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Multi-face forming mask device for vacuum deposition

  • US 6,890,385 B2
  • Filed: 08/23/2002
  • Issued: 05/10/2005
  • Est. Priority Date: 08/24/2001
  • Status: Active Grant
First Claim
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1. A gang-patterning mask device for vacuum evaporation having a plurality of affective mask parts arranged on longitudinal and transverse rows, said gang-patterning mask device comprising:

  • a first mask provided with a plurality of windows; and

    a second mask placed on the first mask and having a screen part provided with a plurality of fine slits extending a longitudinal direction;

    wherein the screen part of the second mask is formed in an entire region in a transverse direction covering at least all the windows, and the screen part and the windows define the effective mask parts.

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