VCSEL and VCSEL array having integrated microlenses for use in a semiconductor laser pumped solid state laser system

• US 6,888,871 B1
• Filed: 07/12/2000
• Issued: 05/03/2005
• Est. Priority Date: 07/12/2000
• Status: Expired due to Term

• Current Assignee: Princeton Optronics Inc (Ams-Osram AG)
• Original Assignee: Princeton Optronics Inc (Ams-Osram AG)
• Inventors: Zhang, Jiamin, Zhang, Kaiyan, Ghosh, Chuni L., Watkins, Laurence S.
• Primary Examiner(s): Le, Hoanganh
• Assistant Examiner(s): Al-Nazer, Leith
• Application Number:
  US09/615,065
• Time in Patent Office: 1,756 Days
• Field of Search: 372/36, 372/69, 372/70, 372/75
• US Class Current: 372/75
• CPC Class Codes: H01S 3/0064 Anti-reflection devices, e.g. optical isolaters absorbing layers for marking or protecting purposes in laser working B23K26/50; magneto-optical non-reciprocal devices G02F1/093, G02F1/0955
• CPC Class Codes: H01S 3/025 of solid state lasers, e.g. housings or mountings
• CPC Class Codes: H01S 3/0604 in the form of a plate or disc
• CPC Class Codes: H01S 3/09415 the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
• CPC Class Codes: H01S 3/1062 using a controlled passive interferometer, e.g. a Fabry-Perot etalon
• CPC Class Codes: H01S 5/0207 Substrates having a special shape
• CPC Class Codes: H01S 5/024 Arrangements for thermal management
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18388 Lenses
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

A vertical cavity surface emitting laser (VCSEL) device with improved power and beam characteristics. The VCSEL device contains one VCSEL or an array of VCSELs. Each VCSEL has a corresponding integrated microlens, and a heat sink is attached to the device side of the VCSEL device. The heat sink allows improved heat dissipation, and therefore provides improved power characteristics of the VCSEL device output laser beam. The microlens or microlens array allows easier and more compact focussing of the VCSEL device output laser beam. The VCSEL device can be used in a variety of optical systems, and its improved power and focusing characteristics provide a compact, low power, low cost laser system.

Claims

1. A laser system comprising:

a VCSEL pump source; and

a doped-glass laser optically coupled with said VCSEL pump source to receive an output therefrom,

wherein the doped glass laser comprises a doped glass disk having a highly refelective mirror coating on a first face and a partially reflective coating on an opposing, output face, the highly reflective mirror faces the VCSEL pump source and is arranged to be transmitting at a wavelength of the VCSEL pump source.

2. A laser system in accordance with claim 1, wherein said doped-glass laser is an Er:

Yb doped-glass laser.

3. A laser system in accordance with claim 1, further comprising:

a selecting means for selecting a desired wavelength of said output laser beam; and

an optical coupler which partially reflects and partially transmits said output laser beam.

4. A laser system in accordance with claim 3, wherein said selecting means comprises an electrically or piezoelectrically-driven thin etalon.

5. A laser system in accordance with claim 3, wherein said selecting means comprises an electrically driven optical tunable filter.

6. A laser system in accordance with claim 1, wherein said VCSEL pump source comprises a VCSEL element.

7. A laser system in accordance with claim 6, wherein said VCSEL element comprises:

a substrate having a microlens formed therein;

a first mirror region, formed on said substrate;

an active layer formed on said first mirror region;

a second mirror region formed on said active layer; and

a heat sink formed on said second mirror region.

8. A laser system in accordance with claim 7, wherein said VCSEL element further comprises:

a contact layer on the second mirror region,

a metal layer on a surface of the heat sink facing the second mirror region; and

a bonding material which bonds the metal layer and the contact layer.

9. A laser system in accordance with claim 7, wherein a material of said heat sink is diamond.

10. A laser system in accordance with claim 7, wherein the microlens is a refractive or diffractive microlens, which reduces the divergence of the diode laser beam.

11. A laser system in accordance with claim 7, wherein the microlens is a refractive or diffractive microlens, which focuses the diode laser beam.

12. A laser system in accordance with claim 1, wherein the VCSEL pump source comprises a VCSEL array comprising a plurality of VCSEL elements arranged symmetrically on the substrate, each VCSEL element outputting an individual output laser beam so that the VCSEL array outputs a laser beam composed of individual output laser beams from said VCSEL elements, and further wherein each of said VCSEL elements comprises:

a substrate having a microlens formed therein;

a first mirror region, formed on said substrate;

an active layer formed on said first mirror region;

a second mirror region formed on said active layer; and

a heat sink formed on said second mirror region.

13. A laser system in accordance with claim 12, wherein each microlens is a refractive microlens aligned on a primary axis of the individual output laser beams, and further wherein each microlens reduces the divergence of each of the individual output laser beams, to thereby reduce the divergence of the VCSEL pump source laser beam.

14. A laser system in accordance with claim 12, wherein each microlens is a refractive microlens aligned on a primary axis of the individual output laser beams, and further wherein each microlens converges the individual output beams to a central point, to thereby focus the VCSEL pump source laser beam.

15. A laser system in accordance with claim 14, further comprising external lenses which are offset from the primary axes of the individual output laser beams in a direction toward a center of the VCSEL array, to thereby progressively focus the VCSEL pump source laser beam.

16. A laser system in accordance with claim 12, wherein each microlens is a refractive microlens aligned on a primary axis of the individual output laser beams, and further wherein the microlenses reduce the divergence of the composite output beam of the VCSEL array to less than 1°

, and thereby collimate the diode laser beam.

17. A laser system in accordance with claim 1, wherein said VCSEL pump source comprises a plurality of VCSEL elements arranged in a VCSEL array.

18. A method for generating and emitting a laser beam, comprising:

generating a pump laser beam within a VCSEL pump source;

emitting the pump laser beam from the VCSEL pump source through a microlens which is integrated within a substrate of the VCSEL pump source;

focusing the pump laser beam onto a doped-glass laser with a lens system which comprises the microlens;

pumping said doped-glass laser with said pump laser beam;

generating an output laser beam within said doped-glass laser; and

emitting said output laser beam,

wherein the doped glass laser is a doped glass disk having a highly refelective mirror coating on a first face and a partially reflective coating on an opposing, output face, the highly reflective mirror faces the VCSEL pump source and is arranged to be transmitting at a wavelength of the VCSEL pump source.

19. A tunable laser, comprising:

a semiconductor pump laser;

a laser output coupler disposed proximate said semiconductor pump laser;

a solid laser gain medium disposed between said semiconductor pump laser and said output coupler; and

a tunable wavelength selective device disposed between said solid laser gain medium and said laser output coupler,

wherein the solid laser gain medium is a doped glass disk having a highly reflective mirror coating on a first face, the highly reflective mirror faces the semiconductor pump laser and is arranged to be transmitting at the wavelength of the semiconductor pump laser,

wherein said semiconductor pump laser pumps said solid laser gain medium substantially along a path coinciding with a light output path, from a side opposed to said light output side.

20. A method for generating a beam of light, comprising:

pumping a solid laser gain medium with a VCSEL pump source along a pump direction, said gain medium being disposed within a laser resonant cavity; and

selecting an output wavelength from a range of wavelengths from said laser resonant cavity,

wherein said beam of light generated is substantially co-linear with said pump direction, on an opposing side of said solid laser gain medium, and

wherein a tunable wavelength selective device is disposed in the resonant cavity, the tunable wavelength selective device is constructed to restrict the laser output to a wavelength from said laser cavity.