Sensitivity control for nanotube sensors

• US 6,894,359 B2
• Filed: 10/26/2002
• Issued: 05/17/2005
• Est. Priority Date: 09/04/2002
• Status: Active Grant

• Current Assignee: Nanomix Incorporated (CJY Holdings Ltd.)
• Original Assignee: Nanomix Incorporated (CJY Holdings Ltd.)
• Inventors: Gabriel, Jean-Christophe P., Gruner, George, Star, Alexander, Bradley, Keith, Collins, Philip G.
• Primary Examiner(s): THOMPSON, CRAIG
• Application Number:
  US10/280,265
• Publication Number:
  US 20040043527A1
• Time in Patent Office: 934 Days
• Field of Search: 257/414, 257/253, 257/53, 257/798, 977/DIG.1
• US Class Current: 257/414
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01N 27/129 Diode type sensors, e.g. gas sensitive Schottky diodes capacitor type sensors G01N27/227; field-effect transistor type sensors G01N27/414
• CPC Class Codes: Y10S 977/734 Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.

Abstract

Nanostructure sensing devices for detecting an analyte are described. The devices include nanostructures connected to conductive elements, all on a substrate. Contact regions adjacent to points of contact between the nanostructures and the conductive elements are given special treatment. The proportion of nanostructure surface area within contact regions can be maximized to effect sensing at very low analyte concentrations. The contact regions can be passivated in an effort to prevent interaction between the environment and the contact regions for sensing at higher analyte concentrations and for reducing cross-sensing. Both contact regions and at least some portion of the nanostructures can be covered with a material that is at least partially permeable to the analyte of interest and impermeable to some other species to tune selectivity and sensitivity of the nanostructure sensing device.

Claims

1. A nanostructure sensing device for detecting an analyte, comprising:

a substrate;

a first nanostructure disposed over the substrate;

a first conductive element disposed over the substrate and forming a first electrical junction with a first nanostructure;

a second conductive element disposed over the substrate and forming a second electrical junction with the first nanostructure;

contact regions adjacent to junctions of the conductive elements and the first nanostructure; and

inhibiting material on at least the contact regions.

2. The nanostructure sensing device of claim 1, further comprising a gate electrode in proximity to the first nanostructure.

3. The nanostructure sensing device of claim 2, wherein the gate electrode is an undifferentiated gate electrode.

4. The nanostructure sensing device of claim 1, further comprising a trench in the substrate below at least a portion of the first nanostructure.

5. The nanostructure sensing device of claim 1, wherein the first nanostructure is selected from the group consisting of nanotubes, nanowires, nanofibers, and nanorods.

6. The nanostructure sensing device of claim 1, wherein the first nanostructure comprises a single-wall carbon nanotube.

7. The nanostructure sensing device of claim 1, wherein the substrate comprises a top layer facing the first nanostructure.

8. The nanostructure sensing device of claim 7, wherein the top layer comprises a material selected from the group consisting of semiconductors, semiconductor oxides, semiconductor nitrides, and combinations thereof.

9. The nanostructure sensing device of claim 7, wherein the top layer comprises a gate dielectric.

10. The nanostructure sensing device of claim 7, wherein the top layer comprises a diffusion barrier to metals.

11. The nanostructure sensing device of claim 1, wherein the conductive elements comprise metal lines in contact with the substrate.

12. The nanostructure sensing device of claim 1, wherein the contact regions comprise Schottky barriers.

13. The nanostructure sensing device of claim 1, wherein the contact region extends at least 5 nm from the junctions of the conductive elements with the first nanostructure along surfaces of the conductive elements and the first nanostructure.

14. The nanostructure sensing device of claim 1, wherein the contact region extends at least 50 nm from the junctions of the conductive elements with the first nanostructure along surfaces of the conductive elements and the first nanostructure.

15. The nanostructure sensing device of claim 1, wherein the contact region extends at least 1 μ

m from the junctions of the conductive elements with the first nanostructure along surfaces of the conductive elements and the first nanostructure.

16. The nanostructure sensing device of claim 1, wherein the inhibiting material is in direct contact with the contact regions.

17. The nanostructure sensing device of claim 1, wherein the inhibiting material is electrically insulating.

18. The nanostructure sensing device of claim 1, wherein the inhibiting material is impermeable to at least one species.

19. The nanostructure sensing device of claim 1, wherein the inhibiting material is substantially impermeable to water.

20. The nanostructure sensing device of claim 1, wherein the inhibiting material is substantially impermeable to the analyte.

21. The nanostructure sensing device of claim 1, wherein the inhibiting material comprises more than one material layer.

22. The nanostructure sensing device of claim 1, wherein the inhibiting material is selected from the group consisting of silicon oxides, fluorinated, hydrogenated and carbonated silicon oxides, silicon nitride, metal oxides, and combinations thereof.

23. The nanostructure sensing device of claim 1, wherein the inhibiting material covers substantially both the contact regions and at least a portion of the first conducting element.

24. The nanostructure sensing device of claim 1, wherein the at least one nanostructure comprises functionalization for the analyte.

25. The nanostructure sensing device of claim 1, wherein the inhibiting material covers both the contact regions and at least a substantial portion of the first nanostructure.

26. The nanostructure sensing device of claim 25, wherein the inhibiting material is a least partially permeable to the analyte.

27. The nanostructure sensing device of claim 26, wherein the thickness of the inhibiting material is chosen to tune selectivity for the analyte of the nanostructure sensing device.

28. The nanostructure sensing device of claim 26, wherein the thickness of the inhibiting material is chosen to tune sensitivity to the analyte of the nanostructure sensing device.

29. The device of claim 25, wherein the inhibiting material is impermeable to moisture.

30. The device of claim 25, wherein the inhibiting material is impermeable to at least one species selected from the group consisting of oxygen, ammonia, and nitrous oxide.

31. The device of claim 25, wherein the inhibiting material reduces cross sensitivity of the device.

32. The nanostructure sensing device of claim 25, wherein the inhibiting material is selected from the group consisting of Teflon™

, Nafion™

, polyethylene and polypropylene.

33. The device of claim 25, wherein the inhibiting material has a thickness between about 3 nm and 500 nm.

34. A nanostructure sensing device for detecting at least one analyte, comprising:

a substrate;

a first nanostructure disposed over the substrate;

a first conductive element disposed over the substrate and forming an electrical junction with the first nanostructure;

a second conductive element disposed over the substrate and forming an electrical junction with the first nanostructure;

a first metal node in contact with the first nanostructure; and

contact regions adjacent to junctions of the conductive elements and the first nanostructure and adjacent to contacts between the first metal node and the first nanostructure.

35. The nanostructure sensing device of claim 34, wherein the conductive elements are connected to an electric circuit that includes an electrical supply and a meter.

36. The nanostructure sensing device of claim 34, wherein the metal node is not connected to an electric circuit.

37. The nanostructure sensing device of claim 34, further comprising a gate electrode.

38. An electronic nanostructure device, comprising:

a substrate;

a first nanostructure disposed over the substrate;

a first conductive element disposed over the substrate and forming a first electrical junction with a first nanostructure;

a second conductive element disposed over the substrate and forming a second electrical junction with the first nanostructure;

contact regions adjacent to junctions of the conductive elements and the first nanostructure;

passivation material on the contact regions; and

a portion of the first nanostructure substantially free of passivation material.

39. The device of claim 38, further comprising a gate electrode in proximity to the first nanostructure.