Two-dimensional free-space optical wavelength routing element based on stepwise controlled tilting mirrors

• US 6,873,447 B2
• Filed: 07/03/2001
• Issued: 03/29/2005
• Est. Priority Date: 07/03/2001
• Status: Expired due to Fees

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: PTS Corporation
• Inventors: Buzzetta, Victor
• Primary Examiner(s): Phan, James
• Application Number:
  US09/899,001
• Publication Number:
  US 20030007226A1
• Time in Patent Office: 1,365 Days
• Field of Search: 359/201, 359/202, 359/212, 359223-226, 385 15- 16, 385/18, 385/24, 385/31, 385/39, 385/47, 385/52
• US Class Current: 359/223.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/29307 components assembled in or forming a solid transparent unitary block, e.g. for facilitating component alignment
• CPC Class Codes: G02B 6/2931 Diffractive element operating in reflection
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3558 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.

Claims

1. A microstructure for steering light, the microstructure comprising:

a structural film;

a pivot member connected with the structural film and supporting a base, the base including a reflective coating;

at least three noncollinear fixed rotational actuators connected with the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and

a movable hard stop connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position of such movable hard stop.

2. The microstructure recited in claim 1 wherein the movable hard stop comprises a plurality of discrete levels, each of which contacts the base in one of such plurality of tilt positions.

3. The microstructure recited in claim 1 wherein the movable hard stop is linearly actuated.

4. The microstructure recited in claim 1 further comprising a plurality of noncollinear movable hard stops connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position for each of such movable hard stops.

5. The microstructure recited in claim 4 wherein the number of movable hard stops is equal to the number of fixed rotational actuators.

6. The microstructure recited in claim 5 wherein a subset of the plurality movable hard stops are configured to move collinearly.

7. The microstructure recited in claim 6 wherein the movable hard stops in the subset are connected with each other.

8. The microstructure recited in claim 4 wherein each movable hard stop comprises a plurality of discrete levels, each of which contacts the base in at least one of such plurality of tilt positions.

9. The microstructure recited in claim 8 wherein each of such movable hard stops comprises the same number of discrete levels.

10. The micro structure recited in claim 4 wherein each of such movable hard stops is linearly actuated.

11. The microstructure recited in claim 1 wherein the pivot member comprises a post pivot.

12. The microstructure recited in claim 1 wherein the reflective coating comprises gold.

13. A method for fabricating a microstructure for steering light, the method comprising:

forming a pivot member on a structural film;

forming a base on the pivot member;

depositing a reflective coating on the base;

forming at least three noncollinear fixed rotational actuators over the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and

forming a movable hard stop over the structural film such that the base may assume a plurality of tilt positions by activating a selection of such fixed rotational actuators and moving the movable hard stop to a desired position.

14. The method recited in claim 13 wherein forming the movable hard stop comprises forming a plurality of movable hard stops over the structural film such that the base may assume a plurality of tilt positions by activating a selection of such fixed rotational actuators and moving the plurality of movable hard stops to desired positions.

15. The method recited in claim 14 wherein a subset of the plurality of movable hard stops are connected with each other.

16. The method recited in claim 14 wherein forming the plurality of movable hard stops comprises forming a plurality of discrete levels on at least one of such movable hard stops, wherein each of the discrete levels is configured to contact the base in at least one of such plurality of tilt positions.

17. The method recited in claim 14 wherein forming the plurality of movable hard stops comprising forming a plurality of discrete levels on each movable hard stop, wherein each of the discrete levels is configured to contact the base in at least one of such plurality of tilt positions.

18. The method recited in claim 13 wherein forming the pivot member comprises forming a post pivot.

19. A method for steering light from an input port to one of a plurality of output ports, the method comprising:

tilting a micromirror assembly among at least three tilt positions that correspond to three of the output ports, wherein a first and second of such at least three tilt positions define a tilt axis and a third of such at least three tilt positions includes a tilt component orthogonal to the tilt axis, and wherein tilting the micromirror assembly comprises moving a movable hard stop; and

reflecting light provided by such input port off the micromirror assembly to such one output port.

20. The method recited in claim 19 wherein tilting the micromirror assembly comprises moving a plurality of movable hard stops.

21. The method recited in claim 20 wherein at least one of the plurality of movable hard stops includes a plurality of discrete levels.

22. A method for defining alignment of a plurality of micromirror assemblies between input and output ports comprising, for each such micromirror assembly:

tilting the micromirror assembly to at least three different tilt positions, at least one of which has a tilt component orthogonal to a tilt axis defined by another pair of such tilt positions;

measuring an alignment acceptability for each such tilt position; and

determining which of such positions provides the greatest alignment acceptability.

23. The method recited in claim 22 wherein tilting the micromirror assembly comprises moving a hard stop.

24. The method recited in claim 22 wherein tilting the micromirror assembly comprises moving a plurality of movable hard stops.

25. The method recited in claim 24 wherein at least one of the plurality of movable hard stops includes a plurality of discrete levels.

26. A microstructure for steering light, the microstructure comprising;

support means;

micromirror means connected with the support means and tiltable to at least three tilt positions, wherein a first and second of such at least three tilt positions define a tilt axis and a third of such at least three tilt positions includes a tilt component orthogonal to the tilt axis, and wherein the micromirror means comprises movable hard stop means connected with the support means to define the at least three tilt positions.

27. The microstructure recited in claim 26 wherein the micromirror means comprises a plurality of movable stop means connected with the support means to define the at least three tilt positions.

28. The microstructure recited in claim 27 wherein at least one of the plurality of movable stop means comprises a plurality of discrete levels, each of which corresponds with one of the at least three tilt positions.

29. A wavelength router for receiving, at an input port, light having a plurality of spectral bands and directing subsets of the spectral bands to respective ones of a plurality of output ports, the wavelength router comprising:

a free-space optical train disposed between the input port and the output ports providing optical paths for routing the spectral bands, the optical train including a dispersive element disposed to intercept light traveling from the input port; and

a routing mechanism having at least one dynamically configurable routing element to direct a given spectral band to different output ports depending on a state of the dynamically configurable routing element, wherein the dynamically configurable routing element includes;

a micromirror assembly that includes a base connected with a structural film by a pivot member;

at least three noncollinear fixed rotational actuators connected with the structural film, each such fixed rotational actuator being configured to deflect the base towards the structural film upon activation; and

a movable hard stop connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position of such movable hard stop.

30. The wavelength router recited in claim 29 wherein the dynamically configurable routing element includes a plurality of movable hard stops connected with the structural film, wherein the base assumes one of a plurality of tilt positions according to which of such fixed rotational actuators is activated and according to a position for each of such movable hard stops.

31. The wavelength router recited in claim 30 wherein at least one of the plurality of movable hard stops includes a plurality of discrete levels, each of which contacts the base in at least one of such plurality of tilt positions.