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Piezoelectric resonator, filter, and electronic communication device

  • US 6,888,424 B2
  • Filed: 02/24/2004
  • Issued: 05/03/2005
  • Est. Priority Date: 07/03/2001
  • Status: Expired due to Fees
First Claim
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1. A piezoelectric resonator comprising:

  • a substrate;

    a vibration unit disposed on the substrate and having a structure in which at least one pair of an upper electrode and a lower electrode are opposed to each other, the upper and lower electrodes sandwiching the upper and lower surfaces of an internal thin-film portion including at least one layer of a piezoelectric thin-film; and

    an external thin-film portion provided under the lower electrode and including at least one layer of one of a piezoelectric thin-film and a dielectric thin-film;

    wherein the vibration unit is vibrated in an n-th harmonic, where n is an integer of 2 or greater, the upper electrode and the lower electrode are located substantially in the positions of the loops of the n-th harmonic;

    wherein the external thin-film portion includes an SiQ2 thin-film as a major component;

    the internal thin-film portion includes AIN as a major component; and

    nodes of the n-th harmonic exist in the internal and external thin-film portions.

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