Laser machining device
First Claim
1. A laser machining device comprising:
- a first scanner for deflecting a traveling direction of a first laser beam to an arbitrary direction with a mirror;
a second scanner for deflecting traveling directions of a second laser beam and said first laser beam passing through said first scanner to arbitrary directions with mirrors; and
a lens for converging said second laser beam and said first laser beam passing through said second scanner.
1 Assignment
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Accused Products
Abstract
A laser machining device according to the invention is provided with a laser oscillator for generating a laser beam, a main deflecting galvannometer mirror, an Fθ lens, and a sub-deflecting means arranged in an optical path between the laser oscillator and the main deflecting galvanometer mirror. A means for splitting a laser beam is provided, and the sub-deflecting means is inserted into the optical path of one of the split laser beams. At the same time, both the split laser beams are incident from the same main deflecting galvannometer mirror to the Fθ lens, and a numerical aperture in the optical system constituted by the main deflecting galvannometer mirror, the Fθ lens, and an object is set to be not more than 0.08.
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Citations
18 Claims
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1. A laser machining device comprising:
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a first scanner for deflecting a traveling direction of a first laser beam to an arbitrary direction with a mirror;
a second scanner for deflecting traveling directions of a second laser beam and said first laser beam passing through said first scanner to arbitrary directions with mirrors; and
a lens for converging said second laser beam and said first laser beam passing through said second scanner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A laser machining device comprising:
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a first scanner for deflecting a traveling direction of a first laser beam to an arbitrary direction with a mirror;
a second scanner for deflecting traveling directions of a second laser beam and said first laser beam passing through at least said first scanner to arbitrary directions with a mirror; and
a third scanner for deflecting a traveling direction of said first laser beam passing through said first scanner to an arbitrary direction with a mirror; and
a lens for converging said second laser beam passing through said second scanner and said first laser beam passing through said first, second and third scanners. - View Dependent Claims (14, 15)
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16. A laser machining device comprising:
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a first scanner for deflecting a traveling direction of a laser beam to an arbitrary direction with a mirror;
a second scanner for deflecting a traveling direction of said laser beam passing through said first scanner to an arbitrary direction with a mirror; and
a lens for converging said laser beam passing through said second scanner, wherein an angle at which said laser beam is deflected by said first scanner being smaller than an angle at which said laser beam is deflected by said second scanner. - View Dependent Claims (17, 18)
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Specification