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High precision orientation alignment and gap control stages for imprint lithography processes

  • US 6,873,087 B1
  • Filed: 10/27/2000
  • Issued: 03/29/2005
  • Est. Priority Date: 10/29/1999
  • Status: Expired due to Term
First Claim
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1. A device to orientate a body with respect to a surface spaced-apart from said body, said device comprising:

  • a flexure system; and

    a body coupled to said flexure system, with said flexure system adapted to position said body in a desired orientation with respect to said surface and maintain said orientation in response to a force being exerted upon said body.

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