Vacuum package fabrication of integrated circuit components

• US 6,879,035 B2
• Filed: 05/02/2003
• Issued: 04/12/2005
• Est. Priority Date: 05/02/2003
• Status: Expired due to Term

• Current Assignee: L-3 Communications Corporation (L3Harris Technologies, Inc.)
• Original Assignee: L-3 Communications Corporation (L3Harris Technologies, Inc.)
• Inventors: Gooch, Roland W., Syllaios, Athanasios J., Schimert, Thomas R.
• Primary Examiner(s): Zarabian, Amir
• Assistant Examiner(s): DUONG, KHANH B
• Application Number:
  US10/428,627
• Publication Number:
  US 20040219764A1
• Time in Patent Office: 711 Days
• Field of Search: 257/678, 257/684, 257/704, 257/723, 257/666, 257/667, 257/668, 257/787, 257/788, 257/789, 438/106, 438/107, 438/109, 438/125, 438/455, 438/456
• US Class Current: 257/704
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate

Abstract

A method for manufacturing integrated circuit device lids includes creating a lid cavity on the surface of a lid wafer, forming a sealing surface on the lid wafer that surrounds the lid cavity, and forming a trench on the lid wafer between the lid cavity and the sealing surface. The resulting structure uptakes excess sealing surface material and prevents such material from entering the lid cavity.

Claims

1. A lid for an integrated circuit device comprising:

a lid wafer having a sealing surface;

a cavity formed in the lid wafer;

a sealing structure disposed around the cavity for sealing the lid wafer to the device wafer, the sealing structure including a bonding adhesion structure coupled to the sealing surface of the lid wafer and a bonding layer coupled to the bonding adhesion structure such that the bonding layer is at least substantially separated from the sealing surface of the lid wafer by the bonding adhesion structure; and

an at least substantially continuous retaining structure formed in the sealing surface of the lid wafer and disposed around the cavity and between the cavity and the sealing structure for retaining excess material of the bonding layer and preventing the material of the bonding layer from entering the cavity, the retaining structure being defined in part by a pair of side walls extending at least substantially continuously around the cavity.

2. A lid for an integrated circuit device comprising:

a lid wafer having a sealing surface;

at least one cavity formed in the lid wafer;

at least one sealing structure disposed around one of the at least one cavities for sealing the lid wafer to a device wafer, each sealing structure including a bonding adhesion structure coupled to the sealing surface of the lid wafer and a bonding layer coupled to the bonding adhesion structure such that the bonding layer is at least substantially separated from the sealing surface of the lid wafer by the bonding adhesion structure;

at least one at least substantially continuous trench formed in the sealing surface of the lid wafer and disposed around the cavity and between the cavity and the sealing structure, the trench being defined in part by a pair of side walls extending at least substantially continuously around the cavity, wherein the trench is operable to uptake excess material of the bonding layer and prevent any material of the bonding layer from entering the cavity.

3. The lid of claim 2, wherein the at least one cavity comprises a plurality of cavities, each cavity surrounded by one of the at least one sealing structures.

4. The lid of claim 3, wherein one of the at least one trenches is disposed between each sealing structure and corresponding cavity.

5. The lid of claim 2, wherein the bonding layer is a solder layer.

6. The lid of claim 2, wherein the bonding layer is an adhesive.

7. The lid of claim 2, wherein the bonding layer is an indium compression seal.

8. The lid of claim 2, wherein the one or more cavities are formed by wet or dry isotropic etching.

9. The lid of claim 2, wherein the at least one trenches are formed by wet or dry isotropic etching.

10. The lid of claim 2, wherein the at least one trenches have a depth and width that are approximately equal.

11. The lid of claim 2, wherein the depth of each of the at least one trenches is determined by the width of a surface opening of each of the at least one trenches.

12. The lid of claim 2, wherein the each of the at least one cavities formed in the lid wafer is operable to receive an integrated circuit device such that at least a portion of the integrated circuit device extends into the cavity.

13. The lid of claim 2, wherein the each of the at least one cavities formed in the lid wafer is operable to receive a microelectromechanical systems (MEMS) device such that at least a portion of the MEMS device extends into the cavity.

14. A lid for an integrated circuit device, comprising:

a lid wafer, having one or more lid cavities on the surface thereof;

one or more sealing surfaces on the lid wafer disposed around the one or more cavities; and

at least one sealing structure disposed around one of the one or more lid cavities for sealing the lid wafer to a device wafer, each sealing structure including a bonding adhesion structure coupled to the sealing surface and a bonding layer coupled to the bonding adhesion structure such that the bonding layer is at least substantially separated from the sealing surface by the bonding adhesion structure;

wherein the lid wafer has one or more at least substantially continuous trenches formed therein, and wherein each trench is disposed around one of the lid cavities and between that lid cavity and one of the sealing surfaces, each trench being defined in part by a pair of side walls extending at least substantially continuously around its respective lid cavity.

15. The lid of claim 14, wherein the one or more lid cavities comprises a plurality of lid cavities.

16. The lid of claim 14, wherein the one or more trenches comprises a plurality of trenches.

17. The lid of claim 14, wherein the lid wafer comprises a window wafer, the window wafer being preformed with the one or more cavities and the one or more sealing structures.

18. The lid of claim 14, wherein the one or more trenches each have a depth and width that are approximately equal.

19. The lid of claim 14, wherein the depth of each of the one or more trenches corresponds to the width of a surface opening of the trench.