Apparatus and method for detecting photon emissions from transistors
First Claim
1. A method for analyzing photon emission data to discriminate between photons emitted from a transistor and noise, the photon emission data comprising a first photon emission and at least one second photon emission, each photon emission comprising characteristics including a spatial component corresponding with the space where each photon was detected and a temporal component corresponding with the time when each photon was detected, the method comprising:
- receiving the first photon emission and the at least one second photon emission; and
determining whether at least one characteristic of the first photon emission correlates with at least one characteristic of the second photo emission;
wherein the first photon emission and the second photon emission are attributed to a transistor rather than noise when at least one characteristic of the first photon emission correlates with at least one characteristic of the second photon emission.
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Abstract
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
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Citations
23 Claims
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1. A method for analyzing photon emission data to discriminate between photons emitted from a transistor and noise, the photon emission data comprising a first photon emission and at least one second photon emission, each photon emission comprising characteristics including a spatial component corresponding with the space where each photon was detected and a temporal component corresponding with the time when each photon was detected, the method comprising:
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receiving the first photon emission and the at least one second photon emission; and
determining whether at least one characteristic of the first photon emission correlates with at least one characteristic of the second photo emission;
wherein the first photon emission and the second photon emission are attributed to a transistor rather than noise when at least one characteristic of the first photon emission correlates with at least one characteristic of the second photon emission. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification