Damped longitudinal mode optical latching relay

• US 6,879,089 B2
• Filed: 04/14/2003
• Issued: 04/12/2005
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Fong, Arthur, Wong, Marvin Glenn
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US10/412,894
• Publication Number:
  US 20040201310A1
• Time in Patent Office: 729 Days
• Field of Search: 310/328, 310/333, 310/344, 310/348, 200/182, 200/211, 200187-189, 200/212, 200/214, 200/215, 200/219
• US Class Current: 310/328
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay

Abstract

A piezoelectric optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Claims

1. A piezoelectric optical relay, comprising:

a relay housing containing a switching channel;

a first optical path passing through the switching channel;

a solid slug adapted to move within the switching channel;

a first piezoelectric actuator operable to impart an impulsive force to the solid slug to move the solid slug to a first position within the switching channel to block the first optical path; and

a second piezoelectric actuator operable to impart an impulsive force to the solid slug to move the solid slug to a second position within the switching channel to unblock the first optical path.

2. A piezoelectric optical relay in accordance with claim 1, further comprising:

a pressure relief channel; and

first and second pressure relief vents opening to and connecting the ends of the switching channel to the pressure relief channel and adapted to relieve pressure in the switching channel when the solid slug is moved.

3. A piezoelectric optical relay in accordance with claim 2, wherein the switching channel is narrowed in the vicinity of the first and second pressure relief vents to dampen motion of the solid slug.

4. A piezoelectric optical relay in accordance with claim 1, wherein the solid slug has a surface wettable by a liquid, the relay further comprising:

a first contact pad located in the switching channel and having a surface wettable by a liquid;

a second contact pad located in the switching channel and having a surface wettable by a liquid; and

a liquid volume in wetted contact with the solid slug;

wherein the liquid volume is adapted to wet between the solid slug and the first contact pad when the solid slug is in the first position and to wet between the solid slug and the second contact pad when the solid slug is in the second position.

5. A piezoelectric optical relay in accordance with claim 4, further comprising:

a third contact pad located in the switching channel between the first and second contact pads, the third contact pad being in wetted contact with the liquid volume.

6. A piezoelectric optical relay in accordance with claim 5, wherein the first optical path lies between the first and third contact pads.

7. A piezoelectric optical relay in accordance with claim 6, further comprising a second optical path, lying between the second and third contact pads.

8. A piezoelectric optical relay in accordance with claim 4, wherein the liquid is a liquid metal.

9. A piezoelectric optical relay in accordance with claim 1, wherein the solid slug is magnetic.

10. A piezoelectric optical relay in accordance with claim 1, further comprising:

a first compliant, energy absorptive facing attached to an end of the first piezoelectric actuator and positioned between the first piezoelectric actuator and the solid slug; and

a second compliant, energy absorptive facing attached to an end of the second piezoelectric actuator and positioned between the second piezoelectric actuator and the solid slug.

11. A piezoelectric optical relay in accordance with claim 10, wherein the first and second compliant, energy absorptive facings are made of Sorbothane.

12. A piezoelectric optical relay in accordance with claim 1, wherein the relay housing comprises:

a circuit substrate layer supporting electrical connections to the first and second piezoelectric actuators;

a cap layer; and

a switching layer, positioned between the circuit substrate layer and the cap layer, in which the switching channel is formed.

13. A piezoelectric optical relay in accordance with claim 12, wherein the relay housing further comprises:

a vent layer containing two pressure relief vents; and

a pressure relief channel formed in one of the cap layer and the vent layer;

wherein the two pressure relief vents connect the ends of the switching channel to the pressure relief channel.

14. A piezoelectric optical relay in accordance with claim 12, further comprising

a first optical waveguide positioned in a first alignment notch in the switching layer;

and

a second optical waveguide positioned in a second alignment notch in the switching layer;

wherein the first and second optical waveguides are axially aligned to form a portion of the first optical path.

15. A piezoelectric optical relay in accordance with claim 14, wherein the first and second optical waveguides are held in the first and second alignment notches respectively by adhesive.

16. A method for switching an optical path in a piezoelectric optical relay having solid slug moveable within a switching channel, the method comprising:

coupling an input optical signal to an input optical waveguide of the piezoelectric optical relay, the input optical waveguide being optically aligned with an output optical waveguide to form the optical path;

if the optical path is to be completed;

energizing a first piezoelectric actuator to move the solid slug out of the optical path, whereby the input optical waveguide is optically coupled to the output optical waveguide; and

if the optical path is to be broken;

energizing a second piezoelectric actuator to move the solid slug into the optical path, whereby the input optical waveguide is optically decoupled from the output optical waveguide.

17. A method for switching an optical path in a piezoelectric optical relay in accordance with claims 16, wherein energizing the first piezoelectric actuator causes a face of the piezoelectric actuator to push the solid slug to align with a pressure relief vent opening, thereby relieving any vacuum between the face of piezoelectric actuator and the end of the slug.

18. A method for switching between a first optical path and a second optical path through a switching channel in a piezoelectric optical relay, the relay having a solid slug moveable within the switching channel and the method comprising:

coupling a first input optical signal to a first input optical waveguide of the piezoelectric optical relay, the first input optical waveguide being optically aligned with a first output optical waveguide to form the first optical path;

coupling a second input optical signal to a second input optical waveguide of the piezoelectric optical relay, the second input optical waveguide being optically aligned with a second output optical waveguide to form the second optical path;

if the first optical path is to be selected;

energizing a first piezoelectric actuator to move the solid slug out of the first optical path and into the second optical path, whereby the first input optical waveguide is optically coupled to first output optical waveguide and the second input optical wave guide is optically decoupled from the second output optical waveguide; and

if the second optical path is to be selected;

energizing the second piezoelectric actuator to move the solid slug out of the second optical path and into the first optical path, whereby the first input optical waveguide is optically decoupled from first output optical waveguide and the second input optical waveguide is optically coupled to the second output optical waveguide.