Pressure sensor capsule
First Claim
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1. A capsule couplable to a fluid isolator, comprising:
- a capsule wall having a fluid inlet couplable to the fluid isolator, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;
isolator fluid contained by the capsule wall and coupling pressure from the fluid isolator;
a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element; and
a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts.
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Abstract
A pressure sensing capsule includes a pressure sensor inside a capsule wall. The capsule wall includes a feedthrough opening. The pressure sensor is mounted to a stress isolation member with a feedthrough hole. The pressure sensor is mounted to the stress isolation member with the feedthrough hole overlying electrical contacts on the pressure sensor.
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Citations
34 Claims
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1. A capsule couplable to a fluid isolator, comprising:
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a capsule wall having a fluid inlet couplable to the fluid isolator, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;
isolator fluid contained by the capsule wall and coupling pressure from the fluid isolator;
a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element; and
a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A pressure sensor capsule, comprising:
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a capsule wall having a fluid inlet, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;
an inlet member coupling pressure to the fluid inlet;
a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element; and
a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification