ESD protection for semiconductor products

• US 6,873,017 B2
• Filed: 05/14/2003
• Issued: 03/29/2005
• Est. Priority Date: 05/14/2003
• Status: Expired due to Fees

• Current Assignee: Semiconductor Components Industries LLC (ON Semiconductor Corporation)
• Original Assignee: Fairchild Semiconductor Corporation (ON Semiconductor Corporation)
• Inventors: Cai, Jun, Park, Steven, Sugerman, Alvin
• Primary Examiner(s): Pham, Long
• Assistant Examiner(s): Farahani, Dana
• Application Number:
  US10/438,349
• Publication Number:
  US 20040227190A1
• Time in Patent Office: 685 Days
• Field of Search: 257/355, 257/356, 257/357, 257/358, 257/359, 257/360, 257/361, 257/362, 257/363, 257/364, 257/365, 257/336, 257/339, 257/342
• US Class Current: 257/355
• CPC Class Codes: H01L 27/0266 using field effect transistors as protective elements
• CPC Class Codes: H01L 29/7833 with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's for thin film transistors H01L29/78618

Abstract

Device 60 in FIG. 3 has junctions 86 each with a lateral portion 90 and a second portion 92 extending upward toward the surface 12 from the lateral portion 90. The lateral portions 90, as illustrated in FIG. 3, are more or less formed along a plane parallel with the surface 12. The upwardly extending portions 92 include characteristic curved edges of the diffusion fronts which are associated with the planar process. With the regions 80 and 82 each having relatively high net dopant concentrations of different conductivity types, each lateral junction portion 90 includes a relatively large sub region 96 which extends more deeply into the layer 10. When compared to other portions of the junctions 86, the subregions 96 are characterized by a relatively low breakdown voltage so that ESD current is initially directed vertically rather than laterally.

Claims

1. A semiconductor product including a device configured along a planar surface of a semiconductor substrate of a first conductivity type to provide electrostatic discharge protection, said device comprising:

first and second spaced-apart diffusions of a second conductivity type each formed along the substrate surface and extending into the substrate to form a pn junction, one of said junctions having a lateral portion extending about a plane parallel to the substrate surface and a second portion extending from the lateral portion toward the substrate surface,

a sufficiently large region in the lateral portion having dopants of the first and second polarities for proving a substantially lower breakdown voltage than the second portion such that during conduction across the junction the maximum current density through the lateral portion is greater than the maximum current density through the second portion.

2. The device of claim 1 wherein a majority of the lateral portion has a substantially lower breakdown voltage than the second portion such that during an ESD event most of the conduction across the junction occurs through the lateral portion.

3. The device of claim 1 wherein the average current density through the lateral portion of the pn junction is greater than the average current density through the second portion of the pn junction.

4. The device of claim 1 wherein the lateral portion of each junction includes a diffusion region of the first conductivity type to establish a low breakdown voltage relative to the second portion of the junction.

5. The device of claim 1 wherein the pn junction depth is 0.1 micron to 0.7 micron below the surface.

6. The device of claim 1 wherein the pn junction depth is 0.3 micron to 0.5 micron below the surface.

7. The device of claim 1 wherein the first and second diffusions are formed with an As implant in the range of 1e15 to 6e15 cm−

2 at an energy between 30 keV and 160 keV.

8. The device of claim 1 wherein each diffusion is formed between a field oxide region and a gate structure on the substrate surface.

9. The device of claim 1 wherein the substrate includes first, second and third field oxide regions formed along the substrate surface with the first diffusion formed between the first and third field oxide region and the second diffusion formed between the second and third field oxide regions.

10. The device of claim 8 wherein each of the first and second diffusions is self-aligned with at least one of the field oxide regions.

11. The device of claim 1 wherein the lateral portion of the junction extends a distance ranging from 0.8 micron to 6 microns in a direction parallel with the planar substrate surface.

12. An ESD protection device configured along a planar surface of a semiconductor substrate of a first conductivity type to provide electrostatic discharge protection, said device comprising:

first and second spaced-apart diffusions of a second conductivity type formed along the substrate surface and extending into the substrate to form a pn junction,

one of said junctions having a lateral portion extending in directions parallel to the substrate surface and a second portion extending from the lateral portion toward the substrate surface,

the lateral portion including a sub region having a breakdown voltage which is substantially lower than the minimum breakdown voltage across the second portion of the junction, said region having a minimum lateral width of 0.55 microns and of sufficient area relative to the area of the entire pn junction to carry the majority of current when the pn junction conducts current during an ESD event.

13. The device of claim 12 wherein, on the side of the junction having a net conductivity of the first conductivity type, the net dopant concentration of the sub region is substantially greater than the net dopant concentration along the same side of the junction at the second portion of the junction.

14. The device of claim 12 wherein, when the junction is in a conduction mode, the majority of current flowing across the junction flows through the lateral portion.

15. The device of claim 12 wherein, when the junction is in a conduction mode, the majority of current flowing across the junction flows through the sub region.

16. A semiconductor product having an ESD protection device formed thereon, comprising:

a lightly doped semiconductor substrate of a first conductivity type having an upper surface formed along a plane;

a structure formed along the upper surface;

first and second source/drain regions of a second conductivity type, each formed in the surface and positioned on a different side of the structure, each forming a pn junction with the substrate, each pn junction including a lateral portion extending in directions parallel with the upper surface and a second portion extending from the lateral portion toward the surface;

an implanted region of the first conductivity type positioned to provide a relatively high dopant concentration along a lateral portion,

wherein, during an ESD event, said protection device is characterized by a net low resistance and high current flow through the lateral portion of the junction relative to the second portion of the junction.

17. The product of claim 16 wherein the structure formed along the upper surface is a FET gate structure.

18. The product of claim 16 wherein the structure formed along the upper surface is an electrically insulative isolation region.

19. The product of claim 16 wherein the structure formed along the upper surface is a field oxide isolation region.

20. The product of claim 16 configured as an integrated circuit and further including a first lightly doped region of the second conductivity type extending from the first source/drain region toward the structure;

a first silicide region contacting the first lightly doped region to form a Schottky barrier;

a second lightly doped region of the second conductivity type extending from the second source/drain region toward the gate; and

a second silicide region contacting the second lightly doped region to form a Schottky barrier,

so that during an ESD event, said protection device is characterized by a high current flow into the lateral portion of the junction and a low current flow through the second portion of the junction.