Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system

• US 6,885,491 B2
• Filed: 03/20/2002
• Issued: 04/26/2005
• Est. Priority Date: 03/21/2001
• Status: Expired due to Fees

• Current Assignee: Carl-Zeiss-Stiftung
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Höller, Frank, Franke, Kurt, Menck, Alexander, Schmidt, Hagen, Weihnacht, Manfred, Ross-Messemer, Martin, Martin, Günter
• Primary Examiner(s): Ben, Loha
• Application Number:
  US10/102,613
• Publication Number:
  US 20030007712A1
• Time in Patent Office: 1,133 Days
• Field of Search: 369/44.12, 369/112.27, 356/521, 333/141, 333/145, 333/147, 333/195, 73/32.A, 73/240.5, 732/042.3, 345/177, 385/129, 385/130, 359/285, 359/286, 359/287, 359/305, 359/311, 359/312, 359/254, 359/859, 359/731, 359/558, 310/313.A, 310/313.B, 310/313.D, 310/313.R
• US Class Current: 359/285
• CPC Class Codes: G02F 1/33 Acousto-optical deflection devices circuit or control arrangements therefor G02F1/113
• CPC Class Codes: G03F 7/70158 Diffractive optical elements
• CPC Class Codes: G03F 7/70316 Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements

Abstract

A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.

To this end, the surface wave source 47 may have a directional characteristic and emits surface waves stronger in a preferred direction 53 than in a direction 54 opposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver 73, a surface wave damper 73, 87 may be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves.

Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.

Claims

1. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves on the surface of the substrate;

wherein the surface wave source has a directional characteristic and emits surface waves stronger in a preferred direction than in a direction opposite thereto, the surface waves emitted in the preferred direction forming a grating structure in the interaction region.

2. The diffraction-optical component according to claim 1, wherein the surface wave source comprises an electro-acoustic transducer which comprises an electrode structure with a plurality of sub-electrodes which are disposed spaced apart from adjacent sub-electrodes, a plurality of sections being provided wherein the sub-electrodes are periodically arranged in each section, the arrangement periods of different sections being different from one another.

3. The diffraction-optical component according to claim 1, wherein the surface wave source comprises an electro-acoustic transducer comprising two groups of finger electrodes, wherein the finger electrodes of each group are electro-conductively connected with one another and the finger electrodes of different groups are electrically insulated from one another, and wherein, between pairs of finger electrodes of different groups, there is arranged at least one intermediate electrode which is electrically insulated from the finger electrodes of each of the two groups.

4. The diffraction-optical component according to claim 3, wherein the finger electrodes of different groups extend at a distance from and in parallel to one another.

5. The diffraction optical component according to claim 3, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, and wherein the branch electrodes are electro-conductively connected to the intermediate electrode.

6. The diffraction optical component according to claim 3, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, wherein the branch electrodes are electro-conductively connected to the intermediate electrode, and wherein each of the branch electrodes and a respective finger electrode of a second group of the two groups of finger electrodes extend on a common straight line.

7. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

a surface wave receiver for receiving surface waves produced by the surface wave source and for delivering a measuring signal representing an amplitude of the surface waves at the location of the surface wave receiver; and

a controller for adjusting the frequency for the excitation of the surface wave source in response to the measuring signal.

8. The diffraction-optical component according to claim 7, wherein the controller is configured to adjust the frequency such that the amplitude of the received surface waves is substantially maximal.

9. The diffraction-optical component according to claim 7,

wherein an amplitude of the surface waves produced by the surface wave source has a first dependency upon the frequency for the excitation of the surface wave source;

wherein a magnitude of the measuring signal has a second dependency upon a frequency of the received surface waves; and

wherein said first dependency and said second dependency each have a characteristic having a maximum of a frequency width; and

wherein the frequency width of the second dependency is greater than the frequency width of the first shape dependency.

10. The diffraction-optical component according to claim 9, wherein the controller is configured to control the frequency of the excitation of the surface wave source based on the second dependency.

11. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source for producing surface waves to form a grating structure on the surface of the substrate; and

a surface wave damper provided outside of the interaction region,

wherein the surface wave damper comprises an acousto-electric transducer for converting energy of the surface waves at the location of the acousto-electric transducer into electric energy.

12. The diffraction-optical component according to claim 11, wherein the acousto-electric transducer comprises at least two terminals for supplying the electric energy and a resistive circuit connected to the two terminals for dissipating the electric energy.

13. The diffraction-optical component according to claim 12, wherein the resistive circuit has an electric impedance which is adjusted to an impedance of the acousto-electric transducer between the two terminals such that the energy dissipated in the resistive circuit is maximal.

14. The diffraction-optical component according to claim 13, wherein the electric impedance of the resistive circuit and the electric impedance of the acousto-electric transducer have conjugated-complex impedance values.

15. The diffraction-optical component according to claim 11, wherein the acousto-electric transducer of the surface wave damper has a directional characteristic and is configured for damping surface waves which impinge on the surface wave damper from a preferred direction stronger than surface waves which impinge from a direction opposite thereto.

16. The diffraction-optical component according to claim 11, wherein the interaction region is disposed on a connecting line between the surface wave source and the surface wave damper.

17. The diffraction-optical component according to claim 11, wherein the surface wave source is disposed on a connecting line between the interaction region and the surface wave damper.

18. The diffraction optical component according to claim 11, wherein the surface wave source comprises an electro-acoustic transducer having a plurality of sub-electrodes which are spaced apart from each other with substantially a first pitch in a region of the electro-acoustic transducer, and

wherein the acousto-electric transducer of the surface wave damper has a region in which a plurality of sub-electrodes are spaced apart from each other with substantially a second pitch which differs from the first pitch by 0.01% to 0.15%.

19. The diffraction optical component according to claim 11, wherein the surface wave source comprises an electro-acoustic transducer having a plurality of sub-electrodes which are spaced apart from each other with substantially a first pitch in a region of the electro-acoustic transducer, and

wherein the acousto-electric transducer of the surface wave damper has a region in which a plurality of sub-electrodes are spaced apart from each other with substantially a second pitch which differs from the first pitch by 0.15% to 0.5%.

20. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source for producing surface waves to form a grating structure on the surface of the substrate; and

a plurality of surface wave mirrors disposed on the substrate such that the plurality of surface wave mirrors provide a closed propagation path for the surface waves, the interaction region being disposed in the closed propagation path.

21. The diffraction-optical component according to claim 20, wherein the surface wave source has a directional characteristic and emits surface waves stronger in a preferred direction than in a direction opposite thereto, and wherein the surface wave source is disposed in the closed propagation path.

22. The diffraction-optical component according to claim 20, wherein the surface wave source is disposed outside of the closed propagation path and the surface waves emitted by the surface wave source are fed into the closed propagation path.

23. The diffraction-optical component according to claim 22, wherein a further surface wave mirror is provided for reflecting the surface waves emitted by the surface wave source into the closed propagation path.

24. The diffraction-optical component according to claim 20, wherein the plurality of surface wave mirrors is disposed such that the propagation path traverses the interaction region plural times from different directions.

25. A diffraction-optical component for providing a radiation-diffracting grating structure for light having a wavelength within a range from about 1 nm to about 100 nm, comprising:

a surface wave device including a substrate having a surface with an interaction region; and

at least one surface wave source for producing surface waves to form a surface grating structure on the surface within the interaction region of the substrate, wherein the surface wave source is disposed at a distance from the interaction region,

wherein the surface grating structure is formed by standing surface waves.

26. The diffraction-optical component according to claim 25, wherein the interaction region is disposed on a connecting line between the surface wave source and a surface wave mirror which reflects surface waves emitted by the surface wave source back to the interaction region.

27. The diffraction-optical component according to claim 25, wherein the interaction region is disposed within a surface wave resonator into which surface waves emitted by the surface wave source are fed-in.

28. The diffraction-optical component according to claim 27, wherein the surface wave resonator is formed by surface wave mirrors.

29. The diffraction-optical component according to claim 28, wherein a further surface wave mirror is provided for reflecting the surface waves emitted by the surface wave source into the surface wave resonator.

30. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region; and

at least one surface wave source for producing surface waves to form a grating structure on the surface of the substrate,

wherein the grating structure is formed by standing surface waves,

wherein the interaction region is disposed within a surface wave resonator into which surface waves emitted by the surface wave source are fed-in.

31. The diffraction-optical component according to claim 30, wherein the surface wave resonator is formed by surface wave mirrors.

32. The diffraction-optical component according to claim 30, wherein a further surface wave mirror is provided for reflecting the surface waves emitted by the surface wave source into the surface wave resonator.

33. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region,

at least one surface wave source for producing surface waves to form a surface grating structure on the surface of the substrate,

wherein the surface grating structure is formed by standing surface waves; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device, wherein the radiation has a wavelength in a range of about 1 nm to about 100 nm.

34. The illumination system according to claim 33, wherein the radiation source is a pulsed radiation source, the radiation of which is directed to the interaction region of the surface wave device and the radiation pulses of which are synchronized with the surface wave device such that the pulses are incident on the interaction region during periods of time if amplitudes of the standing surface waves exceed a predetermined threshold value.

35. The illumination system according to claim 34, wherein the surface wave source comprises a driving means for adjusting a frequency and a phase position of the produced surface waves, and wherein the driving means adjusts the frequency and the phase position in response to a pulse sequence of the radiation source such that an intensity of radiation which is diffracted by the grating structure with a predetermined diffraction order has a predetermined value, in particular, substantially a maximum value.

36. The illumination system according to claim 34, wherein the radiation source is a synchrotron radiation source.

37. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region,

at least one surface wave source for producing surface waves to form a grating structure on the surface of the substrate,

wherein the grating structure is formed by standing surface waves; and

a pulsed radiation source, the radiation of which is directed to the interaction region of the surface wave device and the radiation pulses of which are synchronized with the surface wave device such that the pulses are incident on the interaction region during periods of time if amplitudes of the standing surface waves exceed a predetermined threshold value.

38. The illumination system according to claim 37, wherein the surface wave source comprises a driving means for adjusting a frequency and a phase position of the produced surface waves, and wherein the driving means adjusts the frequency and the phase position in response to a pulse sequence of the radiation source such that an intensity of radiation which is diffracted by the grating structure with a predetermined diffraction order has a predetermined value, in particular, substantially a maximum value.

39. The illumination system according to claim 37, wherein the radiation source is a synchrotron radiation source.

40. A method for manufacturing a device, comprising at least one photolithographic step, wherein the photolithographic step comprises:

providing an exposure system, the exposure system comprising;

an illumination system, the illumination system comprising;

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region,

at least one surface wave source for producing surface waves to form a grating structure on the surface of the substrate,

wherein the grating structure is formed by standing surface waves;

and a radiation source, the radiation of which is directed to the interaction region of the surface wave device;

the exposure system further comprising, at least one condenser system, a mask provided with a pattern to be imaged, an imaging system and a substrate support,

wherein the condenser system and the mask are disposed such that radiation of the radiation source deflected in the interaction region in different spatial directions is directed to the mask, and

wherein the imaging system and the substrate support are disposed such that radiation reflected by the mask is imaged onto a substrate mountable to the substrate support

mounting a substrate provided with a radiation sensitive layer on the substrate support; and

exposing the radiation sensitive substrate with radiation of the radiation source deflected into different spatial directions.

41. An exposure system comprising:

an illumination system comprising;

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region,

at least one surface wave source for producing surface waves to form a grating structure on the surface of the substrate,

wherein the grating structure is formed by standing surface waves; and

a pulsed radiation source, the radiation of which is directed to the interaction region of the surface wave device and the radiation pulses of which are synchronized with the surface wave device such that the pulses are incident on the interaction region during periods of time if amplitudes of the standing surface waves exceed a predetermined threshold value;

the exposure system further comprising, at least one condenser system, a mask provided with a pattern to be imaged, an imaging system and a substrate support,

wherein the condenser system and the mask are disposed such that radiation of the radiation source deflected in the interaction region in different spatial directions is directed to the mask, and

wherein the imaging system and the substrate support are disposed such that radiation reflected by the mask is imaged onto a substrate mountable to the substrate support.

42. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

wherein the surface wave source comprises an electro-acoustic transducer which comprises an electrode structure with a plurality of sub-electrodes which are disposed spaced apart from adjacent sub-electrodes, a plurality of sections being provided wherein the sub-electrodes are periodically arranged in each section, the arrangement periods of different sections being different from one another.

43. The diffraction-optical component according to claim 42, wherein the surface wave source comprises an electro-acoustic transducer comprising two groups of finger electrodes, wherein the finger electrodes of each group are electro-conductively connected with one another and the finger electrodes of different groups are electrically insulated from one another and wherein, between pairs of finger electrodes of different groups, there is arranged at least one intermediate electrode which is electrically insulated from the finger electrodes of each of the two groups.

44. The diffraction optical component according to claim 43, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, and wherein the branch electrodes are electro-conductively connected to the intermediate electrode.

45. The diffraction-optical component according to claim 43, wherein the finger electrodes of different groups extend at a distance from and in parallel to one another.

46. The diffraction optical component according to claim 43, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, wherein the branch electrodes are electro-conductively connected to the intermediate electrode, and wherein each of the branch electrodes and a respective finger electrode of a second group of the two groups of finger electrodes extend on a common straight line.

47. A diffraction-optical component for providing a radiation-diffracting grating structure, comprising:

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

wherein the surface wave source comprises an electro-acoustic transducer comprising two groups of finger electrodes, wherein the finger electrodes of each group are electro-conductively connected with one another and the finger electrodes of different groups are electrically insulated from one another and, wherein between pairs of finger electrodes of different groups, there is arranged at least one intermediate electrode which is electrically insulated from the finger electrodes of each of the two groups.

48. The diffraction optical component according to claim 47, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, and wherein the branch electrodes are electro-conductively connected to the intermediate electrode.

49. The diffraction-optical component according to claim 47, wherein the finger electrodes of different groups extend at a distance from and in parallel to one another.

50. The diffraction optical component according to claim 47, wherein at least one branch electrode is disposed between each of plural pairs of adjacent finger electrodes of a first group of the two groups of finger electrodes, wherein the branch electrodes are electro-conductively connected to the intermediate electrode, and wherein each of the branch electrodes and a respective finger electrode of a second group of the two groups of finger electrodes extend on a common straight line.

51. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves on the surface of the substrate;

wherein the surface wave source has a directional characteristic and emits surface waves stronger in a preferred direction than in a direction opposite thereto, the surface waves emitted in the preferred direction forming a grating structure in the interaction region; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.

52. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

a surface wave receiver for receiving surface waves produced by the surface wave source and for delivering a measuring signal representing an amplitude of the surface waves at the location of the surface wave receiver; and

a controller for adjusting the frequency for the excitation of the surface wave source in response to the measuring signal; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.

53. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source for producing surface waves to form a grating structure on the surface of the substrate;

a surface wave damper provided outside of the interaction region,

wherein the surface wave damper comprises an acousto-electric transducer for converting energy of the surface waves at the location of the acousto-electric transducer into electric energy; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.

54. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source for producing surface waves to form a grating structure on the surface of the substrate; and

a plurality of surface wave mirrors disposed on the substrate such that the plurality of surface wave mirrors provide a closed propagation path for the surface waves, the interaction region being disposed in the closed propagation path; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.

55. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

wherein the surface wave source comprises an electro-acoustic transducer which comprises an electrode structure with a plurality of sub-electrodes which are disposed spaced apart from adjacent sub-electrodes, a plurality of sections being provided wherein the sub-electrodes are periodically arranged in each section, the arrangement periods of different sections being different from one another; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.

56. An illumination system comprising:

a diffraction-optical component, the diffraction-optical component comprising;

a surface wave device including a substrate having a surface with an interaction region;

a surface wave source excitable with an adjustable frequency for producing surface waves to form a grating structure on the surface of the substrate;

wherein the surface wave source comprises an electro-acoustic transducer comprising two groups of finger electrodes, wherein the finger electrodes of each group are electro-conductively connected with one another and the finger electrodes of different groups are electrically insulated from one another and, wherein between pairs of finger electrodes of different groups, there is arranged at least one intermediate electrode which is electrically insulated from the finger electrodes of each of the two groups; and

a radiation source, the radiation of which is directed to the interaction region of the surface wave device.