Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch

• US 6,894,237 B2
• Filed: 04/14/2003
• Issued: 05/17/2005
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Dove, Lewis R., Botka, Julius K.
• Primary Examiner(s): Friedhofer, Michael
• Assistant Examiner(s): KLAUS, LISA NHUNG
• Application Number:
  US10/413,855
• Publication Number:
  US 20040200705A1
• Time in Patent Office: 764 Days
• Field of Search: 200/214, 200220-224, 200233-235, 200/228, 200/241, 200/243, 200/181, 200/182, 200/185, 200/188, 200/190, 200191-194, 200/198, 200/199, 200/236, 200/506, 200/DIG.5, 200/DIG.43
• US Class Current: 200/182
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/004 Operated by deformation of container
• CPC Class Codes: H01H 29/30 with level of surface of contact liquid displaced by expansion or evaporation thereof

Abstract

A switch has a channel plate that defines at least a portion of a number of cavities. A switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. A plurality of planar signal conductors extend from edges of the switch to within the one or more cavities holding the switching fluid, and are in wetted contact with the switching fluid. Corners in paths of the planar signal conductors may be limited to greater than 90°, about 135°, or equal to or greater than 135°. In one embodiment, signal path corners are so limited, but the planar signal conductors do not extend to the edges of the switch. In another embodiment, the one or more cavities holding the switching fluid are at least partly defined by a bent switching fluid channel.

Claims

1. A switch, comprising:

a) a channel plate defining at least a portion of a number of cavities;

b) a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid; and

c) a plurality of planar signal conductors extending from edges of the switch to within the one or more cavities holding the switching fluid, and in wetted contact with the switching fluid.

2. The switch of claim 1, wherein:

a) the one or more cavities holding the switching fluid are at least partly defined by a bent switching fluid channel in the channel plate;

b) one of the planar signal conductors presents within the cavity defined by the bent switching fluid channel at the bend; and

c) different ones of the planar signal conductors present within the cavity defined by the bent switching fluid channel on either side of the bend.

3. The switch of claim 2, wherein the tightest corner in a path taken by any of the planar signal conductors is about 135°

;

the switch further comprising planar ground conductors adjacent either side of each planar signal conductor.

4. The switch of claim 1, wherein a path taken by one of the planar signal conductors comprises a corner, and wherein a tightest corner in a path taken by any of the planar signal conductors is greater than 90°

.

5. The switch of claim 4, wherein the tightest corner in a path taken by any of the planar signal conductors is about 135°

.

6. The switch of claim 4, wherein the tightest corner in a path taken by any of the planar signal conductors is equal to or greater than 135°

.

7. The switch of claim 1, further comprising planar ground conductors adjacent either side of each planar signal conductor.

8. The switch of claim 1, further comprising:

a) a plurality of surface contacts; and

b) a plurality of conductive vias that electrically couple ones of the planar signal conductors to the surface contacts.

9. The switch of claim 1, further comprising:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more heater resistors, exposed within cavities holding the actuating fluid; and

c) a pair of planar conductors extending from edges of the switch to each heater resistor.

10. The switch of claim 9, wherein one of the planar conductors coupled to each heater resistor is a planar ground conductor that runs adjacent to one of the planar signal conductors.

11. The switch of claim 1, further comprising:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more piezoelectric elements, exposed within cavities holding the actuating fluid; and

c) a pair of planar conductors extending from edges of the switch to each piezoelectric element.

12. The switch of claim 11, wherein one of the planar conductors coupled to each piezoelectric element is a planar ground conductor that runs adjacent to one of the planar signal conductors.

13. A switch, comprising:

a) a channel plate defining at least a portion of a number of cavities;

b) a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid;

c) a plurality of surface contacts;

d) a plurality of conductive vias, electrically coupled to corresponding ones of the plurality of surface contacts; and

e) a plurality of planar signal conductors extending from corresponding ones of the conductive vias to within the one or more cavities holding the switching fluid, and in wetted contact with the switching fluid;

wherein a path taken by one of the planar signal conductors comprises a corner, and wherein a tightest corner in a path taken by any of the planar signal conductors is about 135°

.

14. The switch of claim 13, wherein:

a) the one or more cavities holding the switching fluid are at least partly defined by a bent switching fluid channel in the channel plate;

b) one of the planar signal conductors presents within the cavity defined by the bent switching fluid channel at the bend; and

c) different ones of the planar signal conductors present within the cavity defined by the bent switching fluid channel on either side of the bend.

15. The switch of claim 13, wherein the tightest corner in a path taken by any of the planar signal conductors is equal to or greater than 135°

.

16. The switch of claim 13, further comprising planar ground conductors adjacent either side of each planar signal conductor.

17. A device, comprising:

a) a substrate; and

b) a switch, mounted on the substrate and electrically coupled to one or more conductive elements on the substrate, comprising;

i) a channel plate defining at least a portion of a number of cavities;

ii) a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid; and

iii) a plurality of planar signal conductors extending from edges of the switch to within the one or more cavities holding the switching fluid, and in wetted contact with the switching fluid.

18. The device of claim 17, further comprising wirebonds coupling the plurality of planar signal conductors to conductive elements on the substrate.

19. The device of claim 18, wherein the switch further comprises:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more heater resistors, exposed within cavities holding the actuating fluid;

c) a plurality of conductive vias; and

d) a pair of planar conductors extending between each heater resistor and ones of said conductive vias;

the device further comprising solder balls coupling the conductive vias to conductive elements on the substrate.

20. The device of claim 18, wherein the switch further comprises:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more heater resistors, exposed within cavities holding the actuating fluid; and

c) a pair of planar conductors extending from edges of the switch to each heater resistor;

the device further comprising wirebonds coupling each heater resistor'"'"'s planar conductors to conductive elements on the substrate.

21. The device of claim 18, wherein the switch further comprises:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more piezoelectric elements, exposed within cavities holding the actuating fluid;

c) a plurality of conductive vias; and

d) a pair of planar conductors extending between each piezoelectric element and ones of said conductive vias;

the device further comprising solder balls coupling the conductive vias to conductive elements on the substrate.

22. The device of claim 18, wherein the switch further comprises:

a) an actuating fluid to apply said forces to the switching fluid, held within one or more of the cavities;

b) one or more piezoelectric elements, exposed within cavities holding the actuating fluid; and

c) a pair of planar conductors extending from edges of the switch to each piezoelectric element;

the device further comprising wirebonds coupling each piezoelectric element'"'"'s planar conductors to conductive elements on the substrate.

23. The device of claim 18, wherein the planar signal conductors of the switch are coplanar with conductive elements on the substrate to which they are electrically coupled.

24. The device of claim 18, wherein the switch further comprises planar ground conductors adjacent either side of each planar signal conductor.

25. The device of claim 24, further comprising wirebonds coupling the planar ground conductors to conductive elements on the substrate.