MEMS device having contact and standoff bumps and related methods
First Claim
Patent Images
1. A movable, MEMS component suspended over a substrate, the component comprising:
- (a) a structural layer having a movable electrode separated from the substrate by a gap; and
(b) at least one standoff bump attached to the structural layer and protruding through the movable electrode and extending into the gap for preventing contact of the movable electrode with a conductive material on the substrate when the component moves.
8 Assignments
0 Petitions
Accused Products
Abstract
MEMS Device Having Contact and Standoff Bumps and Related Methods. According to one embodiment, a movable MEMS component suspended over a substrate is provided. The component can include a structural layer having a movable electrode separated from a substrate by a gap. The component can also include at least one standoff bump attached to the structural layer and extending into the gap for preventing contact of the movable electrode with conductive material when the component moves.
-
Citations
55 Claims
-
1. A movable, MEMS component suspended over a substrate, the component comprising:
-
(a) a structural layer having a movable electrode separated from the substrate by a gap; and
(b) at least one standoff bump attached to the structural layer and protruding through the movable electrode and extending into the gap for preventing contact of the movable electrode with a conductive material on the substrate when the component moves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A MEMS device having standoff bumps, the device comprising:
-
(a) a substrate having a stationary electrode and a first stationary contact; and
(b) a movable component suspended above the substrate, the component comprising;
(i) a structural layer having a movable electrode and a movable contact, wherein the movable electrode is spaced from the stationary electrode by a first gap and the movable contact is spaced from the first stationary contact by a second gap; and
(ii) at least one standoff bump attached to the structural layer and protruding through the movable electrode and extending into the first gap for preventing the contact of the movable electrode with the stationary electrode. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
-
-
35. A MEMS switch having standoff bumps, the switch comprising:
-
(a) a substrate including a first and second stationary electrode and a stationary contact, wherein the stationary contact is positioned between the first and second stationary electrodes;
(b) a structural layer including a first and second end fixed with respect to the substrate and including first, second, and third portions having bottom surfaces, the bottom surfaces suspended over the substrate;
(c) a first movable electrode attached to the bottom surface of the first portion and spaced from the first stationary electrode by a first gap;
(d) a first standoff bump attached to the structural layer and extending into the first gap for preventing the contact of the first movable electrode with the first stationary electrode;
(e) a second movable electrode attached to the bottom surface of the second portion and spaced from the second stationary electrode by a second gap;
(f) a second standoff bump attached to the structural layer and extending into the second gap for preventing the contact of the second movable electrode with the second stationary electrode; and
(g) a movable contact attached to the bottom surface of the third portion and suspended over the stationary contact. - View Dependent Claims (36, 37, 38, 39, 40)
-
-
41. A MEMS switch having standoff bumps, the switch comprising:
-
(a) a substrate having a stationary electrode and a stationary contact;
(b) a movable, folded component suspended above the substrate, the component comprising;
(i) a structural layer having a bottom surface and including a first and second folded beam and a cantilever attached to attachment ends of the first and second folded beams;
(ii) a movable electrode separated from the substrate by a first gap;
(iii) at least one standoff bump attached to the structural layer and extending into the first gap for preventing contact of the movable electrode with conductive material on the substrate when the component moves toward the substrate; and
(iv) a movable contact spaced from the stationary contact by a second gap. - View Dependent Claims (42, 43)
-
-
44. A method of implementing an actuation function in a MEMS device having standoff bumps, the method comprising:
-
(a) providing a MEMS device having standoff bumps, the device comprising;
(i) a substrate having a stationary electrode;
(ii) a structural layer having a movable electrode spaced from the stationary electrode by a gap; and
(iii) at least one standoff bump attached to the structural layer and protruding through the movable electrode and extending into the first gap for preventing the contact of the movable electrode with the stationary electrode when the structural layer moves towards the stationary electrode; and
(b) applying a voltage between the movable electrode and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode across the gap, whereby the structural layer is moved toward the substrate and the at least one standoff bump contacts the stationary electrode.
-
-
45. A method for fabricating a movable, MEMS component having a standoff bump, comprising:
-
(a) depositing a sacrificial layer on a conductive component;
(b) forming a movable electrode on the sacrificial layer for spacing the movable electrode and the conductive component by a gap upon the removal of the sacrificial layer;
(c) forming a standoff bump in the sacrificial layer whereby the standoff bump extends into the gap between the movable electrode and the conductive component;
(d) depositing a structural layer on the movable electrode and the standoff bump; and
(e) removing the sacrificial layer to form a gap spacing the conductive component from the movable electrode whereby the standoff bump extends into the gap for preventing contact of the movable electrode with the conductive component when the moveable electrode moves. - View Dependent Claims (46, 47, 48)
-
-
49. A method for fabricating a MEMS device having a standoff bump, the method comprising:
-
(a) forming a stationary electrode on a substrate;
(b) depositing a sacrificial layer on the stationary electrode and the substrate;
(c) forming a movable electrode on the sacrificial layer for spacing the movable electrode and the stationary electrode by a gap upon the removal of the sacrificial layer;
(d) forming a standoff bump in the sacrificial layer whereby the standoff bump extends into the gap between the movable electrode and the stationary electrode formed by the removal of the a sacrificial layer;
(e) depositing a structural layer on the movable electrode and the standoff bump; and
(f) removing the sacrificial layer to form a gap spacing the stationary electrode and the movable electrode whereby the standoff bump extends into the gap for preventing contact of the movable electrode with a conductive material on the substrate when the structural layer moves towards the stationary electrode. - View Dependent Claims (50, 51, 52, 53, 54, 55)
-
Specification