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Vacuum pump

  • US 6,877,963 B2
  • Filed: 08/10/2001
  • Issued: 04/12/2005
  • Est. Priority Date: 09/02/2000
  • Status: Expired due to Fees
First Claim
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1. A vacuum pump comprising:

  • a stator;

    a rotor borne in the stator with a radial magnetic bearing and an axial magnetic bearing in a contactless manner, the axial magnetic bearing comprising;

    a magnet coil with a yoke iron on the stator, the magnet coil producing an axial magnetic field, an axially magnetized permanent magnet located approximately axially opposite the yoke iron on the rotor, such that the magnetic field of the magnet coil acts to attract and repel the rotor magnet in an axial direction depending on the polarization of the magnetic field of the magnetic coil, and a permanently axially magnetized compensating magnet compensating the magnetic field of the permanent magnet of the rotor and being polarized in opposite direction to the rotor magnet.

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