Sensing of mirror position in an optical switch

• US 6,888,470 B2
• Filed: 09/30/2002
• Issued: 05/03/2005
• Est. Priority Date: 09/30/2002
• Status: Expired due to Term

• Current Assignee: WSOU Investments, LLC (WSOU Holdings, LLC)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Haueis, Martin
• Primary Examiner(s): Lieu, Julie B.
• Application Number:
  US10/261,085
• Publication Number:
  US 20040061618A1
• Time in Patent Office: 946 Days
• Field of Search: 340/606.4, 340/686.1, 359/291, 359/214, 359/298, 359/221, 359/224, 359/295
• US Class Current: 340/686.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/359 of the position of the moving element itself during switching, i.e. without monitoring the switched beams

Abstract

A MEMS device employed in an optical switch has a position sensor configured to determine mirror orientation in the device. The position sensor includes at least one light sensor located under an etch gap defining the mirror in the switch. Change of light intensity at each light sensor due to the change in separation corresponding to the etch gap during mirror motion is measured and related to the mirror deflection angle. Information about the angle may be used to provide feedback to the motion actuator, which then may be operated to orient the mirror more accurately.

Claims

1. A MEMS device, comprising:

a stationary part; and

a movable part movably coupled to the stationary part, wherein;

the stationary part includes a first light sensor adapted to generate a first electrical signal and a second light sensor adapted to generate a second electrical signal that indicate a position of the movable part with respect to the stationary part in response to light impinging on the device;

the movable part comprises;

a first plate rotatably coupled to the stationary part; and

a second plate rotatably coupled to the first plate;

the stationary part and the movable part are separated by a gap;

the first light sensor is adapted to be illuminated through the gap;

the separation between the stationary part and the movable part changes as the position of the movable part changes with respect to the stationary part;

the first electrical signal indicates orientation of the first plate with respect to the stationary part; and

the second electrical signal indicates orientation of the second plate with respect to the first plate.

2. The invention of claim 1, wherein:

the stationary part and the first plate are separated by a first gap;

the first plate and the second plate are separated by a second gap;

the first light sensor is adapted to be illuminated through the first gap;

the second light sensor is adapted to be illuminated through the second gap;

the separation between the first plate and the stationary part changes as the orientation of the first plate changes with respect to the stationary part; and

the separation between the second plate and the first plate changes as the orientation of the second plate changes with respect to the first plate.

3. The invention of claim 1, wherein:

the device is implemented using a first wafer and a second wafer;

the first wafer includes the movable part; and

the second wafer includes the first light sensor.

5. The invention of claim 1, wherein:

the movable part has a mirror; and

the MEMS device is part of an optical switch having two or more of the MEMS devices.

6. The invention of claim 1, wherein a motion actuator of the MEMS device is adapted to control motion of the movable part relative to the stationary part based on a feedback signal generated from the first electrical signal.

12. The invention of claim 1, wherein:

an aperture is defined in the movable part;

the second light sensor is adapted to be illuminated through the aperture; and

the effective area of the aperture changes as the position of the movable part changes with respect to the stationary part.

4. A MEMS device, comprising:

a stationary part; and

a movable part movably coupled to the stationary part, wherein;

the stationary part includes a first light sensor adapted to generate a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to light impinging on the device;

an aperture is defined in the movable part;

the first light sensor is adapted to be illuminated by the light that passes through the aperture substantially without reflection from the movable part; and

the effective area of the aperture changes as the position of the movable part changes with respect to the stationary part.

13. The invention of claim 4, wherein:

the device is implemented using a first wafer and a second wafer;

the first wafer includes the movable part; and

the second wafer includes the first light sensor.

14. The invention of claim 4, wherein:

the movable part has a mirror; and

the MEMS device is part of an optical switch having two or more of the MEMS devices.

15. The invention of claim 4, wherein a motion actuator of the MEMS device is adapted control motion of the movable part relative to the stationary part based on a feedback signal generated from the first electrical signal.

7. A method comprising:

receiving light at a MEMS device having a stationary part and a movable part movably coupled to the stationary part; and

generating, with a first light sensor of the stationary part, a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to the light;

generating, with a second light sensor of the stationary part, a second electrical signal in response to the light, wherein;

the movable part comprises;

a first plate rotatably coupled to the stationary part; and

a second plate rotatably coupled to the first plate;

the stationary part and the movable part are separated by a gap;

the first light sensor is illuminated through the gap;

the separation between the stationary part and the movable part changes as the position of the movable part changes with respect to the stationary part;

the first electrical signal indicates orientation of the first plate with respect to the stationary part; and

the second electrical signal indicates orientation of the second plate with respect to the first place.

8. The invention of claim 7, wherein:

the stationary part and the first plate are separated by a first gap;

the first plate and the second plate are separated by a second gap;

the first light sensor is illuminated through the first gap;

the second light sensor is illuminated through the second gap;

the separation between the stationary part and the first plate changes as the orientation of the first plate changes with respect to the stationary part; and

the separation between the second plate and the first plate changes as the orientation of the second plate changes with respect to the first plate.

9. The invention of claim 7, wherein the device is part of an optical switch and the light is an optical signal routed by the switch.

10. The invention of claim 7, wherein the device is part of an optical switch and the light is different from an optical signal routed by the switch.

11. The invention of claim 7, further comprising:

receiving a feedback signal based on the position of the movable part with respect to the stationary part; and

applying the feedback signal to a motion actuator of the MEMS device to control motion of the movable part relative to the stationary part.

16. The invention of claim 7, wherein:

an aperture is defined in the movable part;

the second light sensor is adapted to be illuminated through the aperture; and

the effective area of the aperture changes as the position of the movable part changes with respect to the stationary part.

17. A method comprising:

receiving light at a MEMS device having a stationary part and a movable part movably coupled to the stationary part; and

generating, with a first light sensor of the stationary part, a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to the light, wherein;

an aperture is defined in the movable part;

the first light sensor is adapted to be illuminated by the light that passes through the aperture substantially without reflection from the movable part; and

the effective area of the aperture changes as the position of the movable part changes with respect to the stationary part.

18. The invention of claim 17, further comprising:

receiving a feedback signal based on the position of the movable part with respect to the stationary part; and

applying the feedback signal to a motion actuator of the MEMS device to control motion of the movable part relative to the stationary part.

19. A MEMS device, comprising:

a stationary part; and

a movable part movably coupled to the stationary part, wherein;

the stationary part includes a first light sensor adapted to generate a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to light impinging on the device;

the stationary part and the movable part are separated by a gap;

the first light sensor is adapted to be illuminated by the light that passes through the gap substantially without reflection from the movable part; and

the separation between the stationary part and the movable part changes as the position of the movable part changes with respect to the stationary part.

20. A method comprising:

receiving light at a MEMS device having a stationary part and a movable part movably coupled to the stationary part; and

generating, with a first light sensor of the stationary part, a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to the light, wherein;

the stationary part and the movable part are separated by a gap;

the first light sensor is adapted to be illuminated by the light that passes through the gap substantially without reflection from the movable part; and

the separation between the stationary part and the movable part changes as the position of the movable part changes with respect to the stationary part.

21. A MEMS device, comprising:

a stationary part; and

a movable part movably coupled to the stationary part, wherein;

the stationary part includes a first light sensor adapted to generate a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to light impinging on the device;

the stationary part and the movable part include portions fabricated from a single layer of a layered wafer, wherein said portions are separated by an opening formed in said single layer; and

the first light sensor is adapted to be illuminated by the light that passes through the opening, wherein, when the movable part changes position with respect to the stationary part, the amount of the light that passes through the opening changes.

22. A method comprising:

receiving light at a MEMS device having a stationary part and a movable part movably coupled to the stationary part; and

generating, with a first light sensor of the stationary part, a first electrical signal that indicates a position of the movable part with respect to the stationary part in response to the light, wherein;

the stationary part and the movable part include portions fabricated from a single layer of a layered wafer, wherein said portions are separated by an opening formed in said single layer; and

the first light sensor is adapted to be illuminated by the light that passes through the opening, wherein, when the movable part changes position with respect to the stationary part, the amount of the light that passes through the opening changes.