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Micro mirror device and projector employing the same

  • US 6,880,936 B2
  • Filed: 09/30/2002
  • Issued: 04/19/2005
  • Est. Priority Date: 10/09/2001
  • Status: Expired due to Fees
First Claim
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1. A micro mirror device capable of individually controlling a plurality of micro mirrors, the micro mirror device comprising:

  • a substrate;

    a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and

    a holding plate including a rigid portion having a polygonal or round shape and held by first posts which are formed on the bias electrode, a central portion for supporting a second post that supports the micro mirrors and at least one spring hinges transforming elastically when the micro mirrors slant with regard to the rotation axes, the holding plate held by first posts which are formed on the bias electrode, and the rigid portion enclosing the central portion.

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