3D array integrated cells for the sampling and detection of air bound chemical and biological species

• US 6,889,567 B2
• Filed: 01/10/2003
• Issued: 05/10/2005
• Est. Priority Date: 06/02/2000
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cabuz, Cleopatra
• Primary Examiner(s): WIlliams, Hezron
• Assistant Examiner(s): Miller, Rose M.
• Application Number:
  US10/340,231
• Publication Number:
  US 20040020265A1
• Time in Patent Office: 851 Days
• Field of Search: 417/413, 417/322, 417/413.1, 417/413.2, 417/413.3, 738/632.3, 738/631.1
• US Class Current: 73/863.23
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 43/14 having plate-like flexible members
• CPC Class Codes: G01N 1/24 Suction devices G01N1/22 - G01N1/2294 take precedence
• CPC Class Codes: G01N 33/0011 Sample conditioning preparing specimens for investigation G01N1/28
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array
• CPC Class Codes: G01N 33/0032 using two or more different physical functioning modes

Abstract

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes. Some mesopump-sensor systems can be manufactured using MEMS technology and can be coupled to controllers for sequencing the pumps and analyzing sensor outputs using methods including Principle Component Analysis.

Claims

1. A sensing system comprising:

an array of integrated cells for the sampling and detection of airborne chemical and biological species; and

wherein each cell of the array of integrated cells comprises;

a mesopump comprising a plurality of polymer layers forming a plurality of cavities; and

a metalized polymer diaphragm situated within each cavity of the plurality of cavities of the mesopump; and

at least one micro sensor structurally formed within the mesopump.

2. An array of integrated cells as recited in claim 1, wherein selected integrated cells have a first micro sensor type and selected other integrated cells have a second micro sensor type, wherein the first micro sensor type has different sensing characteristics than the second micro sensor type.

3. An array of integrated cells as recited in claim 2, wherein selected integrated cells have a heater means for directly or indirectly heating said micro sensors for desorbing an analyte.

4. A sensing system comprising:

an array of integrated mesopumps for the sampling and detection of airborne chemical and biological species; and

wherein each mesopump comprises;

a first layer, at least a portion of which is electrically chargeable;

a second layer opposing said first layer, at least a portion of which is electrically chargeable;

said first and second layers forming a cavity therebetween;

an electrostatically moveable diaphragm disposed between said first and second layers and disposed through said cavity for pumping fluid through said cavity;

a flow channel formed into at least one of said first and second layers and in fluid communication with said cavity; and

a micro sensor embedded in said flow channel and disposed in fluid communication with said flow channel, such that the pumped fluid passes said sensor when pumped into or out of said cavity.

5. The sensing system of claim 4, wherein each micro sensor may be one of a group comprising a chemoresistive sensor, a chemo-optical sensor, and a chemo-fluorescent sensor.

6. The sensing system of claim 4, wherein said first and second layers, diaphragm and flow channel of each mesopump comprises a plastic material.

7. The sensor system of claim 6, wherein said sensor system includes a controller having a program for sequencing the movement of said electrostatically moveable diaphragm of each mesopump to provide either unidirectional or bidirectional flow.

8. A sensing system comprising:

an array of integrated micro pumps for the sampling and detection of airborne chemical and biological species; and

wherein each micro pump comprises;

a plurality of polymer layers forming a plurality of cavities;

a metalized polymer diaphragm situated within each cavity of the plurality of cavities; and

at least one micro sensor formed within the plurality of cavities.

9. The sensing system of claim 8, wherein the at least one micro sensor is structurally integrated in each micro pump.

10. The sensing system of claim 8, wherein the at least one micro sensor is embedded in each micro pump.

11. The sensing system of claim 8, wherein said plurality of cavities of each micro pump and the diaphragm situated within each cavity are electrically connected to a controller for electrostatically moving the diaphragm in each cavity to provide a pumping action for moving a fluid within each cavity.

12. The sensing system of claim 11, wherein the controller may provide signals for moving the fluid in one of two possible directions in each micro pump.

13. A sensor system comprising:

an array of integrated micro pumps for the sampling and detection of airborne chemical and biological species; and

wherein each micro pump comprises;

a first layer, at least a portion of which is electrically chargeable;

a second layer opposing said first layer, at least a portion of which is electrically chargeable;

said first and second layers forming a cavity therebetween;

an electrostatically moveable diaphragm disposed between said first and second layers and disposed through said cavity for pumping fluid through said cavity;

a flow channel formed into at least one of said first and second layers and in fluid communication with said cavity;

a micro sensor disposed in fluid communication with said flow channel, such that the pumped fluid passes said sensor when pumped into or out of said cavity; and

at least another layer disposed opposing said second layer and having at least another cavity disposed between said second layer and said at least another layer, and at least another diaphragm disposed between said second layer and said at least another layer, said at least another cavity being in fluid communication with said first cavity; and

wherein the micro pump has no valve mechanism to assure only one direction of fluid flow in said flow channel.

14. The sensor system of claim 13 wherein said first and second layers, diaphragm, said at least another layer disposed opposing said second layer and said at least another diaphragm disposed between said second layer and said at least another layer are formed from a polymer material.

15. The sensor system of claim 14, wherein selected micro pumps have a first micro sensor type and selected other micro pumps have a second micro sensor type, wherein the first micro sensor type has different sensing characteristics than the second micro sensor type.

16. The sensor system of claim 15, wherein selected micro pumps have a heater means for directly or indirectly heating micro sensors for desorbing an analyte.

17. The sensor system of claim 13, wherein each micro sensor may be one of a group comprising a chemoresistive sensor, a chemo-optical sensor, and a chemo-fluorescent sensor.