High angle micro-mirrors and processes
First Claim
1. A projection system comprising:
- a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirrors;
a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate, each mirror plate held on the substrate by a hinge structure that comprises a hinge that is spaced apart from the mirror plate so as to define a gap between the hinge and the mirror plate, wherein the hinge structure and mirror plate are constructed so as to be capable of being actuated from the first state to a second state that is at least 14°
(fourteen degrees) from the first state, and wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28 (twenty eight) degrees; and
wherein the hinge structure comprises a conductive ceramic layer.
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Accused Products
Abstract
A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14°, and preferably from 15° to 27° from the non-deflected resting state. In operation, the micro-mirror switches between an “ON”-state and “OFF”-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the “ON” and “OFF” states are thus separated and the contrast ratio is improved.
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Citations
60 Claims
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1. A projection system comprising:
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a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirrors;
a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate, each mirror plate held on the substrate by a hinge structure that comprises a hinge that is spaced apart from the mirror plate so as to define a gap between the hinge and the mirror plate, wherein the hinge structure and mirror plate are constructed so as to be capable of being actuated from the first state to a second state that is at least 14°
(fourteen degrees) from the first state, and wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28 (twenty eight) degrees; and
wherein the hinge structure comprises a conductive ceramic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A micro-mirror for use in a display system, wherein the size of the micro-mirror has a largest dimension of less than 20 microns, the micro-mirror comprising:
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a substrate;
a mirror plate formed on the substrate, wherein the size of the mirror plate is less than 20 microns, wherein the mirror plate comprises jagged edges; and
wherein the mirror plate functions in binary-mode including an ON-state and OFF state, the ON-state being at least 14°
(fourteen degrees) from a non-deflected resting state of the mirror plate; and
the OFF-state being the opposite direction relative to the ON-state of 14°
(fourteen degrees) or more from the non-deflected resting state of the mirror plate. - View Dependent Claims (26, 27)
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28. A method for displaying an image on a target, the image formed by a plurality of pixels, each pixel having either a bright-state or dark-state, using an array of micro-mirrors held on a substrate, each corresponding to a pixel of the image, the method comprising:
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directing a cone of light with an axis from a light source onto the micro-mirrors of the array, wherein the first axis of the cone of light is at an angle relative to a line perpendicular to the substrate of at least 28 (twenty eight) degrees;
addressing the micro-mirrors corresponding to the pixels in the bright-state;
rotating the addressed micro-mirrors from a non-deflected resting state to the bright state that is at least 14°
(fourteen degrees) from the non-deflected resting state;
reflecting, by the rotated micro-mirrors in the bright state, the incident light via projection optics onto a target; and
,when one or more pixels in the dark-state changes to the bright-state, addressing the micro-mirror corresponding to the changed pixels; and
rotating the addressed micro-mirrors corresponding to the changed pixels from an OFF-state to the ON-state, wherein the OFF-state is in the opposite direction of at least 14°
degrees from the non-deflective resting state relative to the ON-state. - View Dependent Claims (29, 30, 31, 32)
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33. A projection system comprising:
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a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirror;
a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a semiconductor substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate;
wherein each mirror plate is held on the substrate by a hinge structure that comprises a torsion hinge that is spaced apart from the mirror plate and disposed between the mirror plate and the semiconductor substrate so as to define a gap between the hinge and the minor plate;
wherein the hinge structure and mirror plate are constructed such that the mirror plate is capable of being actuated from the first state to an ON and OFF state both are 15°
to 27°
degrees from the first state but in opposite directions; and
wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28 (twenty eight) degrees. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A projection system comprising:
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a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirrors a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate;
wherein each mirror plate is held on the substrate by a hinge structure that comprises a torsion hinge that is spaced apart from the minor plate and disposed on a side of the mirror plate opposite to that of the substrate so as to define a gap between the hinge and the mirror plate;
wherein the hinge structure and mirror plate are constructed such that the mirror plate is capable of being actuated from the first state to a second state that is at least 14°
(fourteen degrees) from the first state but in opposite directions; and
wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28°
(twenty eight) degrees. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
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Specification