High precision orientation alignment and gap control stages for imprint lithography processes
First Claim
1. A device to orientate a body with respect to a surface spaced-apart from said body, said device comprising:
- a flexure system; and
a body coupled to said flexure system, with said flexure system adapted to position said body in a desired orientation with respect to said surface and maintain said orientation in response to a force being exerted upon said body.
4 Assignments
0 Petitions
Accused Products
Abstract
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.
432 Citations
27 Claims
-
1. A device to orientate a body with respect to a surface spaced-apart from said body, said device comprising:
-
a flexure system; and
a body coupled to said flexure system, with said flexure system adapted to position said body in a desired orientation with respect to said surface and maintain said orientation in response to a force being exerted upon said body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. A device to orientate a body with respect to a surface spaced-apart from said body, said device comprising:
-
a flexure system, said flexure system comprising a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation, said first axis extending transversely to said second axis; and
a body coupled to said flexure system, with said flexure system adapted to rotate said body about said first and second axes to position said body in a desired orientation with respect to said surface and maintain said orientation in response to a force being exerted upon said body, said force resulting from contact with a fluid material being compressed between said body and said surface, wherein movement of said body about said first axis is decoupled from movement of said body about said second axis. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A device to orientate a body with respect to a surface spaced-apart from said body, said device comprising:
-
a flexure system, said flexure system comprising a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation, said first axis extending transversely to said second axis, with said first axis being spaced-apart from said first flexure member and said second axis being spaced-apart from said second flexure member; and
a body coupled to said flexure system, with said flexure system adapted to rotate said body about said first and second axes to position said body in a desired orientation with respect to said surface and maintain said orientation in response to a force being exerted upon said body by contact with said surface, wherein movement of said body about said first axis is decoupled from movement of said body about said second axis. - View Dependent Claims (23, 24, 25, 26, 27)
-
Specification