Micro-electromechanical device that incorporates a motion-transmitting structure

• US 6,880,918 B2
• Filed: 11/17/2003
• Issued: 04/19/2005
• Est. Priority Date: 07/15/1997
• Status: Expired due to Fees

• Current Assignee: Silverbrook Research Pty Limited
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Gordon, Raquel Yvette
• Application Number:
  US10/713,071
• Publication Number:
  US 20040070648A1
• Time in Patent Office: 519 Days
• Field of Search: 347/54, 347/68, 347/69, 347/70, 347/71, 347/72, 347/50, 347/40, 347/20, 347/44, 347/47, 347/27, 347/63, 399/361, 361/700, 310328-330, 298/90.A
• US Class Current: 347/54
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1637 molding
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/16585 for paper-width or non-reciprocating print heads
• CPC Class Codes: B41J 2/17513 Inner structure
• CPC Class Codes: B41J 2/17596 Ink pumps, ink valves
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer
• CPC Class Codes: B41J 2202/21 Line printing
• CPC Class Codes: B41J 3/445 : Printers integrated in other types of apparatus, e.g. printers integrated in cameras
• CPC Class Codes: H04N 23/00 : Cameras or camera modules comprising electronic image sensors; Control thereof
• CPC Class Codes: H04N 5/2628 : Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation

Abstract

A micro-electromechanical device includes a substrate that incorporates drive circuitry. An elongate drive member is fast with the substrate at a fixed end and incorporates an electrical circuit that is in electrical contact with the drive circuitry to receive an electrical signal from the drive circuitry. The drive member is configured so that a free end is displaced relative to the substrate on receipt of the electrical signal. A motion-transmitting member is fast with the free end of the drive member so that the motion-transmitting member is displaced together with the free end. A working member is fast with the motion-transmitting member to be displaced together with the motion-transmitting member to perform work.

Claims

1. A micro-electromechanical device that comprises

a substrate that incorporates drive circuitry;

an elongate drive member, the drive member being fast with the substrate at a fixed end and incorporating an electrical circuit that is in electrical contact with the drive circuitry to receive an electrical signal from the drive circuitry, the drive member being configured so that a free end is displaced relative to the substrate on receipt of the electrical signal;

motion-transmitting member that is fast with the free end of the drive member so that the motion-transmitting member is displaced together with the free end; and

a working member that is fast with the motion-transmitting member to be displaced together with the motion-transmitting member to perform work.

2. A micro-electromechanical device as claimed in claim 1, in which the motion-transmitting member defines a first class lever and has an effort formation that is fast with the free end of the drive member, a load formation that is fast with the working member and a fulcrum formation that is fast with the substrate, the effort and load formations being pivotal with respect to the fulcrum formation.

3. A micro-electromechanical device as claimed in claim 1, in which the drive member is a thermal bend actuator of the type that uses differential thermal expansion to achieve displacement.

4. A micro-electromechanical device as claimed in claim 3, in which the thermal bend actuator is of a conductive material that is capable of thermal expansion and has an active portion and a passive portion, the active portion defining the electrical circuit, in the form of a heating circuit, so that the active portion is heated and expands relative to the passive portion on receipt of the electrical signal to generate displacement of the actuator in one direction and termination of the signal results in contraction of the active portion to generate displacement of the actuator in an opposite direction.

5. A micro-electromechanical device as claimed in claim 4, in which the conductive material of the actuator is resiliently flexible to facilitate said displacement of the actuator in the opposite direction.

6. A micro-electromechanical device as claimed in claim 1, in which the drive member and the working member are of the same material, while the motion-transmitting member is of a different material to that of the drive member and the working member.

7. A micro-electromechanical device as claimed in claim 6, in which the drive member and the working member are both of titanium nitride.

8. A micro-electromechanical device that comprises

a substrate that incorporates drive circuitry;

a plurality of elongate drive members, each drive member being fast with the substrate at a fixed end and incorporating an electrical circuit that is in electrical contact with the drive circuitry to receive an electrical signal from the drive circuitry, the drive member being configured so that a free end is displaced relative to the substrate on receipt of the electrical signal;

a plurality of motion-transmitting members fast with respective free ends of the drive members so that each motion-transmitting member is displaced together with its associated free end; and

a plurality of working members fast with respective motion-transmitting members so that each working member is displaced together with its associated motion-transmitting member to perform work.