Integrated sensor and electronics package
First Claim
Patent Images
1. An integrated sensor and electronics package comprising:
- a package substrate;
a micro-electromechanical sensor die bonded to one side of the package substrate;
one or more electronic chips bonded to an opposite side of the package substrate;
internal electrical connections running from the sensor die, through the package substrate, and to the one or more electronic chips; and
input/output connections on the package substrate electrically connected to at least one or more of the electronic chips.
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Abstract
An integrated sensor and electronics package wherein a micro-electromechanical sensor die is bonded to one side of the package substrate, one or more electronic chips are bonded to an opposite side of the package substrate, internal electrical connections run from the sensor die, through the package substrate, and to the one or more electronic chips, and input/output connections on the package substrate are electrically connected to one or more of the electronic chips.
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Citations
24 Claims
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1. An integrated sensor and electronics package comprising:
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a package substrate;
a micro-electromechanical sensor die bonded to one side of the package substrate;
one or more electronic chips bonded to an opposite side of the package substrate;
internal electrical connections running from the sensor die, through the package substrate, and to the one or more electronic chips; and
input/output connections on the package substrate electrically connected to at least one or more of the electronic chips. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An integrated sensor and electronics package comprising:
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a package substrate including a cavity in one surface thereof;
a micro-electromechanical sensor die including a sensor substrate and a cap sealed to the sensor substrate, the cap received in the cavity of the package substrate;
at least two stacked electronic chips bonded to an opposite side of the package substrate;
internal electrical connections running from the sensor die, through the cap, through the package substrate, and to the one or more electronic chips; and
input/output connections adjacent the cavity of the package substrate and electrically connected to one or more of the electronic chips.
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23. An integrated sensor and electronics package comprising:
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a package substrate including a cavity in one surface thereof;
a micro-electromechanical sensor die including a sensor substrate and a cap sealed to the sensor substrate, the sensor substrate bonded in the cavity of the package substrate;
at least two stacked electronic chips bonded to an opposite side of the package substrate;
internal electrical connections running from the sensor die, through the cap, through the package substrate, and to the one or more electronic chips; and
input/output connections adjacent the cavity package substrate and electrically connected to one or more of the electronic chips.
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24. An integrated sensor and electronics package comprising:
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a package substrate;
a micro-electromechanical sensor die including a sensor substrate, a microelectromechanical structure configured as an accelerometer or gyroscope machined from the substrate, and a cap covering the microelectromechanical structure;
an application specific integrated circuit chip for controlling the microelectromechanical structure bonded to an opposite side of the package substrate;
a digital gate array chip bonded to the application specific integrated circuit chip;
internal electrical connections running from the sensor die, through the package substrate, and to the application specific integrated circuit chip and running from the application specific integrated circuit chip to the digital gate array chip; and
input/output connections on the package substrate electrically connected to the application specific integrated circuit chip through the package substrate.
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Specification