Shear mode liquid metal switch

• US 6,891,315 B2
• Filed: 04/14/2003
• Issued: 05/10/2005
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US10/413,314
• Publication Number:
  US 20040201323A1
• Time in Patent Office: 757 Days
• Field of Search: 310/328, 310/333, 310/344, 310/348, 200/182, 200/211, 200187-189, 200/212, 200/214, 200/215, 200/219
• US Class Current: 310/328
• CPC Class Codes: G02B 26/004 based on a displacement or a deformation of a fluid
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure
• CPC Class Codes: H01H 55/00 Magnetostrictive relays
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays

Abstract

A piezoelectric relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in relay housing. A signal path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by piezoelectric pumps that control the flow of actuation fluid between a fluid reservoir and the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Claims

1. A piezoelectric optical relay comprising:

a relay housing containing a switching channel;

a first contact pad located in the switching channel and having a surface wettable by a liquid metal;

a second contact pad located in the switching channel and having a surface wettable by a liquid metal;

a third contact pad located in the switching channel between the first and second contact pads and having a surface wettable by a liquid metal;

a first liquid metal droplet in wetted contact with the first contact pad;

a second liquid metal droplet in wetted contact with the second contact pad;

a third liquid metal droplet in wetted contact with the third contact pad and adapted to move within the switching channel to coalesce with one of the first liquid metal droplet and the second liquid metal droplet;

a first optical path passing through the switching channel between the first and third liquid metal droplets;

a first piezoelectric pump operable to pump actuation fluid into the switching channel between the second liquid metal droplet and the third liquid metal droplet, thereby causing the second and third liquid metal droplets to separate and the first and third liquid metal droplets to coalesce; and

a second piezoelectric pump operable to pump actuation fluid into the switching channel between the first liquid metal droplet and the third liquid metal droplet, thereby causing the first and third liquid metal droplets to separate and the second and third liquid metal droplets to coalesce;

wherein the first optical path is broken when the first and third liquid metal droplets are coalesced and is completed when the first and third liquid metal droplets are separated.

2. A piezoelectric optical relay in accordance with claim 1, further comprising:

a reservoir, formed within the relay housing, for containing actuation fluid;

a first fluid passage coupling the reservoir to the first piezoelectric pump; and

a second fluid passage coupling the reservoir to the second piezoelectric pump,

wherein the first and second fluid passages are sized to restrict rapid fluid flow between the reservoir and the first and second piezoelectric pumps.

3. A piezoelectric optical relay in accordance with claim 1, wherein the first piezoelectric pump comprises:

a first pumping chamber formed within the relay housing; and

a first pair of piezoelectric elements, coupled end to end and forming a first side of the first pumping chamber;

wherein shearing motion of the first pair of piezoelectric elements changes the volume of the pumping chamber.

4. A piezoelectric optical relay in accordance with claim 3, wherein the first piezoelectric pump further comprises a second pair of piezoelectric elements, coupled end to end and forming a second side of the first pumping chamber, wherein shearing motion of the second pair of piezoelectric elements changes the volume of the pumping chamber.

5. A piezoelectric optical relay in accordance with claim 1, wherein the first optical path comprises:

a first optical waveguide configured to transmit light into the switching channel;

a second optical waveguide, optically aligned with the first optical waveguide and configured to receive light from the first optical waveguide when the first and third liquid metal droplets are separated.

6. A piezoelectric optical relay in accordance with claim 1, further comprising a second optical path, passing between the second and third liquid metal droplets.

7. A piezoelectric optical relay in accordance with claim 1, further comprising a slug coupled to the third liquid metal droplet, wherein the slug moves with a motion of the third liquid metal droplet.

8. A piezoelectric optical relay in accordance with claim 1, wherein the relay housing comprises:

a circuit substrate layer supporting electrical connections to the first and second piezoelectric pumps;

a piezoelectric layer containing the first and second piezoelectric pumps;

a switching layer, positioned between the circuit substrate layer and the piezoelectric layer, in which the switching channel is formed;

a reservoir layer having a reservoir for containing actuation fluid formed therein; and

a channel cap layer, positioned between the piezoelectric layer and the switching layer;

the channel cap layer having first and second orifices therein to allow actuation fluid to pass between the first and second piezoelectric pumps and the switching channel.

9. A piezoelectric optical relay in accordance with claim 8, wherein the relay housing further comprises a passage layer positioned between the reservoir layer and the piezoelectric layer, the passage layer containing a first fluid passage coupling the reservoir to the first piezoelectric pump and a second fluid passage coupling the reservoir to the second piezoelectric pump.

10. A piezoelectric optical relay in accordance with claim 8, wherein the first optical path comprises:

a first optical waveguide embedded in a first notch in the switching layer and configured to transmit light into the switching channel;

a second optical waveguide embedded in a second notch in the switching layer and optically aligned with the first optical waveguide, the second optical waveguide being configured to receive light from the first optical waveguide if the first and third liquid metal droplets are separated.

11. A method for switching an optical path in a piezoelectric optical relay having a first liquid metal droplet moveable within a switching channel, the method comprising:

coupling an input optical signal to an input optical waveguide of the piezoelectric optical relay, the input optical waveguide being optically aligned with an output optical waveguide to form the optical path;

if the optical path is to be completed;

energizing a first piezoelectric pump to move actuation fluid into the switching channel and thereby move the first liquid metal droplet out of the optical path, whereby the input optical waveguide is optically coupled to the output optical waveguide; and

if the optical path is to be broken;

energizing a second piezoelectric pump to move actuation fluid into the switching channel and thereby move the first liquid metal droplet into the optical path, whereby the input optical waveguide is optically decoupled from the output optical waveguide.

12. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, wherein a slug coupled to the first liquid metal droplet is operable to block or unblock the optical path.

13. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, wherein energizing the first piezoelectric pump causes at least one piezoelectric element to deform in a shear mode and decrease the volume of a first pumping chamber.

14. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, wherein the first liquid metal droplet is in wetted contact with a first contact pad positioned in the switching channel between a second contact pad and a third contact pad and wherein:

energizing the first piezoelectric pump causes the first liquid metal droplet to coalesce with a second liquid metal droplet in wetted contact with the second contact pad; and

energizing the second piezoelectric pump causes the first liquid metal droplet to coalesce with a third liquid metal droplet in wetted contact with the third contact pad.

15. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, further comprising:

if the optical path is to be completed;

energizing the second piezoelectric pump to draw actuation fluid out of the switching channel and thereby move the first liquid metal droplet out of the optical path; and

if the optical path is to be broken;

energizing the first piezoelectric pump to draw actuation fluid out of the switching channel and thereby move the first liquid metal droplet into the optical path.

16. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, further comprising:

if the optical path is to be completed;

de-energizing the first piezoelectric pump after the first liquid metal droplet has been moved out of the optical path; and

if the optical path is to be broken;

de-energizing the second piezoelectric pump after the first liquid droplet has been moved into the optical path.

17. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 16, wherein the de-energizing is performed slower than the energizing to allow actuation fluid to be drawn from a reservoir of actuation fluid.

18. A method for switching an optical path in a piezoelectric optical relay in accordance with claim 11, wherein the first piezoelectric pump comprises a pumping chamber bounded in part by first and second piezoelectric elements joined end-to-end and wherein energizing the first piezoelectric pump comprises:

applying an electrical voltage across the first piezoelectric element to cause it to deform in a shearing mode and change the volume of the first pumping chamber.

19. A piezoelectric relay comprising:

a relay housing containing a switching channel;

a first contact pad located in the switching channel and having a surface wettable by a liquid metal;

a second contact pad located in the switching channel and having a surface wettable by a liquid metal;

a third contact pad located in the switching channel between the first and second contact pads and having a surface wettable by a liquid metal;

a first liquid metal droplet in wetted contact with the first contact pad;

a second liquid metal droplet in wetted contact with the second contact pad;

a third liquid metal droplet in wetted contact with the third contact pad and adapted to move within the switching channel to coalesce with one of the first liquid metal droplet and the second liquid metal droplet;

a first electrical path operable to be coupled to the first contact pad and the third contact pad;

a second electrical path operable to be coupled to the second contact pad and the third contact pad;

a first piezoelectric pump operable to pump actuation fluid into the switching channel between the second liquid metal droplet and the third liquid metal droplet, thereby causing the second and third liquid metal droplets to separate and the first and third liquid metal droplets to coalesce; and

a second piezoelectric pump operable to pump actuation fluid into the switching channel between the first liquid metal droplet and the third liquid metal droplet, thereby causing the first and third liquid metal droplets to separate and the second and third liquid metal droplets to coalesce;

wherein the first electrical path is completed when the first and third liquid metal droplets are coalesced and the second electrical path is completed when the second and third liquid metal droplets are coalesced.

20. A piezoelectric relay in accordance with claim 19, further comprising a slug operable to be coupled to one of:

the first contact pad and the third contact pad; and

the second contact pad and the third contact pad.

21. A method for switching one or more electrical signal paths in a piezoelectric relay having a first liquid metal droplet moveable within a switching channel, the method comprising:

coupling an input electrical signal to a first contact pad and a third contact pad of the piezoelectric relay;

if a first electrical signal path is to be completed;

energizing a first piezoelectric pump to move actuation fluid into the switching channel and thereby move the first liquid metal droplet, so that the first liquid metal droplet is coupled to the third contact pad and the first contact pad; and

if a second electrical signal path is to be broken;

energizing a second piezoelectric pump to move actuation fluid into the switching channel and thereby move the first liquid metal droplet, so that the first liquid metal droplet is coupled to the third contact pad and a second contact pad.

22. A method for switching one or more electrical signal paths in a piezoelectric relay in accordance with claim 21, wherein the first liquid metal droplet is coupled to a slug, said slug operable to couple the third contact pad to one or more of the first contact pad and the second contact pad.