Integrated transformer

• US 6,891,461 B2
• Filed: 03/21/2001
• Issued: 05/10/2005
• Est. Priority Date: 11/23/1999
• Status: Expired due to Fees

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Gardner, Donald S.
• Primary Examiner(s): Nguyen, Tuyen T.
• Application Number:
  US09/813,496
• Publication Number:
  US 20010050607A1
• Time in Patent Office: 1,511 Days
• Field of Search: 336/83, 336/200, 336206-208, 336220-222, 336/232, 336/233, 257/531
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 2017/0046 with a conductive path having a bridge
• CPC Class Codes: H01F 2017/008 Electric or magnetic shielding of printed inductances
• CPC Class Codes: H01F 41/042 by thin film techniques
• CPC Class Codes: H01F 41/046 structurally combined with ferromagnetic material
• CPC Class Codes: H01L 23/522 including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 23/552 Protection against radiation, e.g. light or electromagnetic waves
• CPC Class Codes: H01L 23/645 Inductive arrangements H01L23/647, H01L23/66 take precedence
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A transformer comprises a first inductor and a second inductor. The first inductor has one or more trenches and comprises a first conductor defining a signal path along the one or more trenches of the first inductor. The second inductor has one or more trenches and comprises a second conductor defining a signal path along the one or more trenches of the second inductor.

Claims

1. A transformer comprising:

a first inductor having an at least one trench, the at least one trench having a pair of walls and a bottom;

a first conductor defining a first signal path along the pair of walls and the bottom of the at least one trench of the first inductor;

a first magnetic layer defining a second signal path parallel to the first signal path along the pair of walls and the bottom of the at least one trench of the first inductor;

a second inductor having an at least one trench, the at least one trench having a pair of walls and a bottom;

a second conductor defining a third signal oath along the pair of walls and the bottom of the at least one trench of the second inductor;

a second magnetic layer defining a fourth signal path parallel to the third signal path along the pair of walls and the bottom of the at least one trench of the second inductor.

2. The transformer of claim 1, wherein the first inductor comprises one or more legs each having at least one trench and the second inductor comprises one or more legs each having at least one trench;

wherein the first conductor defines one or more signal paths each along one or more legs of the first inductor; and

wherein the second conductor defines one or more signal paths each along one or more legs of the second inductor.

3. The transformer of claim 2, wherein the first inductor has at least two adjacent legs and the second inductor has at least one leg and at least a portion of the at least one leg of the second inductor is positioned between the at least two adjacent legs of the first inductor such that an electromagnetic field generated by the first inductor induces a voltage potential across the second inductor.

4. The transformer of claim 2, wherein the first and second inductors are positioned side-by-side.

5. The transformer of claim 1, wherein the first magnetic layer and the second magnetic layer comprise an amorphous cobalt alloy.

6. The transformer of claim 1, wherein the first inductor comprises one or more legs each having at least one trench and the second inductor comprises one or more legs each having at least one trench;

and

wherein the first magnetic layer and the second magnetic layer are coupled to form magnetic strips extending across one or more legs of the first inductor and one or more legs of the second inductor.

7. A transformer comprising:

a substrate;

a first patterned dielectric layer over the substrate, the first patterned dielectric layer defining an at least one trench for a first inductor, the at least one trench for the first inductor having a pair of walls and a bottom and an at least one trench for a second inductor, the at least one trench for the second inductor having a pair of walls and a bottom;

a first magnetic layer over the first patterned dielectric layer, the first magnetic layer defining a path along the pair of walls and the bottom of the first inductor;

a second magnetic layer over the first patterned dielectric layer, the second magnetic layer defining a path along the pair of walls and the bottom of the second inductor;

a first conductor over the first magnetic layer, the first conductor defining a signal path along the pair of walls and the bottom of the first inductor; and

a second conductor over second magnetic layer, the second conductor defining a signal path along the pair of walls and the bottom of the second inductor.

8. The transformer of claim 7, wherein the first conductor defines one or more signal paths each along one or more legs each having at least one trench and the second conductor defines one or more signal paths each along one or more legs each having at least one trench.

9. The transformer of claim 8, wherein at least a portion of a leg for the second conductor is positioned between two legs for the first conductor.

10. The transformer of claim 8, wherein the first and second conductors are positioned side-by-side.

11. The transformer of claim 7, wherein the first magnetic layer and the second magnetic layer comprise an amorphous cobalt alloy.

12. The transformer of claim 7, comprising a second dielectric layer over the first and second conductors and the first and second magnetic layers over the first dielectric layer, wherein the first magnetic layer lies over the first conductor and the second magnetic layer lies over the second conductor.

13. The transformer of claim 7, further comprising a third magnetic layer over the first conductor and a fourth magnetic layer over the second conductor, and a third dielectric layer over the third magnetic layer and the fourth magnetic layer.

14. The transformer of claim 13, wherein the first conductor defines one or more signal paths each along one or more legs each having one or more trenches and the second conductor defines one or more signal paths each along one or more legs each having one or more trenches;

and

wherein the first, second, third, and fourth magnetic layers are coupled to form magnetic strips extending across one or more legs for the first conductor and one or more legs for the second conductor.