Ceramic substrate and process for producing the same

• US 6,878,907 B2
• Filed: 10/23/2002
• Issued: 04/12/2005
• Est. Priority Date: 02/25/2000
• Status: Expired due to Term

• Current Assignee: Ibiden Co., Ltd.
• Original Assignee: Ibiden Co., Ltd.
• Inventors: Ito, Yasutaka, Hiramatsu, Yasuji
• Primary Examiner(s): PAIK, SANG YEOP
• Application Number:
  US10/277,818
• Publication Number:
  US 20030042245A1
• Time in Patent Office: 902 Days
• Field of Search: 219/444.1, 219/460.1, 219/461.1, 219/465.1, 219/466.1, 219/467.1, 219/468.1, 219/543, 219/544, 219/546, 219/547, 219/548, 338/304, 338/308, 338/314, 118/724, 118/725
• US Class Current: 219/444.1
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H05B 3/143 applied to semiconductors, e.g. wafers heating H05B3/0047 takes precedence
• CPC Class Codes: H05B 3/265 the insulating base being an inorganic material, e.g. ceramic H05B3/262 takes precedence
• CPC Class Codes: H05B 3/74 Non-metallic plates , e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits

Abstract

It is a an object of the present invention to provide a ceramic substrate for a semiconductor producing/examining device which has high fracture toughness value, exellent thermal shock resistivity, high thermal conductivity and an excellent temperature rising and falling properties, and is preferable as a hot plate, an electrostatic chuck, a wafer prober and the like. A ceramic substrate, for a semiconductor producing/examining device, having a conductor formed inside thereof or on the surface thereof of the present invention is the ceramic substrate, wherein said ceramic substrate has been sintered such that a fractured section thereof exhibits intergranular fracture.

Claims

1. A ceramic heater comprising a ceramic substrate and a conductor layer formed inside said ceramic substrate, wherein

a section of an edge of the conductor layer has a peaked shape in a cross-section oriented normal to the plane of the conductor layer, and the thickness of the ceramic substrate is 25 mm or less.

2. A hot plate comprising the ceramic heater of claim 1.

3. The ceramic heater of claim 1, wherein the peak shaped section of the edge of the conductor layer has a width of 0.1 to 200 μ

m.

4. The ceramic heater of claim 1, wherein the peak shaped section of the edge of the conductor layer has a width of 5 to 100 μ

m.

5. The ceramic heater of claim 1, wherein the peak shaped section of the edge of the conductor layer has a radius of curvature of 0.5 to 500 μ

m.

6. The ceramic heater of claim 1, wherein the ceramic substrate has porosity of 5% or less.

7. The ceramic heater of claim 1, wherein the ceramic substrate has a maximum pore diameter of 50 μ

m or less.

8. The ceramic heater of claim 1, wherein the ceramic substrate comprises at least one ceramic selected from the group consisting of nitride ceramics, carbide ceramics, oxide ceramics, and mixtures thereof.

9. The ceramic heater of claim 8, wherein the ceramic substrate comprises at least one nitride ceramic selected from the group consisting of aluminum nitride, silicon nitride, boron nitride, and mixtures thereof.

10. The ceramic heater of claim 8, wherein the ceramic substrate comprises at least one carbide ceramic selected from the group consisting of silicon carbide, zirconium carbide, tantalum carbide, tungsten carbide, and mixtures thereof.

11. The ceramic heater of claim 8, wherein the ceramic substrate comprises at least one oxide ceramic selected from the group consisting of alumina, zirconia, cordiente, mullite, and mixtures thereof.

12. The ceramic heater of claim 8, wherein the ceramic substrate further comprises 0.1 to 5% by weight of oxygen.

13. The ceramic heater of claim 12, wherein the ceramic substrate further comprises at least one of yttria, alumina, rubidium oxide, lithium oxide, and calcium oxide.

14. The ceramic heater of claim 8, wherein the ceramic substrate further comprises 5 to 5000 ppm of carbon.

15. A process for making a ceramic heater, the process comprising

sintering a laminate comprising a conductor layer between a first ceramic green sheet and at least one additional ceramic green sheet;

and

producing the ceramic heater of claim 1.