Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
First Claim
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1. A method of searching for clustering imperfect entities, comprising:
- entering data on imperfect entities present in a search target;
calculating a frequency distribution of the imperfect entities in unit cells divided from the search target;
approximating the frequency distribution by overlaying at least two discrete distribution functions; and
searching for clustering imperfect entities according to weights of the discrete distribution functions on the frequency distribution.
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Abstract
A method of searching for clustering faults is employed for semiconductor device manufacturing, The method enters data on faults present in a search target, calculates a frequency distribution of the faults in unit cells divided from the search target, approximates the frequency distribution by overlaying at least two discrete distribution functions, and searches for clustering faults according to weights of the discrete distribution functions on the frequency distribution.
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15 Claims
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1. A method of searching for clustering imperfect entities, comprising:
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entering data on imperfect entities present in a search target;
calculating a frequency distribution of the imperfect entities in unit cells divided from the search target;
approximating the frequency distribution by overlaying at least two discrete distribution functions; and
searching for clustering imperfect entities according to weights of the discrete distribution functions on the frequency distribution. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for searching for clustering imperfect entities, comprising:
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an input unit entering data on imperfect entities present in a search target;
a frequency distribution calculator calculating, according to the entered data, a frequency distribution of the imperfect entities in unit cells divided from the search target;
a discrete distribution function calculator approximating the frequency distribution by overlaying at least two discrete distribution functions; and
a clustering faults searcher searching for clustering imperfect entities according to weights of the discrete distribution functions on the frequency distribution. - View Dependent Claims (11, 12)
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13. A program executable by computer, comprising:
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entering data on imperfect entities present in a search target;
calculating a frequency distribution of the imperfect entities in unit cells divided from the search target;
approximating the frequency distribution by overlaying at least two discrete distribution functions; and
searching for clustering imperfect entities according to weights of the discrete distribution functions on the frequency distribution.
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14. A method of searching for clustering imperfect entities, comprising:
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entering data on imperfect entities present in a search target;
calculating a frequency distribution of the imperfect entities in unit cells divided from the search target;
dividing the frequency distribution into at least two discrete distribution functions; and
searching for clustering imperfect entities according to weights of the discrete distribution functions on the frequency distribution. - View Dependent Claims (15)
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Specification