The method of claim 20, wherein the first pair of electrical contacts comprises first and second metal contact regions on the surface of the substrate.

22. The method of claim 19, wherein the at least one other circuit element comprises a nanowire circuit element.

23. The method of claim 22, wherein the nanowire circuit element comprises doping different from doping in the nanowires in the first fluid.

24. The method of claim 19, wherein the circuit element comprises an integrated circuit element disposed on the substrate.

25. The method of claim 24, wherein the integrated circuit element comprises a nanoscale circuit element.

26. A method of positioning nanowires in one or more predetermined regions on a substrate, comprising:

providing a substrate having a first surface;

overlaying the first surface with a mask, the mask providing fluid access to one or more first predetermined regions on the first surface, but not to one or more second predetermined regions on the surface of the substrate, wherein the mask comprises at least one fluid passage having first and second regions of dissimilar dimension;

flowing fluid containing nanowires through the mask and into contact with the first predetermined regions of the substrate surface; and

permitting the nanowires contained in the nanowire containing fluid to immobilize in the first predetermined regions of the surface of the substrate.

27. The method of claim 26, wherein the step of providing the substrate comprising the first surface comprises providing the first surface as a functionalized surface capable of binding to the nanowires.

28. The method of claim 26, wherein the flowing step comprises flowing the fluid containing the nanowires over the first predetermined regions in a first direction to cause the nanowires to immobilize in the first predetermined regions on the surface of the substrate longitudinally oriented substantially in the first direction.

29. The method of claim 26, further comprising providing at least first and second electrical contacts in the one or more first predetermined regions, whereby one or more nanowires immobilize in contact with both the first and second electrical contacts in the first predetermined region.

30. The method of claim 29, wherein the first and second electrical contacts are provided in the first predetermined regions of the substrate before the nanowires are immobilized in the first predetermined regions.

31. The method of claim 29, wherein the first and second electrical contacts are provided in the first predetermined regions of the substrate after the nanowires are immobilized in the first predetermined regions.

32. A nanowire based device, comprising:

at least a first population of nanowires immobilized in at least a first region of a surface of a substrate, the first population of nanowires being substantially longitudinally oriented in a first direction;

at least first and second electrical contacts disposed on the first region of the surface of the substrate; and

wherein the first and second electrical contacts are separated from each other on the first surface of the substrate in the first direction by a distance that is less than 50% of an average length of the nanowires in the first population of nanowires.

33. The nanowire based device of claim 32, wherein at least one nanowire in the population of nanowires is positioned in contact with both the first and second electrical contacts.

34. The nanowire based device of claim 32, wherein the first and second electrical contacts are separated by a distance that is less than 10 μ

m.

35. The nanowire based device of claim 34, wherein the first and second electrical contacts are separated by a distance that is less than 1 μ

m.

36. The nanowire based device of claim 34, further comprising at least third and fourth electrical contacts separate from the first and second electrical contacts, and disposed on the first region of the first surface, wherein the third and fourth electrical contacts are separated from each other on the first surface of the substrate in the first direction by less than an average length of the nanowires in the population of nanowires.

37. The nanowire based device of claim 34, further comprising:

at least a second population of nanowires immobilized in at least a second region of the surface of the substrate, the second population of nanowires being substantially longitudinally oriented in a second direction;

at least third and fourth electrical contacts disposed on the second region of the surface of the substrate; and

wherein the third and fourth electrical contacts are separated from each other on the first surface of the substrate in the second direction by less than about 1 μ

m.

38. The nanowire based device of claim 34, further comprising:

at least a second population of nanowires immobilized in at least a second region of the surface of the substrate, the second population of nanowires being substantially longitudinally oriented in a second direction;

at least third and fourth electrical contacts separate from the first and second electrical contacts, and disposed on he first region of the first surface, wherein the third and fourth electrical contacts are separated from each other on the first surface of the substrate in the first direction by less than about 1 μ

m; and

at least fifth and sixth electrical contacts disposed on the second region of the surface of the substrate, wherein the fifth and sixth electrical contacts are separated from each other on the first surface of the substrate in the second direction by less than about 1 μ

m.

39. A system for orienting nanowires on a surface of a substrate, comprising:

a substrate having a first surface;

at least one fluid channel disposed on the first surface, wherein the at least one fluid channel comprises one or more of a widened region or a thinned region along a length of the channel corresponding to a position on the surface of the substrate where it is desired to position nanowires; and

a fluid direction system coupled to the at least one fluid channel and coupled to a source of fluid containing nanowires, for flowing the fluid containing nanowires in a first direction through the at least one fluid channel.

40. The system of claim 39, wherein the at least one fluid channel is defined in a first surface of a manifold, the first surface of the manifold being mated to the first surface of the substrate to dispose the fluid channel on the first surface of the substrate.

41. The system of claim 40, further comprising at least a second fluid channels disposed on the first surface of the substrate.

42. The system of claim 41, wherein the first and second fluid channels are fluidly coupled to a first fluid inlet port, the first fluid inlet port being fluidly coupled to the source of fluid containing nanowires.

43. A system for positioning nanowires on a substrate, comprising:

a substrate having a first surface;

a masking element disposed over the first surface and providing a plurality of fluid passages to one or more discrete regions of the first surface, wherein the masking element comprises a manifold having a plurality of fluid channels disposed therein, wherein one or more of the fluid channels comprises a widened region corresponding to a position on the surface of the substrate where it is desired to position nanowires, the widened region providing longer residence time within the widened region for a fluid flowing through the one or more fluid channels, the plurality of fluid channels having as at least one wall of the channels the one or more regions of the surface of the substrate, the fluid channels providing the one or more fluid passages to the first surface of the substrate;

a source of fluid containing nanowires fluidly coupled to the plurality of fluid passages on the masking element; and

a fluid direction system for delivering fluid from the fluid source to the plurality of fluid passages.

44. The system of claim 43, wherein one or more of the plurality of fluid channels comprises a thinned region that provides a shorter average diffusion distance between a fluid flowing through the thinned region of the one or more fluid channels and the surface of the substrate at the thinned region of the one or more fluid channels.

45. The system of claim 43, wherein the manifold comprises a flexible material.

46. The system of claim 45, wherein the flexible material comprises a polymeric material.

47. The system of claim 45, wherein the flexible material comprises PDMS.

48. A method of positioning nanostructures on a surface of a substrate, comprising:

contacting the surface of the substrate with a fluid containing the nanostructures;

establishing a standing wave through the fluid, the standing wave localizing nanostructures preferentially in first selected regions of the surface of the substrate and not in second selected regions of the substrate.