Trench DMOS transistor having a zener diode for protection from electro-static discharge

• US 6,884,683 B2
• Filed: 11/18/2003
• Issued: 04/26/2005
• Est. Priority Date: 05/22/2001
• Status: Expired due to Term

• Current Assignee: General Semiconductor, Inc. (Vishay Intertechnology Incorporated)
• Original Assignee: General Semiconductor, Inc. (Vishay Intertechnology Incorporated)
• Inventors: Hshieh, Fwu-Iuan, So, Koon Chong
• Primary Examiner(s): Wilczewski, Mary
• Assistant Examiner(s): Thomas, Toniae M.
• Application Number:
  US10/714,807
• Publication Number:
  US 20040097042A1
• Time in Patent Office: 525 Days
• Field of Search: 438/156, 438/212, 438/237, 438268-272, 438/589
• US Class Current: 438/268
• CPC Class Codes: H01L 29/4916 the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen H01L29/4908, H01L29/4983 take precedence
• CPC Class Codes: H01L 29/7808 the other device being a breakdown diode, e.g. Zener diode
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A trench DMOS transistor having overvoltage protection includes a substrate of a first conductivity type and a body region of a second conductivity type formed over the substrate. At least one trench extends through the body region and the substrate. An insulating layer lines the trench and overlies the body region. A conductive electrode is deposited in the trench so that it overlies the insulating layer. A source region of the first conductivity type is formed in the body region adjacent to the trench. An undoped polysilicon layer overlies a portion of the insulating layer. A plurality of cathode regions of the first conductivity type are formed in the undoped polysilicon layer. At least one anode region is in contact with adjacent ones of the plurality of cathode regions.

Claims

1. A method of making a trench DMOS transistor having overvoltage protection, said method comprising the steps of comprising:

providing a substrate of a first conductivity type;

forming a body region by an implantation of a second conductivity type on the substrate;

forming at least one trench extending through the body region, wherein said body region is formed prior to the step of forming at least one trench;

depositing an insulating layer that lines the trench and overlies said body region;

depositing a conductive electrode in the trench overlying the insulating layer;

implanting a dopant of the first conductivity type to form a source region in the body region adjacent to the trench;

depositing an undoped polysilicon layer overlying a portion of the insulating layer; and

implanting a dopant of the first conductivity type to form a plurality of cathode regions in the undoped polysilicon layer, said plurality of cathode regions being separated by at least one anode region.

2. The method of claim 1 wherein the implanting steps forming a source region and a plurality of cathode regions are performed simultaneously.

3. The method of claim 1 further comprising the step of defining a photolithographic mask over the body region and the undoped polysilicon layer.

4. The method of claim 1 wherein the step of depositing an undoped polysilicon layer is performed before the implanting step.

5. The method of claim 1 further comprising the step of etching the conductive electrode to expose a portion of the insulating layer overlying the body region.

6. The method or claim 1 further comprising the step of etching away a portion of the undoped polysilicon layer overlying the body region and said at least one trench.

7. The method of claim 1 wherein said insulating layer is an oxide layer.

8. The method of claim 1 wherein said conductive electrode is polysilicon.

9. The method of claim 1 further comprising the step of forming a drain electrode on a bottom surface of the substrate.

10. The method of claim 9 further comprising the step of forming a source electrode coupled to the source region.

11. The method of claim 7 wherein said oxide layer has a thickness between about 500 and 800 angstroms.

12. The method of claim 11 wherein said conductive electrode comprises a second layer of undoped polysilicon and a layer of doped polysilicon disposed over said second undoped polysilicon layer.

13. The method of claim 1 wherein further comprising the step of implanting boron into at least said plurality of cathode regions and said anode to achieve a prescribed diode breakdown voltage.