Optical semiconductor device
First Claim
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1. An optical semiconductor device comprising:
- a bias layer formed on a semiconductor substrate and made of a first conductivity type semiconductor;
a first optical waveguide formed on the bias layer, and having a stripe-like first core layer that is put between a first upper clad layer and a first lower clad layer made of the first conductivity type semiconductor;
a second optical waveguide formed on the bias layer to be put between a second upper clad layer, which is separated from the first upper clad layer, and a second lower clad layer made of the first conductivity type semiconductor, and having a stripe-like second core layer that is formed separately from the first core layer;
a first phase modulation electrode formed on the first upper clad layer of the first optical waveguide;
a second phase modulation electrode formed on the second upper clad layer of the second optical waveguide;
a first slot-line electrode formed on a side of the first optical waveguide and connected to the first phase modulation electrode via a first air-bridge wiring;
a second slot-line electrode formed on a side of the second optical waveguide and connected to the second phase modulation electrode via a second air-bridge wiring;
a first optical coupler formed over the semiconductor substrate and connected to respective one ends of the first optical waveguide and the second optical waveguide; and
a second optical coupler formed over the semiconductor substrate and connected to respective other ends of the first optical waveguide and the second optical waveguide.
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Abstract
There are provided first and second optical waveguides formed on a semiconductor substrate and having upper clad layers and core layers that are separated mutually respectively, first and second phase modulation electrodes formed on the first and second optical waveguides respectively, and first and second slot-line electrodes formed on the semiconductor substrate on both sides of the first and second optical waveguides and connected to the first and second phase modulation electrodes via air-bridge wirings separately respectively.
27 Citations
36 Claims
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1. An optical semiconductor device comprising:
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a bias layer formed on a semiconductor substrate and made of a first conductivity type semiconductor;
a first optical waveguide formed on the bias layer, and having a stripe-like first core layer that is put between a first upper clad layer and a first lower clad layer made of the first conductivity type semiconductor;
a second optical waveguide formed on the bias layer to be put between a second upper clad layer, which is separated from the first upper clad layer, and a second lower clad layer made of the first conductivity type semiconductor, and having a stripe-like second core layer that is formed separately from the first core layer;
a first phase modulation electrode formed on the first upper clad layer of the first optical waveguide;
a second phase modulation electrode formed on the second upper clad layer of the second optical waveguide;
a first slot-line electrode formed on a side of the first optical waveguide and connected to the first phase modulation electrode via a first air-bridge wiring;
a second slot-line electrode formed on a side of the second optical waveguide and connected to the second phase modulation electrode via a second air-bridge wiring;
a first optical coupler formed over the semiconductor substrate and connected to respective one ends of the first optical waveguide and the second optical waveguide; and
a second optical coupler formed over the semiconductor substrate and connected to respective other ends of the first optical waveguide and the second optical waveguide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An optical semiconductor device comprising:
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a bias layer formed on a semiconductor substrate and made of first conductivity type semiconductor;
a first optical waveguide formed on the bias layer, and having a stripe-like first core layer that is put between a first upper clad layer and a first lower clad layer made of the first conductivity type semiconductor and has a width equal to a beam diameter in an electric field distribution in a propagation basic mode of optical waveguides;
a second optical waveguide formed on the bias layer to be put between a second upper clad layer, which is separated from the first upper clad layer, and a second lower clad layer made of the first conductivity type semiconductor, and having a stripe-like second core layer that has a width equal to the beam diameter in the electric field distribution in the propagation basic mode of the optical waveguides;
a first phase modulation electrode formed on the first upper clad layer of the first optical waveguide;
a second phase modulation electrode formed on the second upper clad layer of the second optical waveguide;
a first slot-line electrode formed on a side of the first optical waveguide and connected to the first phase modulation electrode via a first air-bridge wiring;
a second slot-line electrode formed on a side of the second optical waveguide and connected to the second phase modulation electrode via a second air-bridge wiring;
a first optical coupler formed over the semiconductor substrate and connected to respective one ends of the first optical waveguide and the second optical waveguide; and
a second optical coupler formed over the semiconductor substrate and connected to respective other ends of the first optical waveguide and the second optical waveguide. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification