Internal member for plasma-treating vessel and method of producing the same

• US 6,884,516 B2
• Filed: 05/21/2004
• Issued: 04/26/2005
• Est. Priority Date: 12/10/1999
• Status: Expired due to Term

• Current Assignee: TOCALO Co., Ltd., Tokyo Electron Limited
• Original Assignee: TOCALO Co., Ltd., Tokyo Electron Limited
• Inventors: Hamaguchi, Tatsuya, Takeuchi, Junichi, Mitsuhashi, Kouji, Nagayama, Nobuyuki, Harada, Yoshio
• Primary Examiner(s): Jones, Deborah
• Assistant Examiner(s): Savage, Jason
• Application Number:
  US10/849,797
• Publication Number:
  US 20040214026A1
• Time in Patent Office: 340 Days
• Field of Search: 428/469, 428/701, 428/610, 428/613, 428/623, 428/633, 427/453, 427/454, 427/455, 427/456
• US Class Current: 428/469
• CPC Class Codes: B01J 19/02 Apparatus characterised by being constructed of material selected for its chemically-resistant properties
• CPC Class Codes: B01J 2219/0218 of ceramic
• CPC Class Codes: B01J 2219/0236 Metal based
• CPC Class Codes: B01J 2219/024 Metal oxides
• CPC Class Codes: B01J 2219/0263 Ceramic
• CPC Class Codes: B01J 2219/0286 Steel
• CPC Class Codes: B01J 2219/0894 Processes carried out in the presence of a plasma
• CPC Class Codes: C09D 1/00 Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
• CPC Class Codes: C23C 4/00 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge build-up welding B23K, e.g. B23K5/18, B23K9/04
• CPC Class Codes: C23C 4/02 Pretreatment of the material to be coated, e.g. for coating on selected surface areas
• CPC Class Codes: C23C 4/11 Oxides
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings
• CPC Class Codes: Y10T 428/12458 having composition, density, or hardness gradient
• CPC Class Codes: Y10T 428/12479 Porous [e.g., foamed, spongy, cracked, etc.]
• CPC Class Codes: Y10T 428/12549 Adjacent to each other
• CPC Class Codes: Y10T 428/12618 Plural oxides
• CPC Class Codes: Y10T 428/24999 Inorganic

Abstract

It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al₂O₃ film formed on the undercoat as a middle layer and Y₂O₃ sprayed coating formed on the middle layer as a top coat.

Claims

1. An internal member for a plasma treating vessel comprising a substrate and a Y₂O₃ reduced-pressure plasma sprayed coating covered on a surface thereof.

2. An internal member for a plasma treating vessel according to claim 1, wherein a pressure in the reduced-pressure plasma spraying is 50-200 hPa.

3. An internal member for a plasma treating vessel according to claim 1, wherein an atmosphere in the reduced-pressure plasma spraying is an Ar gas atmosphere.

5. An internal member for a plasma treating vessel according to claim 1, wherein the Y₂O₃ has a purity of not less than 95%.

4. An internal member for a plasma treating vessel comprising an Al substrate and a Y₂O₃ sprayed coating covered on a surface thereof, in which the Y₂O₃ sprayed coating has a porosity of 0.2-10%.

6. An internal member for a plasma treating vessel comprising a substrate, a Ni-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

7. An internal member for a plasma treating vessel comprising a substrate, a Ni alloy-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

8. An internal member for a plasma treating vessel comprising a substrate, a W-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

9. An internal member for a plasma treating vessel comprising a substrate, a W alloy-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

10. An internal member for a plasma treating vessel comprising a substrate, a Ti-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

11. An internal member for a plasma treating vessel comprising a substrate, a Ti alloy-containing undercoat formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

12. An internal member for a plasma treating vessel comprising a substrate, an undercoat formed on a surface thereof through a spraying process, and a Y₂O₃ sprayed coating formed on the undercoat as a top coat.

13. A method of producing an internal member for a plasma treating vessel, which comprises covering Y₂O₃ on a surface of a substrate through a reduced-pressure plasma spraying process to form a Y₂O₃ reduced-pressure plasma sprayed coating.

14. A method of producing an internal member for a plasma treating vessel according to claim 13, wherein a pressure in the reduced-pressure plasma spraying is 50-200 hPa.

15. A method of producing an internal member for a plasma treating vessel according to claim 13, wherein an atmosphere in the reduced-pressure plasma spraying is an Ar gas atmosphere.

16. A method of producing an internal member for a plasma treating vessel, which comprises forming an undercoat on a surface of a substrate through a spraying process and forming a Y₂O₃ sprayed coating on the undercoat as a top coat.

17. An internal member for a plasma treating vessel comprising a substrate, a mixed coating of Al₂O₃ and Y₂O₃ formed on a surface thereof, and a Y₂O₃ sprayed coating formed on the mixed coating.

18. An internal member for a plasma treating vessel according to claim 17, wherein the substrate is a metal.

19. An internal member for a plasma treating vessel according to claim 18, wherein the metal is Al.

20. An internal member for a plasma treating vessel according to claim 18, wherein the metal is an Al alloy.

21. An internal member for a plasma treating vessel according to claim 17, wherein the mixed coating is formed through a spraying process.

22. An internal member for a plasma treating vessel comprising a substrate, an Al₂O₃ coating formed on a surface of the substrate, and a sprayed coating of Y₂O₃ formed thereon.

23. An internal member for a plasma treating vessel according to claim 22, wherein the substrate is a metal.

24. An internal member for a plasma treating vessel according to claim 23, wherein the metal is Al.

25. An internal member for a plasma treating vessel according to claim 23, wherein the metal is an Al alloy.

26. An internal member for a plasma treating vessel according to claim 22, wherein the Al₂O₃ coating is formed through a spraying process.

27. A method of producing an internal member for a plasma treating vessel, which comprises forming a mixed coating of Al₂O₃ and Y₂O₃ on a surface of a substrate, and covering Y₂O₃ on a surface of the mixed coating through a spraying process to form a Y₂O₃ sprayed coating.

28. A method of producing an internal member for a plasma treating vessel according to claim 27, wherein the mixed coating of Al₂O₃ and Y₂O₃ is formed through a spraying process.

29. A method of producing an internal member for a plasma treating vessel, which comprises covering and forming an Al₂O₃ coating on a surface of a substrate, and covering Y₂O₃ on a surface of the Al₂O₃ coating through a spraying process to form a Y₂O₃ sprayed coating.

30. A method of producing an internal member for a plasma treating vessel according to claim 29, wherein the Al₂O₃-containing coating is formed through a spraying process.