Active cantilever for nanomachining and metrology
First Claim
Patent Images
1. A probe suitable for use in a scanning probe microscope system comprising:
- a main body portion;
a scanning cantilever coupled to the main body portion, the scanning cantilever having a probe tip disposed at a free end thereof to perform scanning; and
an interference structure coupled to the main body portion, the interference structure aligned with a line of motion of the scanning cantilever to limit its range of deflection along at least a first direction of travel during a scanning operation.
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Abstract
A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.
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Citations
11 Claims
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1. A probe suitable for use in a scanning probe microscope system comprising:
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a main body portion; a scanning cantilever coupled to the main body portion, the scanning cantilever having a probe tip disposed at a free end thereof to perform scanning; and an interference structure coupled to the main body portion, the interference structure aligned with a line of motion of the scanning cantilever to limit its range of deflection along at least a first direction of travel during a scanning operation. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A probe for a scanning probe microscopy system comprising:
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a main body portion configured for attachment to a translation device; a first cantilever coupled to the main body portion; probe means for sensing atomic features of a surface being scanned, the probe means disposed on a free end of the first cantilever; interference means, disposed relative to the first cantilever, for limiting a line of motion of the first cantilever when it is deflected in a first direction during a scanning operation. - View Dependent Claims (8, 9, 10, 11)
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Specification