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Non-dispersive mid-infrared sensor for vaporized hydrogen peroxide

  • US 6,875,399 B2
  • Filed: 05/10/2002
  • Issued: 04/05/2005
  • Est. Priority Date: 05/11/2001
  • Status: Expired due to Term
First Claim
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1. A method of microbial or chemical decontamination comprising:

  • exposing an item to be microbially or chemically decontaminated to a multi-component vapor which includes a gaseous oxidant and a second vapor component; and

    detecting the gaseous oxidant in the multi-component vapor including;

    directing light through the multi-component vapor, the directed light including light of at least a first wavelength range where the gaseous oxidant absorbs but at which the second vapor component does not significantly absorb, the first wavelength range including one or more wavelengths between about 7500 and 8400 nanometers, detecting the absorbance of light which has passed through the vapor in the first wavelength range, and determining the concentration of the gaseous oxidant in the multi-component vapor from the detected absorbance.

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