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Internal member for plasma-treating vessel and method of producing the same

  • US 6,884,516 B2
  • Filed: 05/21/2004
  • Issued: 04/26/2005
  • Est. Priority Date: 12/10/1999
  • Status: Expired due to Term
First Claim
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1. An internal member for a plasma treating vessel comprising a substrate and a Y2O3 reduced-pressure plasma sprayed coating covered on a surface thereof.

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