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Graphical automated machine control and metrology

  • US 6,889,113 B2
  • Filed: 08/23/2002
  • Issued: 05/03/2005
  • Est. Priority Date: 08/23/2001
  • Status: Expired due to Term
First Claim
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1. A method of controlling a system, comprising:

  • creating or obtaining an image of a workpiece;

    overlaying the image with a first computer-generated graphic component selected from a plurality of computer-generated graphic components each having a different associated functionality;

    coordinating the scale of the image with that of the graphic components;

    executing the functionality associated with the overlaid first graphic component, the functionality of the first graphic component being defined at least in part by its geometric characteristics, the functionality being performed on a portion of the image, or a an object corresponding to the image, corresponding to the portion overlaid by the first graphic component, and where executing said functionality includes controlling the operation of a machine to image or alter a site on the workpiece using a charged particle beam or a laser beam.

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