×

Interferometry system having a dynamic beam steering assembly for measuring angle and distance

  • US 6,888,638 B1
  • Filed: 05/05/2000
  • Issued: 05/03/2005
  • Est. Priority Date: 05/05/1999
  • Status: Expired due to Fees
First Claim
Patent Images

1. An angle-measuring interferometry system comprising:

  • an interferometer which during operation directs a measurement beam to contact a measurement object, the interferometer comprising a beam steering assembly having a beam steering element positioned to contact and direct the measurement beam and an electronic positioning system to selectively orient the beam steering element within the interferometer; and

    an angle measurement system which during operation calculates a change in angular orientation of the measurement object based on a measurement signal derived from the measurement beam, wherein the measurement signal is derived from at least one interferometric signal produced by combining at least a portion of the measurement beam with a second beam after the measurement beam contacts the measurement object.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×