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Pressure sensor capsule

  • US 6,883,380 B2
  • Filed: 05/16/2003
  • Issued: 04/26/2005
  • Est. Priority Date: 05/16/2003
  • Status: Active Grant
First Claim
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1. A capsule couplable to a fluid isolator, comprising:

  • a capsule wall having a fluid inlet couplable to the fluid isolator, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;

    isolator fluid contained by the capsule wall and coupling pressure from the fluid isolator;

    a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element; and

    a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts.

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