Spatial filtering in interferometry

• US 6,882,430 B2
• Filed: 08/13/2004
• Issued: 04/19/2005
• Est. Priority Date: 03/04/2002
• Status: Expired due to Fees

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A.
• Primary Examiner(s): Toatley, Jr., Gregory J.
• Assistant Examiner(s): CONNOLLY, PATRICK J
• Application Number:
  US10/917,688
• Publication Number:
  US 20050030549A1
• Time in Patent Office: 249 Days
• Field of Search: 356/496, 356/498, 356/500, 356/493, 356/486, 356/487
• US Class Current: 356/496
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02007 Two or more frequencies or sources used for interferometric measurement using only beat G01B9/02003
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object

Abstract

Spatial filtering of beams in interferometry systems is used to reduce a displacement of the beams from an optical path corresponding to the path of the beams in an optimally-aligned system. By reducing beam displacement from the optical path, the system reduces the magnitude of beam shears and associated non-cyclic errors in linear and angular displacements measured by the interferometry systems.

Claims

1. A method, comprising:

directing a first beam and a second beam along respective paths, wherein the first beam contacts a measurement object and changes in the orientation of the measurement object cause a displacement of the first beam from a nominal beam path, and wherein the first and second beams are derived from a common source;

spatial filtering the first beam after it contacts the measurement object, wherein the spatial filtering reduces the displacement of the first beam from the optical path; and

combining the first and second beams to form an output beam, wherein the output beam comprises information about an optical path length difference between the first and second beams,

wherein the first beam is spatially filtered prior to being combined with the second beam.

2. The method of claim 1, wherein the displacement of the first beam from the nominal beam path causes a measurable interferometric phase, Φ

, derived from the output beam to deviate from the expression Φ

=pknL, where p is an integer, k is the wavenumber of the output beam, and nL corresponds to the optical path length difference.

3. The method of claim 2, wherein the deviation of Φ

from the expression Φ

=pknL comprises a non-cyclic error term that varies in a nonperiodic way on the optical path length difference.

4. The method of claim 1, wherein the nominal path corresponds to the first beam path when the measurement object is in a reference orientation.

5. The method of claim 4, wherein the first beam is normally incident on the measurement object when the measurement object is in the reference orientation.

6. A method, comprising:

directing a first beam and a second beam along respective paths using a high stability plane mirror interferometer, wherein the first beam contacts a measurement object and wherein the first and second beams are derived from a common source;

spatial filtering the first beam after it contacts the measurement object; and

combining the first and second beams to form an output beam, wherein the output beam comprises information about an optical path length difference between the first and second beams.

7. The method of claim 6, wherein changes in the orientation of the measurement object cause a displacement of the first beam from a nominal beam path.

8. The method of claim 7, wherein the spatial filtering reduces the displacement of the first beam from the nominal beam path.

9. The method of claim 7, wherein the nominal path corresponds to the first beam path when the measurement object is in a reference oriented.

10. The method of claim 7, wherein the displacement of the first beam from the nominal beam path causes a measurable interferometric phase, Φ

, derived from the output beam to deviate from the expression Φ

=pknL, where p is an integer, k is the wavenumber of the output beam, and nL corresponds to the optical path length difference.

11. The method of claim 10, wherein the deviation of Φ

from the expression Φ

=pknL comprises a non-cyclic error term that varies in a nonperiodic way on the optical path length difference.

12. A method, comprising:

directing a first beam and a second beam along respective paths, wherein the first beam contacts a measurement object more than once and wherein the first and second beams are derived from a common source;

spatial filtering the first beam after it contacts the measurement object; and

combining the first and second beams to form an output beam, wherein the output beam comprises information about an optical path length difference between the first and second beams.

13. The method of claim 12, wherein the first beam contacts the measurement object twice.

14. The method of claim 12, wherein changes in the orientation of the measurement object cause a displacement of the first beam from a nominal beam path.

16. The method of claim 14, wherein the nominal path corresponds to the first beam path when the measurement object is in a reference oriented.

15. The method wherein the spatial filtering reduces the displacement of the first beam from the nominal beam path.

17. A method, comprising:

directing a first beam and a second beam along respective paths, wherein the first beam contacts a measurement object and wherein the first and second beams are derive from a common source;

spatial filtering the first beam after it contacts the measurement object; and

combining the first and second beams to form an output beam, wherein the output beam comprises information about an optical path length difference between the first and second beams,

wherein the first beam is spatially filtered prior to being combined with the second beam.

18. The method of claim 17, wherein changes in the orientation of the measurement object cause a displacement of the first beam from a nominal beam path.

19. The method of claims 18, wherein the spatial filtering reduces the displacement of the first beam from the nominal beam path.

20. The method of claim 18, wherein the nominal path corresponds to the first beam path when the measurement object is in a reference oriented.

21. An apparatus, comprising:

an interferometer which during operation directs a first beam and a second beam along respective paths and then combines the first and second beams to produce an output beam, wherein the first beam contacts a measurement object more than once and changes in the orientation of the measurement object cause a displacement of the first beam from a nominal beam path, and wherein the output beam comprises information about an optical path length difference between the first and second beams; and

a spatial filter positioned in the path of the first beam, wherein the spatial filtering reduces the displacement of the first beam from the nominal beam path.

22. The apparatus of claim 21, wherein the interferometer directs the first beam to contact the measurement object twice.

23. The apparatus of claim 22, wherein the interferometer is a high stability plane mirror interferometer.

24. An apparatus, comprising:

a high stability plane mirror interferometer which during operation directs a first beam and a second beam along respective paths and then combines the first and second beams to produce an output beam, wherein the first beam contacts a measurement object and changes in the orientation of the measurement object cause a displacement of the first beam a nominal beam path, and wherein the output beam comprises information about an optical path length difference between the first and second beams; and

a spatial filter positioned in the path of the first beam, wherein the spatial filtering reduces the displacement of the first beam from the nominal beam path.