Displacement device

• US 6,879,063 B2
• Filed: 03/06/2003
• Issued: 04/12/2005
• Est. Priority Date: 09/02/1999
• Status: Expired due to Term

• Current Assignee: ASM Lithography Incorporated (ASML Holding NV), US Philips Corporation (Koninklijke Philips N.V.)
• Original Assignee: ASML Netherlands BV (ASML Holding NV), Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Peijnenburg, Antonius T.A., Frissen, Petrus C.M., Loopstra, Erik R., Compter, Johan C.
• Primary Examiner(s): MULLINS, BURTON S
• Application Number:
  US10/382,819
• Publication Number:
  US 20030155821A1
• Time in Patent Office: 768 Days
• Field of Search: 310/156, 310 12- 15, 310/17, 414/935, 250/492.1, 250/492.2
• US Class Current: 310/12.05
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling

Abstract

A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C₁, C₂), one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

Claims

1. A displacement device comprising a first part and a second part, at least one of which can be displaced with respect to the other in at least an X-direction and a Y-direction perpendicular thereto,

the part comprising an array of magnets arranged in accordance with a pattern of rows extending parallel to the X-direction and columns extending parallel to the Y-direction, the array of magnets comprising:

magnets of a first type, having a magnetization direction which extends at right angles to the X- and Y-directions and towards the second part, and magnets of a second type, having a magnetization direction which extends at right angles to the X- and Y-directions and away from the second part, said magnets of a first type and magnets of a second type being alternatively arranged in each row and each column, each of said magnets of the first and second types corresponding to one of the rows and one of the columns, and

magnets of a third type arranged between each pair of juxtaposed magnets of the first and the second type in each row and column, each magnet of a third type having a magnetization direction which extends in one of the X- and Y-directions,

wherein each of said magnets of the first and second types has a rectangular cross-section in a first plane extending in the X- and Y-directions, and

wherein each of said magnets of the third type has a cross-section in the first plane that is different from the cross-section of said magnets of the first and second types.

2. A displacement device as claimed in claim 1, wherein the ratio between the area of said cross-section of said magnets of the third type and the area of said cross-section of said magnets of the first and second types is included in the range of from 0.25 to 0.50.

3. A displacement device as claimed in claim 1,

wherein the second part includes an array of coils, the array of coils comprising a first set and a second set of coils of a first type and a coil of a second type, and

wherein the major axes of said coils of the first type are parallel to a first direction and perpendicular to the major axis of the coil of the second type, and

wherein a position of the first set of coils in a second plane parallel to the first plane is shifted in the first direction with respect to a corresponding position of the second set of coils in the second plane by a distance substantially equal to one-half of the magnet pole pitch,

the magnet pole pitch being the distance between (1) a first line connecting the center points in the first plane of consecutively adjacent magnets of the first type and (2) a second line connecting the center points in the first plane of consecutively adjacent magnets of the second type that are each juxtaposed to at least one of said consecutively adjacent magnets of the first type.

4. A displacement device as claimed in claim 1,

wherein the second part includes an array of coils comprising a coil of a first type and a coil of a second type, and

wherein the major axis of the coil of the first type is perpendicular to the major axis of the coil of the second type, and

wherein a length of each of said coil of a first type and said coil of a second type, measured along the corresponding major axis, is substantially equal to (2*i* the magnet pole pitch), where i is a positive nonzero integer,

the magnet pole pitch being the distance between (1) a first line connecting the center points in the first plane of consecutively adjacent magnets of the first type and (2) a second line connecting the center points in the first plane of consecutively adjacent magnets of the second type that are each juxtaposed to at least one of said consecutively adjacent magnets of the first type.

5. A placement machine comprising:

a machine frame; and

a placement head configured to place components on a printed circuit board,

wherein the placement head can be displaced using a displacement device as claimed in claim 1, wherein the first part of the displacement device is secured to the machine frame, while the placement head is secured to the second part of the displacement device.

6. The displacement device according to claim 1, wherein said cross-section of said magnets of the third type is rectangular.

7. The displacement device according to claim 1, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

8. The displacement device according to claim 1, wherein said cross-section of said magnets of the first and second types is square.

9. The displacement device according to claim 1, wherein the length of an edge of said cross-section of a magnet of the third type is substantially equal to the length of an adjacent edge of said cross-section of a magnet of one of the first and second types.

10. The displacement device according to claim 1, wherein the lengths in a direction perpendicular to the X- and Y-directions of at least one of the magnets of the first type, at least one of the magnets of the second type, and at least one of the magnets of the third type are substantially equal.

11. The displacement device according to claim 1, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

12. The displacement device according to claim 1, wherein the second part includes an array of coils.

13. The displacement device according to claim 12, wherein the array of coils is configured to conduct current to exert a corresponding force in a direction perpendicular to a surface of the first part.

14. The displacement device according to claim 13, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

15. The displacement device according to claim 13, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

16. The displacement device according to claim 12, wherein the array of coils comprises at least one coil of a first type and at least one coil of a second type, and

wherein a line parallel to a major axis of a coil of the first type is perpendicular to a line parallel to a major axis of a coil of the second type.

17. The displacement device according to claim 12, wherein a magnetic plate is attached to the second part, and

wherein the array of coils is positioned between the magnetic plate and the first part.

18. A lithographic apparatus comprising:

a frame;

a mask holder;

a substrate holder; and

a displacement device comprising a first part and a second part, at least one of which can be displaced with respect to the other in at least an X-direction and a Y-direction perpendicular thereto,

the first part comprising are array of magnets arranged in accordance with a pattern of rows extending parallel to the X-direction and columns extending parallel to the Y-direction, the array of magnets comprising;

magnets of a first type, having a magnetization direction which extends at right angles to the X- and Y-directions and towards the second part, and magnets of a second type, having a magnetization direction which extends at right angles to the X- and Y-directions and away from the second part, said magnets of a first type and magnets of a second type being alternately arranged in each row and in each column, each of said magnets of the first and second types corresponding to one of the rows and one of the columns, and

magnets of a third type arranged between each pair of juxtaposed magnets of the first and the second type in each row and column, each magnet of the third type having a magnetization direction which extends in one of the X- and Y-directions,

wherein each of said magnets of the third type has a non-square cross-section in a first plane extending in the X and Y directions, and

wherein each of said magnets of the first and second types has a cross-section in the first plane that is different from the cross-section of said magnets of the third type in the plane, and

wherein one of the first and second parts of the displacement device is secured relative to the frame, and wherein the other of the first and second parts is configured to move one among the mask holder and the substrate holder relative to the frame.

19. The lithographic apparatus according to claim 18, wherein the substrate holder is secured to the second part.

20. The lithographic apparatus according to claim 19, wherein the lithographic apparatus comprises a plurality of substrate holders.

21. The lithographic apparatus according to claim 18, wherein a magnetic plate is attached to the second part.

22. The lithographic apparatus according to claim 18,

wherein the displacement device is configured to move the mask holder relative to the frame, and

wherein the substrate holder is secured to an array of coils movable relative to the frame.

23. The lithographic apparatus according to claim 18, wherein said cross-section of said magnets of the third type is rectangular.

24. The lithographic apparatus according to claim 18, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

25. The lithographic apparatus according to claim 18, wherein said cross-section of said magnets of the first and second types is square.

26. The lithographic apparatus according to claim 18, wherein the length of an edge of said cross-section of a magnet of the third type is substantially equal to the length of an adjacent edge of said cross-section of a magnet of one of the first and second types.

27. The lithographic apparatus according to claim 18, wherein the lengths in a direction perpendicular to the X- and Y-directions of at least one of the magnets of the first type, at least one of the magnets of the second type, and at least one of the magnets of the third type are substantially equal.

28. The lithographic apparatus according to claim 18, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

29. The lithographic apparatus according to claim 18, wherein the second part includes an array of coils.

30. The lithographic apparatus according to claim 29, wherein the array of coils is configured to conduct current and to exert a corresponding force in a direction perpendicular to a surface of the first part.

31. The lithographic apparatus according to claim 30, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

32. The lithographic apparatus according to claim 30, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

33. The lithographic apparatus according to claim 29, wherein the array of coils comprises at least one coil of a first type and at least one coil of a second type, and

wherein a line parallel to a major axis of a coil of the first type is perpendicular to a line parallel to a major axis of a coil of the second type.

34. The lithographic apparatus according to claim 29, wherein a magnetic plate is attached to the second part, and

wherein the array of coils is positioned between the magnetic plate and the first part.

35. The lithographic apparatus according to claim 18, said apparatus comprising a projection system configured to project a beam of radiation patterned by a mask held by said mask holder onto a substrate held by said substrate holder.

36. The lithographic apparatus according to claim 35, said apparatus comprising a radiation source configured to provide a beam of radiation that is directed onto a mask held by said mask holder.

37. A displacement device comprising a first part and a second part, at least one of which can be displaced with respect to the other in at least an X-direction and a Y-direction perpendicular thereto,

the first part comprising an array of magnets arranged in accordance with a pattern of rows extending parallel to the X-direction and columns extending parallel to the Y-direction, the array of magnets comprising:

magnets of a first type, having a magnetization direction which extends at right angles to the X- and Y-directions and tow the second part, and magnets of a second type, having a magnetization direction which extends at right angles to the X- and Y-directions and away from the second part, said magnets of a first type and magnets of a second type being alternately arranged in each row and in each column, each of said magnets of the first and second types corresponding to one of the rows and one of the columns, and

magnets of a third type arranged between each pair of juxtaposed magnets of the first and the second type in each row and column, each magnet of the third type having a magnetization direction which extends in one of he X- and Y-directions,

wherein each of said magnets of the third type has a non-square cross-section in a first plane extending in the X and Y directions, and

wherein each of said magnets of the first and second types has a cross-section in the first plane that is different from the cross-section of said magnets of the third type in the plane.

38. The displacement device according to claim 37, wherein the ratio between the area of said cross-section of said magnets of the third type and the area of said cross-section of said magnets of the first and second types is included in the range of from 0.25 to 0.50.

39. The displacement device according to claim 37, wherein the second part includes an array of coils, the array of coils comprising a first set and a second set of coils of a first type and a coil of a second type, and

wherein the major axes of aid coils of the first type are parallel to a first direction and perpendicular to the major axis of the coil of the second type, and

wherein a position of the first set of coils in a second plane parallel to the first plane is shifted in the first direction with respect to a corresponding position of the second set of coils in the second plane by a distance substantially equal to one-half of the magnet pole pitch,

the magnet pole pitch being the distance between (1) a first line connecting the center points in the first plane of consecutively adjacent magnets of the first type and (2) a second line connecting the center points in the first plane of consecutively adjacent magnets of the second type that are each juxtaposed to at least one of said consecutively adjacent magnets of the first type.

40. The displacement device according to claim 37, wherein the second part includes an array of coils comprising a coil of a first type and a coil of a second type, and

wherein the major axis of the coil of the first type is perpendicular to the major axis of the coil of the second type, and

wherein a length of each of said coil of a first type and said coil of a second type, measured along the corresponding major axis, is substantially equal to (2*i* the magnet pole pitch), where i is a positive nonzero integer,

the magnet pole pitch being the distance between (1) a first line connecting the center points in the first plane of consecutively adjacent magnets of the first type and (2) a second line connecting the center points in the first plane of consecutively adjacent magnets of the second type that are each juxtaposed to at least one of said consecutively adjacent magnets of the first type.

41. The displacement device according to claim 37, wherein said cross-section of said magnets of the third type is rectangular.

42. The displacement device according to claim 37, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

43. The displacement device according to claim 37, wherein said cross-section of said magnets of the first and second types is square.

44. The displacement device according to claim 37, wherein the length of an edge of said cross-section of a magnet of the third type is substantially equal to the length of an adjacent edge of said cross-section of a magnet of one of the first and second types.

45. The displacement device according to claim 37, wherein the lengths in a direction perpendicular to the X- and Y-directions of at least one of the magnets of the first type, at least one of the magnets of the second type, and at least one of the magnets of the third type are substantially equal.

46. The displacement device according to claim 37, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

47. The displacement device according to claim 37, wherein the second part includes an array of coils.

48. The displacement device according to claim 37, wherein the array of coils is configured to conduct current and to exert a corresponding force in a direction perpendicular to a surface of the first part.

49. The displacement device according to claim 48, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

50. The displacement device according to claim 48, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

51. The displacement device according to claim 47, wherein the array of coils comprises at least one coil of a first type and at least one coil of a second type, and

wherein a line parallel to a major axis of a coil of the first type is perpendicular to a line parallel to a major axis of a coil of the second type.

52. The displacement device according to claim 47, wherein a magnetic plate is attached to the second part, and

wherein the array of coils is positioned between the magnetic plate and the first part.

53. A lithographic apparatus comprising:

a frame;

a mask holder;

a substrate holder; and

a displacement device comprising a first part and a second part, at least one of which can be displaced with respect to the other in at least an X-direction and a Y-direction perpendicular thereto,

the first part comprising an array of magnets arranged in accordance with a pattern of rows extending parallel to the X-direction and columns extending parallel to the Y-direction, the array of magnets comprising;

magnets of a first type, having a magnetization direction which extends at right angles to the X- and Y-directions and towards the second part, and magnets of a second type, having a magnetization direction which extends at right angles to the X- and Y-directions and away from the second part, said magnets of a first type and magnets of a second type being alternately arranged in each row and in each column, each of said magnets of the first and second types corresponding to one of the rows and one of the columns, and

magnets of a third type arranged between each pair of juxtaposed magnets of the first and the second type in each row and column, each magnet of the third type having a magnetization direction which extends in one of the X- and Y-directions,

wherein each of said magnets of the third type has a non-square cross-section in a first plane extending in the X and Y directions, and

wherein each of said magnets of the first and second types has a cross-section in the first plane that is different from the cross-section of said magnets of the third type in the plane, and

wherein one of the first and second parts of the displacement device is secured relative to the frame, and wherein the other of the first and second parts is configured to move one among the mask holder and the substrate holder relative to the frame.

54. The lithographic apparatus according to claim 53, wherein the substrate holder is secured to the second part.

55. The lithographic apparatus according to claim 54, wherein the lithographic apparatus comprises plurality of substrate holders.

56. The lithographic apparatus according to claim 53, wherein a magnetic plate is attached to the second part.

57. The lithographic apparatus according to claim 53,

wherein the displacement device is configured to move the mask holder relative to the frame, and

wherein the substrate holder is secured to an array of coils movable relative to the frame.

58. The lithographic apparatus according to claim 53, said apparatus comprising a projection system configured to project a beam of radiation patterned by a mask held by said mask holder onto a substrate held by said substrate holder.

59. The lithographic apparatus according to claim 58, said apparatus comprising a radiation source configured to provide a beam of radiation that is directed onto a mask held by said mask holder.

60. The lithographic apparatus according to claim 53, wherein said cross-section of said magnets of the third type is rectangular.

61. The lithographic apparatus according to claim 53, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

62. The lithographic apparatus according to claim 53, wherein said cross-section of said magnets of the first and second types is square.

63. The lithographic apparatus according to claim 53, wherein the length of an edge of said cross-section of a magnet of the third type is substantially equal to the length of an adjacent edge of said cross-section of a magnet of one of the first and second types.

64. The lithographic apparatus according to claim 53, wherein the lengths in a direction perpendicular to the X- and Y-directions of at least one of the magnets of the first type, at least one of the magnets of the second type, and at least one of the magnets of the third type are substantially equal.

65. The lithographic apparatus according to claim 53, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

66. The lithographic apparatus according to claim 53, wherein the second part includes an array of coils.

67. The lithographic apparatus according to claim 66, wherein the array of coils is configured to conduct current and to exert a corresponding force in a direction perpendicular to a surface of the first part.

68. The lithographic apparatus according to claim 67, wherein a ratio between the lengths of two sides of said cross-section of said magnets of the third type is included in the range of from 0.25 to 0.50.

69. The lithographic apparatus according to claim 67, wherein the second part is configured to be displaced with respect to the first part in at least the X- and Y-directions while beneath the first part.

70. The lithographic apparatus according to claim 66, wherein the array of coils comprises at least one coil of a first type and at least one coil of a second type, and

wherein a line parallel to a major axis of a coil of the first type is perpendicular to a line parallel to a major axis of a coil a the second type.

71. The lithographic apparatus according to claim 66, wherein a magnetic plate is attached to the second part, and

wherein the array of coils is positioned between the magnetic plate and the first part.