Method and system of drying materials and method of manufacturing circuit boards using the same
First Claim
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1. A method of drying a circuit board material comprising the steps of:
- evacuating air in a vacuum chamber containing said material under an atmospheric pressure to a predefined pressure; and
supplying air to said vacuum chamber to return the pressure in said chamber to the atmospheric pressure, wherein said evacuating and supplying steps are performed more than once, and the predefined pressure of a subsequent evacuating step is lower than the predefined pressure of the previous evacuating step.
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Abstract
A method and system of cleaning to remove cutting dust and the like generated and adhering to a board material (1a) during drilling for electrical connection, and drying the board material, in a process of manufacturing a circuit board for small electronic equipment and the like. A large amount of board materials can be treated without receiving thermal damage by performing the steps of: placing sheets of the board material that have absorbed moisture resulting from cleaning, like a stack in a vacuum chamber (11); and drying the board material by repeating evacuation and pressurization under predetermined conditions while heating the board material.
22 Citations
23 Claims
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1. A method of drying a circuit board material comprising the steps of:
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evacuating air in a vacuum chamber containing said material under an atmospheric pressure to a predefined pressure; and
supplying air to said vacuum chamber to return the pressure in said chamber to the atmospheric pressure, wherein said evacuating and supplying steps are performed more than once, and the predefined pressure of a subsequent evacuating step is lower than the predefined pressure of the previous evacuating step. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of manufacturing a circuit board comprising the steps of:
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bonding a film shape material to at least one surface of a substrate material to form a board material with a film;
forming one of a through hole and a blind hole by irradiating said board material with a film with a laser;
cleaning said board material to remove at least one of altered parts and altered substances formed on an inner wall of one of said through hole and said blind hole, and to remove foreign substance adhering to a surface of said board material with a film;
blowing gas onto the surface of said board material with a film to remove water drops adhering to said surface;
drying moisture adhering to and absorbed in said board material with a film, using a method of drying; and
forming an electrical connection means in one of said through hole and said blind hole, said method of drying comprising the steps of;
evacuating air in a vacuum chamber containing said board material under an atmospheric pressure to a predefined pressure; and
supplying air to said vacuum chamber to return the pressure in said chamber to the atmospheric pressure, wherein said evacuating and supplying steps are performed more than once, and the predefined pressure of a subsequent evacuating step is lower than the predefined pressure of the previous evacuating step. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A method of manufacturing a circuit board comprising the steps of:
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bonding a film-shape material to at least one surface of a substrate material to form a board material with a film;
forming one of a through hole and a blind hole by irradiating said board material with a film with a laser;
filling one of said through hole and said blind hole with conductive paste;
drying a double-sided circuit board having circuit patterns on both surfaces thereof, using a method of drying; and
laminating said double-sided circuit board and said board material to form a multi-layer circuit board, said board material being filled with said conductive paste and said film-shape materials on the both sides of said board material being peeled off, said method of drying comprising the steps of;
evacuating air in a vacuum chamber containing said circuit board under an atmospheric pressure to a predefined pressure; and
supplying air to said vacuum chamber to return the pressure in said chamber to the atmospheric pressure, wherein said evacuating and supplying steps are performed more than once, and the predefined pressure of a subsequent evacuating step is lower than the predefined pressure of the previous evacuating step.
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23. A method of manufacturing a circuit board comprising the steps of:
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removing moisture from a circuit board having a circuit pattern on at least one surface thereof;
bonding a board material to at least one surface of said circuit board;
laminating said circuit board and said board material by further bonding a metal foil on said board material, and heating and pressing said circuit board and said board material at the same time; and
forming a means for electrically connecting said circuit board and said metal foil, wherein moisture contained in said circuit board is removed using a method of drying, said method of drying comprising the steps of;
evacuating air in a vacuum chamber containing said circuit board under an atmospheric pressure to a predefined pressure; and
supplying air to said vacuum chamber to return the pressure in said chamber to the atmospheric pressure, wherein said evacuating and supplying steps are performed more than once, and the predefined pressure of a subsequent evacuating step is lower than the predefined pressure of the previous evacuating step.
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Specification