Active cantilever for nanomachining and metrology

• US 6,880,388 B1
• Filed: 08/26/2002
• Issued: 04/19/2005
• Est. Priority Date: 03/08/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US10/228,681
• Time in Patent Office: 967 Days
• Field of Search: 731/05, 250/306
• US Class Current: 73/105
• CPC Class Codes: B24B 37/11 Lapping tools
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 70/02 Probe holders
• CPC Class Codes: Y10S 977/86 Scanning probe structure
• CPC Class Codes: Y10S 977/872 Positioner
• CPC Class Codes: Y10S 977/873 Tip holder

Abstract

A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, an interference structure is provided to limit the range of deflection of the probe.

Claims

1. A probe suitable for use in a scanning probe microscope system comprising:

a main body portion;

a scanning cantilever coupled to the main body portion, the scanning cantilever having a probe tip disposed at a free end thereof to perform scanning; and

an interference structure coupled to the main body portion, the interference structure aligned with a line of motion of the scanning cantilever to limit its range of deflection along at least a first direction of travel during a scanning operation.

2. The probe of claim 1 wherein the scanning cantilever has a stiffness characteristic different from that of the interference structure.

3. The probe of claim 1 wherein the interference structure comprises a first member and a second member, each member having a portion aligned relative to the scanning cantilever to limit the range of deflection along the first direction of travel.

4. The probe of claim 1 wherein the interference structure is a second cantilever having a free end aligned with the line of motion of the free end of the scanning cantilever to limit the range of deflection along the first direction of travel.

5. The probe of claim 1 wherein the interference structure is a spanning member, wherein the line of motion of the free end of the scanning cantilever intersects a portion of the spanning so as to limit the range of deflection thereof along the first direction of travel.

6. A scanning probe microscopy system including a scanning probe as claimed in claim 1.

7. A probe for a scanning probe microscopy system comprising:

a main body portion configured for attachment to a translation device;

a first cantilever coupled to the main body portion;

probe means for sensing atomic features of a surface being scanned, the probe means disposed on a free end of the first cantilever;

interference means, disposed relative to the first cantilever, for limiting a line of motion of the first cantilever when it is deflected in a first direction during a scanning operation.

8. The probe of claim 7 wherein the interference means comprises a first member and a second member, each member having a portion aligned relative to the first cantilever to limit the range of deflection along the first direction of travel.

9. The probe of claim 7 wherein the interference means is a second cantilever having a free end aligned with the line of motion of the free end of the first cantilever to limit the range of deflection along the first direction of travel.

10. The probe of claim 9 wherein the second cantilever is in parallel relation to the first cantilever.

11. The probe of claim 7 wherein the interference means comprises a spanning member having a region thereof that intersects with the line of motion of the first cantilever when it is deflected in a first direction during a scanning operation.