Micro mirror device and projector employing the same
First Claim
1. A micro mirror device capable of individually controlling a plurality of micro mirrors, the micro mirror device comprising:
- a substrate;
a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and
a holding plate including a rigid portion having a polygonal or round shape and held by first posts which are formed on the bias electrode, a central portion for supporting a second post that supports the micro mirrors and at least one spring hinges transforming elastically when the micro mirrors slant with regard to the rotation axes, the holding plate held by first posts which are formed on the bias electrode, and the rigid portion enclosing the central portion.
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Accused Products
Abstract
A micro mirror device having a micro mirror that can slant with regard a plurality of rotation axes, and a projector employing such a micro mirror device, are provided. This micro mirror device includes a substrate; a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and a holding plate including a central portion for supporting a second post that supports the micro mirrors and at least one spring hinges transforming elastically when the micro mirrors slant with regard to the rotation axes, the holding plate held by first posts of predetermined numbers which are formed on the bias electrode. The projector includes a light source for illuminating light; a light separator for branching light output from the light source into several beams according to a wavelength region, and reflecting or transmitting the beams at different angles; a micro mirror device for forming an image by rotating a micro mirror, which slants with regard to a plurality of rotation axes, in a predetermined direction or at a predetermined angle, and by selectively reflecting the beams separated from the light separator; and a projection lens unit for magnifying and transmitting beams output from the micro mirror device, so that the beams travel toward a screen.
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Citations
35 Claims
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1. A micro mirror device capable of individually controlling a plurality of micro mirrors, the micro mirror device comprising:
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a substrate;
a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and
a holding plate including a rigid portion having a polygonal or round shape and held by first posts which are formed on the bias electrode, a central portion for supporting a second post that supports the micro mirrors and at least one spring hinges transforming elastically when the micro mirrors slant with regard to the rotation axes, the holding plate held by first posts which are formed on the bias electrode, and the rigid portion enclosing the central portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A micro mirror device capable of individually controlling a plurality of micro mirrors, the micro mirror device comprising:
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a substrate;
a plurality of address electrodes formed on the substrate, and a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, together with the address electrodes; and
a holding plate including a rigid portion held by first post which are formed on the bias electrode, a central portion for supporting a second post that supports the micro mirror, at least one spring hinge connected between the rigid portion and the central portion, the spring hinge transforming elastically when the micro mirror slants with regard to a plurality of rotation axes, and the rigid portion enclosing the central portion. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A projector comprising:
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a light source for illuminating light;
a light separator for branching light output from the light source into several beams according to a wavelength region, and reflecting or transmitting the beams at different angles;
a micro mirror device for forming an image by rotating a micro mirror, which slants with regard to a plurality of rotation axes, in a predetermined direction or at a predetermined angle, and by selectively reflecting the beams separated from the light separator; and
a projection lens unit for magnifying and transmitting beams output from the micro mirror device, so that the beams travel toward a screen, wherein the micro mirror device comprises;
a substrate;
a plurality of micro mirrors operating individually;
a plurality of address electrodes formed on the substrate;
a bias electrode for making the micro mirrors slant with regard to a plurality of rotation axes, by the interaction with the address electrodes; and
a holding plate including a rigid portion and held by first posts which are formed on the bias electrode, a central portion for supporting a second post that supports the micro mirror, and at least one spring hinge connected between the rigid portion and the central portion, the spring hinge transforming elastically when the micro mirror slant with regard to the rotation axes, and the rigid portion enclosing the central portion. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification