Nitride compound semiconductor, nitride compound semiconductor light emitting device and method of manufacturing the same

• US 6,881,601 B2
• Filed: 01/30/2003
• Issued: 04/19/2005
• Est. Priority Date: 03/12/1999
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Sugawara, Hideto
• Primary Examiner(s): Thomas, Tom
• Assistant Examiner(s): Richards, N. Drew
• Application Number:
  US10/356,283
• Publication Number:
  US 20030138976A1
• Time in Patent Office: 810 Days
• Field of Search: 438/22, 438/36, 438/37, 438/46, 438/47, 438/486, 438/796, 438/797
• US Class Current: 438/47
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01S 5/32308 emitting light at a wavelength less than 900 nm
• CPC Class Codes: H01S 5/32341 blue laser based on GaN or GaP

Abstract

A nitride compound semiconductor light-emitting device having a stack of layers including an active layer for a light emitting device and a method of manufacturing the device is disclosed. The method includes the steps of growing a first layer on a substrate at a first temperature to obtain an incomplete crystalline structure including both indium and aluminum and having the composition expressed as In_XAl_YGa_1-X-YN(0≦X≦1, 0≦Y≦1). The method grows a cap layer on the first layer to cover the first layer, with growth of the cap layer proceeding at a second temperature substantially equal to or below the first temperature. The first layer is heat treated at a third temperature above the first temperature to cause the incomplete crystalline structure to crystallize and to create areas of differing compositions, thus changing the first layer to an active layer. The material of the cap layer is selected to be heat stable during the heat-treating step.

Claims

1. A method of manufacturing a nitride compound semiconductor having a stack of layers, the method including:

growing a first layer having the composition expressed as InAlN on a substrate at a first temperature,

growing a cap layer on the first layer, the cap layer grown at a second temperature substantially equal to or below the first temperature; and

heat treating the first layer at a third temperature above the first temperature to form areas in the first layer where the composition is expressed as In_X1Al_1-X1N(0<

X1<

1) and other areas in the first layer where the composition is expressed as In_X2Al_1-X2N (0≦

X2<

X1<

1), wherein the areas where the composition is expressed as In_X1Al_1-X1N (0<

X1<

1) emit red light with a peak wavelength greater than or equal to 630 nm.

2. The method of claim 1, wherein the heat treating produces a crystalline first layer.

3. The method of claim 1, wherein the heat treating produces a monocrystalline first layer.

4. The method of claim 1, wherein the material of the cap layer comprises a nitride compound semiconductor whose composition is expressed as In_XAl_YGa_1-X-YN (0≦

X≦

1, 0≦

Y≦

1).

5. A method of manufacturing a nitride compound semiconductor light emitting device having a stack of layers, the method including:

growing a first layer having the composition expressed as InAlN on a substrate at a first temperature,

growing a cap layer on the first layer, the cap layer grown at a second temperature substantially equal to or below the first temperature; and

heat treating the first layer at a third temperature above the first temperature to form areas in the first layer where the composition is expressed as In_X1Al_1-X1N(0<

X1<

1) and other areas in the first layer where the composition is expressed as In_X2Al_1-X2N (0≦

X2<

X1<

1), wherein the areas where the composition is expressed as In_X1Al_1-X1N (0<

X1<

1) emit red light with a peak wavelength greater than or equal to 630 nm.

7. The method of claim 5, wherein the material of the cap layer comprises a nitride compound semiconductor with its composition expressed as In_XAl_YGa_1-X-YN (0≦

X≦

1, 0≦

Y≦

1).

6. A method of manufacturing a nitride compound semiconductor light emitting device having a stack of layers including a first cladding layer and a second cladding layer, the method including:

growing an active layer having the composition expressed as InAlN on the first cladding layer at a first temperature,

growing the second cladding layer on the active layer, the second cladding layer grown at a second temperature substantially equal to or below the first temperature; and

heat treating the active layer at a third temperature above the first temperature to form areas in the active layer where the composition is expressed as In_X1Al_1-X1N(0<

X1<

1) and other areas in the active layer where the composition is expressed as In_X2Al_1-X2N (0≦

X2<

X1<

1), wherein the areas where the composition is expressed as In_X1Al_1-X1N (0<

X1<

1) emit red light with a peak wavelength greater than or equal to 630 nm.

8. The method of claim 6, wherein the material of the second cladding layer comprises a nitride compound semiconductor with its composition expressed as In_XAl_YGa_1-X-YN (0≦

X≦

1, 0≦

Y≦

1).