Slit valve for a semiconductor processing system

• US 6,883,776 B2
• Filed: 08/20/2002
• Issued: 04/26/2005
• Est. Priority Date: 08/20/2002
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Aggarwal, Ravinder, Davis, Jerry, Kusbel, Jim
• Primary Examiner(s): Bastianelli, John
• Application Number:
  US10/225,546
• Publication Number:
  US 20040036053A1
• Time in Patent Office: 980 Days
• Field of Search: 251/83, 251/82, 251/330, 251/329, 251/326
• US Class Current: 251/83
• CPC Class Codes: F16K 3/0209 the valve having a particular passage, e.g. provided with a filter, throttle or safety device
• CPC Class Codes: F16K 51/00 Other details not peculiar to particular types of valves or cut-off apparatus

Abstract

A slit valve for a semiconductor processing apparatus, for fluidly sealing a passage connecting two chambers of the apparatus, such as a substrate reaction chamber and a region outside the reaction chamber. The slit valve comprises an actuator plate movable within a slot in one wall of the passage, the actuator plate and the slot oriented generally transverse to the passage. The actuator plate has a first position in which the valve is open, permitting the transfer of a substrate through the passage. The actuator plate also has a second position in which the valve is closed, and in which the actuator plate fluidly seals the passage such that fluid cannot flow through the passage across the actuator plate. A protective cover is configured to prevent debris within the passage (e.g., broken wafers, shards, particulate contaminants, etc.) from flowing into the slot when the actuator plate occupies its second position. In one embodiment, the cover is pivotably secured to the first wall of the passage, proximate the slot. In another embodiment, the cover is secured to the actuator plate, proximate an end thereof. In a preferred embodiment, the cover comprises a plate.

Claims

1. A slit valve, comprising:

a passage sized and adapted for transfer of a semiconductor substrate through the passage, the passage having first and second walls generally opposing one another, the first wall having a slot oriented generally transverse to the passage;

an actuator plate received within the slot, the actuator plate configured to translate within the slot, the actuator plate having a first position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a second position in which the actuator plate blocks the passage; and

a protective cover configured to substantially prevent debris within the passage from entering the slot when the actuator plate occupies its first position;

wherein the cover is hingedly secured to the first wall of the passage.

2. The slit valve of claim 1, wherein the cover has a closed position in which the cover completely covers the slot, and an open position in which the cover does not obstruct movement of the actuator plate from its first position to its second position, the cover being biased toward its closed position.

3. The slit valve of claim 1, wherein the actuator plate in its second position blocks fluid flow through the passage across the actuator plate.

4. The slit valve of claim 1, wherein the passage is formed within a valve housing, said valve housing configured to be positioned within a semiconductor reactor.

5. The slit valve of claim 1, wherein the cover comprises a plate.

6. The slit valve of claim 1, wherein the first wall of the passage is generally horizontal, the slot and the actuator plate being generally vertical.

7. The slit valve of claim 1, wherein the slot and actuator plate are oriented generally perpendicular to the first wall of the passage.

8. The slit valve of claim 1, wherein the slot and actuator plate are oriented generally perpendicular to the second wall of the passage.

9. The slit valve of claim 1, wherein the slot and actuator plate are oriented generally perpendicular to the passage.

10. The slit valve of claim 1, wherein the cover covers the slot when the actuator plate occupies its first position.

11. The slit valve of claim 1, wherein the actuator plate has a sealing edge that bears against at least the second wall of the passage when the actuator plate occupies its second position, the sealing edge preventing fluid flow though the passage across the actuator plate when the actuator plate occupies its second position.

12. The slit valve of claim 11, wherein a sealing material is attached to the sealing edge.

13. The slit valve of claim 12, wherein the sealing material comprises VITON.

14. The slit valve of claim 11, wherein when the actuator plate occupies its first position, the sealing edge of the actuator plate is outside of the passage.

15. The slit valve of claim 11, wherein the second wall of the passage includes a groove configured to receive the sealing edge of the actuator plate when the actuator plate occupies its second position.

16. The slit valve of claim 1, wherein the first wall of the passage includes a recess configured to receive the cover in its closed position.

17. The slit valve of claim 16, wherein a surface of the cover in its closed position is substantially coplanar with the first wall.

18. The slit valve of claim 1, wherein the cover is configured such that movement of the actuator plate from its first position to its second position causes the cover to move to an open position of the cover, and such that movement of the actuator plate from its second position to its first position causes the cover to cover the slot.

19. The slit valve of claim 1, wherein the cover comprises a plate.

20. The slit valve of claim 1, wherein the slot defines an elongated opening in the first wall.

22. The slit valve of claim 1, wherein a generally planar portion of the actuator plate extends through the slot when the actuator plate is in the second position.

21. A semiconductor processing apparatus including a slit valve, the slit valve comprising:

a passage having first and second walls generally opposing one another, the first wall having a slot;

an actuator plate received within the slot, the actuator plate configured to translate within the slot, the actuator plate having a first position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a second position in which the actuator plate blocks the passage, the actuator plate including a generally planar portion configured to pass through the slot; and

a plate hingedly mounted to the first wall and configured to selectively cover the slot when the actuator plate occupies its first position.

23. The slit valve of claim 21, wherein the actuator plate includes a generally planar portion extending through the slot when the actuator plate is in the second position.

24. The slit valve of claim 21, wherein the second wall has a groove configured to receive an upper end of the actuator plate when the plate is in the second position.

25. The semiconductor processing apparatus of claim 21, wherein the actuator plate in its second position blocks fluid flow through the passage across the actuator plate.

26. An apparatus for processing a semiconductor substrate, comprising:

a first chamber;

a second chamber;

a passage connecting the first and second chambers, the passage sized and adapted to permit transfer of a substrate between the first and second chambers, the passage having first and second walls generally opposing one another, the first wall having a slot;

an actuator plate received within the slot, the actuator plate configured to translate within the slot, the actuator plate having a first position in which the actuator plate permits transfer of a substrate from the first chamber through the passage into the second chamber, the actuator plate also having a second position in which the actuator plate blocks the passage; and

a protective cover hingedly secured to the first wall of the passage proximate the slot, the cover having a closed position in which the cover substantially prevents debris within the passage from entering the slot, the cover being permitted to occupy its closed position when the actuator plate occupies its first position, the cover having an open position which the cover occupies when the actuator plate occupies its second position.

27. The apparatus of claim 26, wherein the actuator plate in its second position blocks fluid flow through the passage across the actuator plate.

28. The apparatus of claim 26, wherein the first wall of the passage is generally horizontal, the slot and the actuator plate being generally vertical.

29. The apparatus of claim 26, wherein the slot and actuator plate are oriented generally perpendicular to the first wall of the passage.

30. The apparatus of claim 26, wherein the slot and actuator plate are oriented generally perpendicular to the second wall of the passage.

31. The apparatus of claim 26, wherein the slot and actuator plate are oriented generally perpendicular to the passage.

32. The apparatus of claim 26, wherein the cover in its closed position completely covers the slot.

33. The apparatus of claim 32, wherein the cover is able to occupy its closed only when the actuator plate occupies its first position.

34. The apparatus of claim 26, wherein the actuator plate has a sealing edge that bears against at least the second wall of the passage when the actuator plate occupies its second position, the sealing edge fluidly sealing the first chamber from the second chamber when the actuator plate occupies its second position.

35. The apparatus of claim 34, wherein a sealing material is attached to the sealing edge.

36. The apparatus of claim 35, wherein the sealing material comprises VITON.

37. The apparatus of claim 34, wherein when the actuator plate occupies its first position, the sealing edge of the actuator plate is outside of the passage.

38. The apparatus of claim 37, wherein when the cover occupies its closed position, the cover completely covers the slot.

39. The apparatus of claim 34, wherein the second wall of the passage includes a groove configured to receive the sealing edge of the actuator plate when the actuator plate occupies its second position.

40. The apparatus of claim 26, wherein the cover is biased toward its closed position.

41. The apparatus of claim 26, wherein the first wall of the passage includes a recess configured to receive the cover in its closed position.

42. The apparatus of claim 41, wherein a surface of the cover in its closed position is substantially coplanar with the first wall.

43. The apparatus of claim 26, wherein the cover is configured such that movement of the actuator plate from its first position to its second position causes the cover to move to its open position.

44. The apparatus of claim 26, wherein the cover comprises a plate.

45. An apparatus for processing a semiconductor substrate, comprising:

a chamber configured to enclose a semiconductor substrate;

a region outside the chamber;

a passage connecting the chamber and said region, the passage having an elongated portion with a generally uniform cross-section sized and configured for transferring a substrate through said portion of the passage between the chamber and said region, said portion of the passage having first and second walls generally opposing one another, the first wall having a slot oriented generally transverse to said portion of the passage;

an actuator plate received within and translatable within the slot in the first wall, the actuator plate having a first position in which the actuator plate permits transfer of a substrate from said region through said portion of the passage into the chamber, the actuator plate also having a second position in which the actuator plate blocks said portion of the passage, said actuator elate being configured to extend substantially throughout and substantially completely block said portion of the passage; and

a protective cover hingedly secured to the first wall and configured to substantially prevent debris within the passage from entering the slot when the actuator plate occupies its first position.

46. The apparatus of claim 45, wherein the actuator plate in its second position prevents fluid flow through said portion of the passage between said region and the chamber.

47. The apparatus of claim 45, wherein the first wall has a recess configured to receive the cover when the actuator plate occupies its first position.

48. The apparatus of claim 47, wherein the recess is sized so that a surface of the cover is substantially coplanar with the first wall when the actuator plate occupies its first position.

49. The apparatus of claim 45, wherein the first wall including recess configured to receive the plate element.

50. The apparatus of claim 49, wherein the recess is sized so that a surface of the plate element is substantially coplanar with the first wall when the actuator plate occupies its first position.

51. The apparatus of claim 45, wherein the second wall includes a groove configured to receive an end of the actuator plate in its second position.

52. A semiconductor processing apparatus including a slit valve, the slit valve comprising:

a passage having first and second walls generally opposing one another, the first wall having an elongated slot, a portion of the passage being defined and located between the slot and the second wall;

an actuator plate received within the elongated slot, the actuator plate having a generally planar portion configured to translate within the elongated slot, the actuator plate having a first position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a second position in which the actuator plate occupies and fills most of the cross sectional area of the portion of the passage and the planar portion extends through the slot; and

an elongated plate hingedly coupled to the first wall and configured to selectively cover the elongated slot when the actuator plate occupies its first position.

53. A slit valve, comprising:

a passage sized and adapted for transfer of a semiconductor substrate through the passage, the passage having first and second walls generally opposing one another, the first wall having a slot oriented generally transverse to the passage, a portion of the passage being defined and interposed between the slot and the second wall;

an actuator plate received within the slot, the actuator plate configured to translate within the slot, the actuator plate having a first position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a second position in which the actuator plate substantially entirely blocks the portion of the passage; and

a protective cover configured to substantially prevent debris within the passage from entering the slot when the actuator plate occupies its first position.

54. The slit valve of claim 53, wherein the cover has a closed position in which the cover completely covers the slot, and an open position in which the cover does not obstruct movement of the actuator plate from its first position to its second position, the cover being biased toward its closed position.