Method to detect systematic defects in VLSI manufacturing

• US 6,880,136 B2
• Filed: 07/09/2002
• Issued: 04/12/2005
• Est. Priority Date: 07/09/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Kassab, Maroun, Huisman, Leendert M., Pastel, Leah M. P.
• Primary Examiner(s): THOMPSON, CRAIG
• Application Number:
  US10/191,212
• Publication Number:
  US 20040009616A1
• Time in Patent Office: 1,008 Days
• Field of Search: 7167164- 6, 716/2, 438/5, 438/10, 438 17- 18, 438/14
• US Class Current: 716/136
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Defects in manufacturing of IC devices are analyzed by testing the devices for defects using results of LSSD technology to find at least one failing pattern that contains incorrect values. The failing latches are used as a starting point to trace back through combinational logic feeding the failing latches, until controllable latches are encountered. A decision is then made to continue the back tracing or not depending on whether the latter latches were clocked during the application of one of the failing patterns or not.

Claims

1. A method for detecting systematic defects occurring on wafers having several chips which have a plurality of devices with scannable latches for logic testing comprising:

testing the logic for each device, and storing the latches that contained an incorrect logic value after completion of any test, as well as the identification of the associated failing tests;

backtracing through a cone of logic from the latches having incorrect values;

assigning a weighting value for objects encountered during backtracing to produce a vector of weights for each failing device;

determining a fail signature based on the vector; and

comparing fail signatures of any two failing devices to determine similarity of the failure.

2. The method of claim 1 wherein the objects are logic gates.

3. The method of claim 1 wherein the objects are nets between logic gates.

4. The method of claim 1 wherein the objects are logic functions of the logic gates.

5. The method of claim 1 wherein the objects are library circuits used to implement the logic gates.

6. The method of claim 1 wherein the objects are design features of the library circuits used to implement the logic gates.

7. The method of claim 1 wherein the weights are the number of times each object is encountered during backtracing.

8. The method of claim 7 wherein the objects are logic gates.

9. The method of claim 7 wherein the objects are nets between logic gates.

10. The method of claim 7 wherein the objects are logic functions of logic gates.

11. The method of claim 7 wherein the objects are library circuits used to implement logic gates.

12. The method of claim 7 wherein the objects are design features of library circuits used to implement logic gates.

13. The method of claim 1 wherein the weights are determined by adding each time the objects are encountered during backtracing an amount that depends on the size of the cone.

14. The method of claim 13 wherein the objects are logic gates.

15. The method of claim 13 wherein the objects are nets between logic gates.

16. The method of claim 13 wherein the objects are logic functions of the logic gates.

17. The method of claim 13 wherein the objects are library circuits used to implement logic gates.

18. The method of claim 13 wherein the objects are design features of library circuits used to implement the gates.

19. The method of claim 1 in which the objects encountered during the backtrace are the failing latches from which the backtrace begins.

20. The method of claim 1 in which backtracing is done only for failing latches that indicate whether an object in the design passed or failed the test, and in which the objects encountered during the backtrace are the objects whose pass/fail status are indicated by the failing latches.

21. The method of claim 1 in which

the backtrace includes a logic diagnosis of the failing information collected in the failing latches, using that portion of the design encountered during the backtrace;

the objects encountered during the backtrace are logic design entities implicated by the logic diagnosis as the most likely entities to be affected by the defect.

22. The method of claim 1 by adding the step of clustering the fail signatures to determine systematic defects.