×

Noncontact measuring system for electrical conductivity

  • US 6,879,167 B2
  • Filed: 05/20/2003
  • Issued: 04/12/2005
  • Est. Priority Date: 11/27/2002
  • Status: Expired due to Fees
First Claim
Patent Images

1. A noncontact measuring system for measuring electrical conductivity of a semiconductor wafer comprising:

  • a microwave transmitter and receiver, including a reflective type of microwave converging antenna, for transmitting microwaves to a minute region of a surface of the semiconductor wafer and for receiving microwaves reflected therefrom;

    a reflectivity measurer for measuring reflectivity of a top surface of the semiconductor wafer; and

    an electrical conductivity sensor for determining electrical conductivity of a low frequency from the measured reflectivity.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×