Liquid handling system with electronic information storage

• US 6,879,876 B2
• Filed: 06/13/2001
• Issued: 04/12/2005
• Est. Priority Date: 06/13/2001
• Status: Expired due to Fees

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Andrews, Robert E., O'Dougherty, Kevin T.
• Primary Examiner(s): Walsh, Donald P.
• Assistant Examiner(s): SHAPIRO, JEFFERY A
• Application Number:
  US09/880,472
• Publication Number:
  US 20020189667A1
• Time in Patent Office: 1,399 Days
• Field of Search: 700/105, 700/110, 700/230, 700/231, 700/239, 700/244, 700265-273, 700281-283, 700/285, 738/665, 174/47, 137/177, 137/251.1, 137/798, 455/66
• US Class Current: 700/231
• CPC Class Codes: B67D 7/0283 specially adapted for transferring liquids of high purity
• CPC Class Codes: B67D 7/348 by interrogating an information transmitter, e.g. a transponder B67D7/145 takes precedence
• CPC Class Codes: G05D 7/0617 specially adapted for fluid materials
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/8158 With indicator, register, recorder, alarm or inspection means

Abstract

The present invention is a system for handling liquid and a method for the same. The system has a container capable of holding a liquid. An electronic storage device is coupled with the container for electronically storing information relating to the liquid stored in the container. The system also has an antenna, for storing information to and reading information from the electronic storage device. Finally, the system has a microprocessor-based controller, coupled with the antenna, for controlling processing of the liquid based on information read from the electronic storage device by the antenna.

Claims

1. A storage and dispensing system for storage and dispensing of liquid, comprising:

a portable container arranged for holding liquid and including a container opening;

a cap securable to the container opening and including a radio frequency identification tag in the cap, the cap (i) being arranged when secured to the container opening to seal the container for containment of liquid therein, (ii) including a rupturable membrane therein, and (iii) being engageable with a connector including a connector head and probe extending therefrom, wherein the probe is insertable through the rupturabte membrane into the container, and wherein the probe has a liquid flow passage therethrough;

a connector including a connector head and a probe extending therefrom, wherein the probe has a liquid flow passage therethrough, and the connector is arranged for flow of liquid from the container through the probe to a location exterior of the container when pumping action is applied to the connector;

the connector head including an antenna arranged to communicate (i) with the radio frequency identification tag in the cap when the connector bead is engaged with the cap, and (ii) with a controller arranged to control the pumping action in accordance with information contained in said radio frequency identification tag in said cap, and communicated by the antenna to the controller.

2. The storage and dispensing system of claim 1, wherein the cap when engaged with the connector head places the antenna in contact with the radio frequency identification tag.

3. The storage and dispensing system of claim 1, wherein the cap includes a central probe hole having the rupturable membrane associated therewith, so that the probe can be inserted through the probe hole and rupture the rupturable membrane when the cap is engaged with the connector.

4. The storage and dispensing system of claim 1, wherein the antenna and the radio frequency identification tag in the cap are separated by a distance of less than 10 millimeters, when the connector is engaged with the cap.

5. The storage and dispensing system of claim 1, further comprising liquid in said container.

6. The storage and dispensing system of claim 5, wherein said liquid comprises a liquid material selected from the group consisting of acids, solvents, bases, photoresists, dopants, inorganic solutions, organic solutions, biological solutions, pharmaceuticals and radioactive chemicals.

7. The storage and dispensing system of claim 5, wherein the liquid comprises photoresist material.

8. The storage and dispensing system of claim 1, wherein the antenna comprises a radio frequency antenna.

9. The storage and dispensing system of claim 1, wherein the cap is threadably connected to the container opening.

10. The storage and dispensing system of claim 1, wherein the cap is snapably secured to the container opening.

11. The storage end dispensing system of claim 1, wherein the cap is vacuum sealed onto the container opening.

12. The storage and dispensing system of claim 1, further comprising a controller arranged to control the pumping action in accordance with information contained in the radio frequency identification tag in the cap, and communicated by the antenna to the controller.

13. The storage and dispensing system of claim 12, wherein the controller includes a read/write device.

14. The storage and dispensing system of claim 13, wherein the read/write device includes a second antenna.

15. The storage and dispensing system of claim 14, wherein the second antenna comprises a modular antenna line interconnecting the read/write device and the antenna of the connector head.

16. The storage and dispensing system of claim 14, wherein the second antenna comprises a radio frequency antenna.

17. The storage and dispensing system of claim 16, wherein the radio frequency second antenna of the read/write device is separated from the connector head antenna by a distance of less than 5 meters.

18. The storage and dispensing system of claim 12, wherein the controller comprises a user interface including a touch screen for operator input to said controller.

19. The storage and dispensing system of claim 18, wherein the touch screen is arranged for operator input of information including at least one information input selected from the group consisting of:

installation time of the container;

shelf life of liquid in the container;

process utilization of the liquid in the container;

when the liquid in the container is used; and

how much of the liquid in the container is used.

20. The storage and dispensing system of claim 12, wherein the controller is arranged to generate a visual output indicative of matching of liquid in the container to a liquid requirement of a liquid-using process.

21. The storage and dispensing system of claim 20, wherein the controller is arranged to generate a visual output indicative of a mismatch of liquid in the container to a liquid requirement of a liquid-using process.

22. The storage and dispensing system of claim 12, wherein the controller is arranged to generate (i) a first visual output indicative of matching of liquid in the container to a liquid requirement of a liquid-using process, and (ii) a second visual output indicative of a mismatch of liquid in the container to a liquid requirement of a liquid-using process, wherein the matching or mismatch are indicated by differently colored first and second visual outputs.

23. The storage and dispensing system of claim 22, wherein the first visual output includes a green colored output display and the second visual output includes a red colored output display.

24. The storage and dispensing system of claim 12, further comprising a pump operatively coupled to the controller to apply said pumping action to the connector, wherein the controller is arranged to modulate said pumping action of the pump in response to information inputted to the controller including at least one information input selected from the group consisting of (i) information contained in the radio frequency identification tag in the cap of the container;

(ii) information inputted by an operator to the controller, and (iii) information inputted to the controller from a liquid-using process to which liquid from the container can be dispensed.

25. The storage and dispensing system of claim 1, wherein the system further comprises a pump operatively coupled to the probe for pumping liquid from the container through the flow passage of the probe and out of the container.

26. A liquid storage and dispensing system, comprising:

a cylindrical vessel having a top opening;

a cap matably engaged with the top opening of the vessel, the cap including an RFID tag on a peripheral portion of the cap, and a central opening in the cap through which a liquid dispensing tube of a connector head may be inserted to place the liquid dispensing tube in contact with liquid in the vessel;

a rupturable membrane closing the opening in the cap, the rupturable membrane being rupturable when the liquid dispensing tube is inserted through the opening to place the liquid dispensing tube in contact with liquid in the vessel;

an integrated circuit manufacturing liquid in the vessel;

a connector including a liquid dispensing tube and a connector main body to which the liquid dispensing tube is connected, the connector main body having an antenna therein which is placed into information transmission relationship with the RFID tag when the liquid dispensing tube is inserted through the rupturable membrane and the connector main body is engaged with the cap, whereby information from the RFID tag can be transmitted by the antenna to a signal processor by a wire or wireless connection.