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Enhanced adhesion strength between mold resin and polyimide

  • US 6,884,662 B1
  • Filed: 01/28/2002
  • Issued: 04/26/2005
  • Est. Priority Date: 01/28/2002
  • Status: Active Grant
First Claim
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1. A method of creating an interface layer over the surface of a semiconductor device, comprising the steps of:

  • providing a semiconductor device, said semiconductor device having a first and a second surface with points of electrical contact to said semiconductor device having been provided in said second surface of said semiconductor device, said semiconductor device having been provided with a layer of passivation over said second surface of said semiconductor device, openings having been created through said layer of passivation exposing said points of electrical contact to said semiconductor device;

    providing a semiconductor device mounting support having a first and a second surface, contact pads having been provided in said first or said second surface of said semiconductor device mounting support;

    positioning said semiconductor device over the second surface of said semiconductor device mounting support, said first surface of said semiconductor device facing said second surface of said semiconductor device mounting support;

    providing conductive interconnections between said points of electrical contact provided in said second surface of said semiconductor device and contact pads provided over the second surface of said semiconductor device mounting support;

    providing an underfill for said semiconductor device;

    depositing an interface layer over the surface of said layer of passivation; and

    patterning and etching said interface layer, creating at least one opening through said interface layer.

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