Anisotropic etching of optical components
First Claim
1. A light coupling assembly, comprising:
- a device portion including a plurality of optical devices arranged in a first fixed pattern within at least a portion of a silicon surface layer of a silicon-on-insulator (SOI) structure, said optical devices spaced a prescribed distance apart; and
a silicon-based, passive light coupling portion including a plurality of anisotropically etched coupling elements, said coupling elements arranged in a second, fixed pattern so as to correspond with a respective one of the plurality of optical devices, wherein the light coupling portion is disposed in an aligned arrangement with the device portion so as to couple light into each optical device.
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Accused Products
Abstract
An anisotropically etched prism assembly including a device portion, a light coupling portion, and an alignment portion. The anisotropically etched prism assembly having a plurality of optical devices arranged in a first fixed pattern. Each pair of said plurality of optical devices spaced a first prescribed distance apart. The light coupling portion including a plurality of anisotropically etched prisms. Each one of the plurality of anisotropically etched prisms is arranged in second fixed pattern so as to correspond with a respective one of the plurality of optical devices. Each one of the pairs of said plurality of anisotropically etched prisms are spaced a second prescribed distance apart, the second prescribed distance substantially equals the first prescribed distance. The alignment portion aligns the light coupling portion and the device portion. Each one of said plurality of anisotropically etched prisms are aligned with a respective one of said plurality of optical devices.
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Citations
56 Claims
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1. A light coupling assembly, comprising:
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a device portion including a plurality of optical devices arranged in a first fixed pattern within at least a portion of a silicon surface layer of a silicon-on-insulator (SOI) structure, said optical devices spaced a prescribed distance apart; and
a silicon-based, passive light coupling portion including a plurality of anisotropically etched coupling elements, said coupling elements arranged in a second, fixed pattern so as to correspond with a respective one of the plurality of optical devices, wherein the light coupling portion is disposed in an aligned arrangement with the device portion so as to couple light into each optical device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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52. A light coupling assembly, comprising:
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a device portion including a plurality of optical devices arranged in a first fixed pattern within at least a portion of a silicon surface layer of a silicon-on-insulator (SOI) structure, each of said plurality of optical devices spaced by a prescribed spacing; and
a silicon-based, passive light coupling portion wafer including a plurality of etched light coupling elements, each one of the plurality of etched light coupling elements arranged in a second, fixed pattern such that the etched light coupling elements are disposed in an aligned arrangement with respective ones of the optical devices so as to couple light into the optical devices. - View Dependent Claims (53, 54, 55)
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56. A method of etching a light coupling assembly, comprising:
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etching a device portion include a plurality of optical devices arranged in a first fixed pattern within a silicon surface layer of a silicon-on-insulator (SOI) structure, wherein each of said plurality of optical devices is spaced by a first prescribed spacing;
etching a silicon-based, passive light coupling portion wafer including a plurality of etched light coupling elements, wherein each one of the plurality of etched light coupling elements is arranged in a second, fixed pattern so as to correspond with a respective one of the plurality of optical devices, and wherein each one of said plurality of etched light coupling elements is spaced by a second prescribed spacing, the second prescribed spacing equaling the first prescribed spacing; and
aligning the light coupling portion wafer and tire device portion, wherein each one of said plurality of etched light coupling elements is aligned with a respective one of said plurality of optical devices.
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Specification