Intralevel decoupling capacitor, method of manufacture and testing circuit of the same
First Claim
Patent Images
1. A circuit for monitoring a plurality of capacitor segments, the circuit comprising:
- a charge monitoring circuit coupled to each capacitor segment;
a coupling circuit for selectively coupling and decoupling one of said capacitor segments from among a plurality of states; and
a control circuit for sequentially controlling said coupling circuit of each of said capacitor segments so as to disconnect a failed capacitor segment while said other capacitor segments are monitored.
2 Assignments
0 Petitions
Accused Products
Abstract
A decoupling capacitor is provided for a semiconductor device and may include a first low dielectric insulator layer and a low resistance conductor formed into at least two interdigitized patterns on the surface of the first low dielectric insulator in a single interconnect plane. A high dielectric constant material may be provided between the two patterns. A circuit for testing a plurality of these capacitors is also provided which includes a charge monitoring circuit, a coupling circuit and a control circuit.
-
Citations
16 Claims
-
1. A circuit for monitoring a plurality of capacitor segments, the circuit comprising:
-
a charge monitoring circuit coupled to each capacitor segment;
a coupling circuit for selectively coupling and decoupling one of said capacitor segments from among a plurality of states; and
a control circuit for sequentially controlling said coupling circuit of each of said capacitor segments so as to disconnect a failed capacitor segment while said other capacitor segments are monitored. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A circuit for monitoring a plurality of capacitor segments, each capacitor segment comprising a first low dielectric insulator layer, a low resistance conductor formed into at least two interdigitized patterns on a surface of said first low dielectric insulator layer and high dielectric material provided between said two interdigitized patterns, the circuit comprising:
-
a charge monitoring circuit coupled to each of said capacitor segments;
a coupling circuit connected to each of said capacitor segments, said coupling circuit selectively coupling and decoupling each capacitor segment to one of a disabled state, an enabled state and a testing state; and
a control circuit connected to said coupling circuit, said control circuit controlling said coupling circuit so as to place said coupling circuit of a failed capacitor in the disabled state while monitoring remaining ones of said plurality of capacitor segments. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
Specification