Micromachined gyroscope
First Claim
1. Apparatus for detecting rotation about an axis, the apparatus comprising:
- a substrate;
a frame suspended above and substantially parallel to the substrate by a first plurality of suspension flexures disposed along an outer perimeter of the frame, the first plurality of suspension flexures affixed to the substrate and formed so as to substantially prevent translational movement of the frame relative to the substrate within a plane of the frame and to permit rotational movement of the frame about an axis perpendicular to the frame and the substrate; and
a plurality of resonator structures disposed within an inner perimeter of the frame, the resonator structures operating substantially within the plane of the frame.
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Accused Products
Abstract
A micromachined gyroscope makes use of Coriolis acceleration to detect and measure rotation rate about a plane normal to the surface of a substrate. Specifically, various resonating structures are suspended within a frame. The resonating structures include phase and anti-phase masses that are mechanically coupled in order to produce a single resonance frequency for the entire resonating system. Rotation of the micromachined gyroscope about the plane produces a rotational force on the frame. The frame is suspended in such a way that its motion is severely restricted in all but the rotational direction. Sensors on all sides of the frame detect the rotational deflection of the frame for measuring the change in direction.
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Citations
20 Claims
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1. Apparatus for detecting rotation about an axis, the apparatus comprising:
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a substrate;
a frame suspended above and substantially parallel to the substrate by a first plurality of suspension flexures disposed along an outer perimeter of the frame, the first plurality of suspension flexures affixed to the substrate and formed so as to substantially prevent translational movement of the frame relative to the substrate within a plane of the frame and to permit rotational movement of the frame about an axis perpendicular to the frame and the substrate; and
a plurality of resonator structures disposed within an inner perimeter of the frame, the resonator structures operating substantially within the plane of the frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification